Patent | Date |
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Laser gas injection system Grant 7,835,414 - Dunstan , et al. November 16, 2 | 2010-11-16 |
Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control Grant 7,741,639 - Besaucele , et al. June 22, 2 | 2010-06-22 |
Very narrow band, two chamber, high rep-rate gas discharge laser system Grant 7,567,607 - Knowles , et al. July 28, 2 | 2009-07-28 |
Gas discharge laser output light beam parameter control Grant 7,471,708 - Besaucele , et al. December 30, 2 | 2008-12-30 |
Laser gas injection system App 20080205472 - Dunstan; Wayne J. ;   et al. | 2008-08-28 |
Line selected F.sub.2 two chamber laser system Grant 7,218,661 - Knowles , et al. May 15, 2 | 2007-05-15 |
Gas discharge laser output light beam parameter control App 20060227839 - Besaucele; Herve A. ;   et al. | 2006-10-12 |
Very narrow band, two chamber, high rep-rate gas discharge laser system App 20060126697 - Knowles; David S. ;   et al. | 2006-06-15 |
Very narrow band, two chamber, high rep-rate gas discharge laser system Grant 7,061,961 - Knowles , et al. June 13, 2 | 2006-06-13 |
Line selected F2 two chamber laser system Grant 7,058,107 - Knowles , et al. June 6, 2 | 2006-06-06 |
Very narrow band, two chamber, high reprate gas discharge laser system Grant 6,985,508 - Knowles , et al. January 10, 2 | 2006-01-10 |
Very Narrow Band, Two Chamber, High Rep-rate Gas Discharge Laser System App 20050271109 - Knowles, David S. ;   et al. | 2005-12-08 |
Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control App 20050094698 - Besaucele, Herve A. ;   et al. | 2005-05-05 |
Line selected F2 two chamber laser system App 20040258122 - Knowles, David S. ;   et al. | 2004-12-23 |
Line selected F2 two chamber laser system Grant 6,801,560 - Knowles , et al. October 5, 2 | 2004-10-05 |
Line selected F2 two chamber laser system App 20040174919 - Knowles, David S. ;   et al. | 2004-09-09 |
Very narrow band, two chamber, high reprate gas discharge laser system App 20040047385 - Knowles, David S. ;   et al. | 2004-03-11 |
Lithography laser with beam delivery and beam pointing control Grant 6,704,339 - Lublin , et al. March 9, 2 | 2004-03-09 |
Very narrow band, two chamber, high rep rate gas discharge laser system Grant 6,625,191 - Knowles , et al. September 23, 2 | 2003-09-23 |
Very narrow band, two chamber, high rep rate gas discharge laser system Grant 6,567,450 - Myers , et al. May 20, 2 | 2003-05-20 |
ArF laser with low pulse energy and high rep rate Grant 6,553,049 - Besaucele , et al. April 22, 2 | 2003-04-22 |
Reliable, modular, production quality narrow-band high rep rate F2 laser Grant RE38,054 - Hofmann , et al. April 1, 2 | 2003-04-01 |
Lithography laser with beam delivery and beam pointing control App 20030043876 - Lublin, Leonard ;   et al. | 2003-03-06 |
Very narrow band, two chamber, high rep rate gas discharge laser system App 20020154668 - Knowles, David S. ;   et al. | 2002-10-24 |
Line selected F2 two chamber laser system App 20020154671 - Knowles, David S. ;   et al. | 2002-10-24 |
Very narrow band, two chamber, high rep rate gas discharge laser system App 20020044586 - Myers, David W. ;   et al. | 2002-04-18 |
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser Grant 6,330,261 - Ishihara , et al. December 11, 2 | 2001-12-11 |
Narrow band gas discharge laser with gas additive Grant 6,188,710 - Besaucele , et al. February 13, 2 | 2001-02-13 |
Reliable modular production quality narrow-band high REP rate excimer laser Grant 6,128,323 - Myers , et al. October 3, 2 | 2000-10-03 |
Laser-illuminated stepper or scanner with energy sensor feedback Grant 6,067,306 - Sandstrom , et al. May 23, 2 | 2000-05-23 |
Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser Grant 6,018,537 - Hofmann , et al. January 25, 2 | 2000-01-25 |
Reliable. modular, production quality narrow-band KRF excimer laser Grant 5,991,324 - Knowles , et al. November 23, 1 | 1999-11-23 |
Laser chamber with minimized acoustic and shock wave disturbances Grant 5,978,405 - Juhasz , et al. November 2, 1 | 1999-11-02 |