| Patent | Date |
|---|
Direct liquid injection for halide vapor phase epitaxy systems and methods
Grant 9,644,285 - Bertram, Jr. May 9, 2 | 2017-05-09 |
Gas injectors including a funnel- or wedge-shaped channel for chemical vapor deposition (CVD) systems and CVD systems with the same
Grant 9,481,944 - Arena , et al. November 1, 2 | 2016-11-01 |
Deposition Systems Having Access Gates At Desirable Locations, And Related Methods
App 20160145767 - Bertram, JR.; Ronald Thomas ; et al. | 2016-05-26 |
Apparatus for delivering precursor gases to an epitaxial growth substrate
Grant 9,175,419 - Arena , et al. November 3, 2 | 2015-11-03 |
Template layers for heteroepitaxial deposition of III-nitride semiconductor materials using HVPE processes
Grant 9,076,666 - Arena , et al. July 7, 2 | 2015-07-07 |
Gas Injection Components For Deposition Systems And Related Methods
App 20150167161 - Canizares; Claudio ; et al. | 2015-06-18 |
Gas Injection Components For Deposition Systems, Deposition Systems Including Such Components, And Related Methods
App 20150099065 - Canizares; Claudio ; et al. | 2015-04-09 |
Template Layers For Heteroepitaxial Deposition Of Iii Nitride Semiconductor Materials Using Hvpe Processes
App 20140217553 - Arena; Chantal ; et al. | 2014-08-07 |
Thermalization of gaseous precursors in CVD reactors
Grant 8,741,385 - Arena , et al. June 3, 2 | 2014-06-03 |
Epitaxial methods and templates grown by the methods
Grant 8,574,968 - Arena , et al. November 5, 2 | 2013-11-05 |
Methods Of Depositing A Semiconductor Material On A Substrate
App 20130280892 - Bertram, JR.; Ronald Thomas | 2013-10-24 |
Methods For Forming Group Iii-nitride Materials And Structures Formed By Such Methods
App 20130234157 - Arena; Chantal ; et al. | 2013-09-12 |
Gas Injectors For Chemical Vapour Deposition (cvd) Systems And Cvd Systems With The Same
App 20130199441 - Arena; Chantal ; et al. | 2013-08-08 |
Thermalizing gas injectors for generating increased precursor gas, material deposition systems including such injectors, and related methods
Grant 8,486,192 - Bertram, Jr. July 16, 2 | 2013-07-16 |
Processes And Systems For Reducing Undesired Deposits Within A Reaction Chamber Associated With A Semiconductor Deposition System
App 20130160802 - Bertram, JR.; Ronald Thomas | 2013-06-27 |
Transfer of high temperature wafers
Grant 8,455,370 - Tischler , et al. June 4, 2 | 2013-06-04 |
Thermalization Of Gaseous Precursors In Cvd Reactors
App 20130137247 - Arena; Chantal ; et al. | 2013-05-30 |
UV absorption based monitor and control of chloride gas stream
Grant 8,431,419 - Bertram, Jr. , et al. April 30, 2 | 2013-04-30 |
Thermalization of gaseous precursors in CVD reactors
Grant 8,388,755 - Arena , et al. March 5, 2 | 2013-03-05 |
Deposition Systems Including A Precursor Gas Furnace Within A Reaction Chamber, And Related Methods
App 20130047918 - Bertram, JR.; Ronald Thomas ; et al. | 2013-02-28 |
Direct Liquid Injection For Halide Vapor Phase Epitaxy Systems And Methods
App 20130047917 - Bertram, JR.; Ronald Thomas | 2013-02-28 |
Deposition Systems Having Access Gates At Desirable Locations, And Related Methods
App 20130052806 - Bertram, JR.; Ronald Thomas ; et al. | 2013-02-28 |
Transfer Of High Temperature Wafers
App 20120164843 - Tischler; Michael Albert ; et al. | 2012-06-28 |
Transfer of high temperature wafers
Grant 8,153,536 - Tischler , et al. April 10, 2 | 2012-04-10 |
Thermalizing Gas Injectors For Generating Increased Precursor Gas, Material Deposition Systems Including Such Injectors, And Related Methods
App 20120083100 - Bertram, JR.; Ronald Thomas | 2012-04-05 |
Systems And Methods For A Gas Treatment Of A Number Of Substrates
App 20110305835 - Bertram, JR.; Ronald Thomas ; et al. | 2011-12-15 |
Gas Injectors For Cvd Systems With The Same
App 20110277681 - Arena; Chantal ; et al. | 2011-11-17 |
Uv Absorption Based Monitor And Control Of Chloride Gas Stream
App 20110212546 - Bertram Jr.; Ronald Thomas ; et al. | 2011-09-01 |
Modular And Readily Configurable Reactor Enclosures And Associated Function Modules
App 20110033610 - Bertram, JR.; Ronald Thomas | 2011-02-10 |
Apparatus For Delivering Precursor Gases To An Epitaxial Growth Substrate
App 20100258053 - Arena; Chantal ; et al. | 2010-10-14 |
Transfer Of High Temperature Wafers
App 20100216316 - Tischler; Michael Albert ; et al. | 2010-08-26 |
Methods For In-situ Chamber Cleaning Process For High Volume Manufacture Of Semiconductor Materials
App 20100180913 - Arena; Chantal ; et al. | 2010-07-22 |
Thermalization Of Gaseous Precursors In Cvd Reactors
App 20090214785 - Arena; Chantal ; et al. | 2009-08-27 |
Epitaxial Methods And Templates Grown By The Methods
App 20090098343 - ARENA; Chantal ; et al. | 2009-04-16 |
| 