Besen; Matthew M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Besen; Matthew M..The latest application filed is for "x-ray generation apparatus".
Company Profile
0.21.20
- Besen; Matthew M. - Andover MA
- Besen; Matthew M. - Tewksbury MA
Patent Activity
| Patent | Date |
|---|---|
| Rotary anode unit and X-ray generation apparatus Grant 11,183,356 - Besen , et al. November 23, 2 | 2021-11-23 |
| X-ray generation apparatus Grant 11,164,713 - Besen , et al. November 2, 2 | 2021-11-02 |
| X-ray Generation Apparatus App 20210305003 - BESEN; Matthew M. ; et al. | 2021-09-30 |
| Rotary Anode Unit And X-ray Generation Apparatus App 20210305004 - BESEN; Matthew M. ; et al. | 2021-09-30 |
| Laser-heated infrared source Grant 8,173,986 - Holber , et al. May 8, 2 | 2012-05-08 |
| Method for inductively-driven plasma light source Grant 8,143,790 - Smith , et al. March 27, 2 | 2012-03-27 |
| Laser-Heated Infrared Source App 20110127450 - Holber; William M. ; et al. | 2011-06-02 |
| Inductively-driven plasma light source Grant 7,948,185 - Smith , et al. May 24, 2 | 2011-05-24 |
| Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Grant 7,659,489 - Holber , et al. February 9, 2 | 2010-02-09 |
| Inductively-driven plasma light source Grant 7,569,791 - Smith , et al. August 4, 2 | 2009-08-04 |
| Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Grant 7,501,600 - Holber , et al. March 10, 2 | 2009-03-10 |
| Inventory control and communication system App 20080183599 - Hill; Gordon W. ; et al. | 2008-07-31 |
| Inductively-Driven Plasma Light Source App 20080042591 - Smith; Donald K. ; et al. | 2008-02-21 |
| Inductively-driven plasma light source Grant 7,307,375 - Smith , et al. December 11, 2 | 2007-12-11 |
| Inductively-driven plasma light source App 20070210717 - Smith; Donald K. ; et al. | 2007-09-13 |
| Method and apparatus for fluorine generation and recirculation Grant 7,238,266 - Smith , et al. July 3, 2 | 2007-07-03 |
| Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectric Vacuum Vessel App 20070145023 - Holber; William M. ; et al. | 2007-06-28 |
| Inductively-driven plasma light source App 20070075053 - Smith; Donald K. ; et al. | 2007-04-05 |
| Inductively-driven light source for lithography Grant 7,199,384 - Smith , et al. April 3, 2 | 2007-04-03 |
| Inductively-driven light source for microscopy Grant 7,183,717 - Smith , et al. February 27, 2 | 2007-02-27 |
| Isolation valve for energetic and high temperature gases App 20060249702 - Besen; Matthew M. ; et al. | 2006-11-09 |
| Inductively-driven plasma light source App 20060017387 - Smith; Donald K. ; et al. | 2006-01-26 |
| Inductively-driven light source for lithography App 20060006345 - Smith; Donald K. ; et al. | 2006-01-12 |
| Inductively-driven light source for microscopy App 20060006808 - Smith; Donald K. ; et al. | 2006-01-12 |
| Inductively-driven plasma light source App 20060006775 - Smith; Donald K. ; et al. | 2006-01-12 |
| Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel App 20050145173 - Holber, William M. ; et al. | 2005-07-07 |
| Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Grant 6,872,909 - Holber , et al. March 29, 2 | 2005-03-29 |
| Flow control valve with magnetic field sensor App 20040246649 - Besen, Matthew M. | 2004-12-09 |
| Ion storage system App 20040217285 - Smith, Donald K. ; et al. | 2004-11-04 |
| Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel App 20040206730 - Holber, William M. ; et al. | 2004-10-21 |
| Ion storage system Grant 6,781,119 - Smith , et al. August 24, 2 | 2004-08-24 |
| Method and apparatus for fluorine generation and recirculation App 20040109817 - Smith, Donald K. ; et al. | 2004-06-10 |
| Inventory control and communication system App 20040034581 - Hill, Gordon W. ; et al. | 2004-02-19 |
| Radial flow turbomolecular vacuum pump Grant 6,508,631 - Smith , et al. January 21, 2 | 2003-01-21 |
| Ion storage system App 20020162957 - Smith, Donald K. ; et al. | 2002-11-07 |
| Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate Grant 5,688,382 - Besen , et al. November 18, 1 | 1997-11-18 |
| Ozone and other reactive gas generator cell and system Grant 5,637,279 - Besen , et al. June 10, 1 | 1997-06-10 |
| Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube Grant 5,625,259 - Holber , et al. April 29, 1 | 1997-04-29 |
| Fluid-cooled dielectric window for a plasma system Grant 5,568,015 - Holber , et al. October 22, 1 | 1996-10-22 |
| Microwave plasma reactor Grant 5,556,475 - Besen , et al. September 17, 1 | 1996-09-17 |
| Microwave plasma reactor Grant 5,501,740 - Besen , et al. March 26, 1 | 1996-03-26 |
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