Bertuch; Adam
Patent Applications and Registrations
Patent applications and USPTO patent grants for Bertuch; Adam.The latest application filed is for "chuck systems and methods having enhanced electrical isolation for substrate-biased ald".
- Bertuch; Adam - South Hamilton MA
- Bertuch; Adam - Boston MA
- Bertuch; Adam - Salem MA
| Patent | Date |
|---|---|
| Chuck systems and methods having enhanced electrical isolation for substrate-biased ALD Grant 10,844,488 - Sershen , et al. November 24, 2 | 2020-11-24 |
| Chuck Systems and Methods Having Enhanced Electrical Isolation For Substrate-Biased ALD App 20180216229 - Sershen; Michael J. ; et al. | 2018-08-02 |
| Pe-ald Methods With Reduced Quartz-based Contamination App 20170241019 - Sowa; Mark J. ; et al. | 2017-08-24 |
| Vapor Delivery System App 20170145564 - Bertuch; Adam ; et al. | 2017-05-25 |
| Method And Apparatus For Precursor Delivery App 20110311726 - Liu; Guo ; et al. | 2011-12-22 |
| Methods for monitoring ion implant process in bond and cleave, silicon-on-insulator (SOI) wafer manufacturing App 20080182347 - Steeples; Kenneth ; et al. | 2008-07-31 |
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