| Patent | Date |
|---|
Ultra-high vacuum transport and storage
Grant 10,153,282 - Panagopoulos , et al. Dec | 2018-12-11 |
Systems and methods for forming ultra-shallow junctions
Grant 9,543,150 - Kim , et al. January 10, 2 | 2017-01-10 |
Systems And Methods For Forming Ultra-shallow Junctions
App 20160365251 - Kim; Yunsang ; et al. | 2016-12-15 |
Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films
Grant 9,514,954 - Thedjoisworo , et al. December 6, 2 | 2016-12-06 |
Peroxide-vapor Treatment For Enhancing Photoresist-strip Performance And Modifying Organic Films
App 20150357202 - Thedjoisworo; Bayu Atmaja ; et al. | 2015-12-10 |
Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process
Grant 9,128,382 - Berry , et al. September 8, 2 | 2015-09-08 |
Plasma Mediated Ashing Processes That Include Formation Of A Protective Layer Before And/or During The Plasma Mediated Ashing Process
App 20140103010 - Berry; Ivan ; et al. | 2014-04-17 |
Substantially Non-oxidizing Plasma Treatment Devices And Processes
App 20130248113 - Geissbuhler; Phillip ; et al. | 2013-09-26 |
Plasma Generating Apparatus And Process For Simultaneous Exposure Of A Workpiece To Electromagnetic Radiation And Plasma
App 20130160793 - Srivastava; Aseem K. ; et al. | 2013-06-27 |
Substantially Non-Oxidizing Plasma Treatment Devices and Processes
App 20110136346 - Geissbuhler; Phillip ; et al. | 2011-06-09 |
Structures and methods for measuring beam angle in an ion implanter
Grant 7,728,293 - Rubin , et al. June 1, 2 | 2010-06-01 |
Front End Of Line Plasma Mediated Ashing Processes And Apparatus
App 20100130017 - Luo; Shijian ; et al. | 2010-05-27 |
Ultraviolet assisted pore sealing of porous low k dielectric films
Grant 7,704,872 - Waldfried , et al. April 27, 2 | 2010-04-27 |
Ultraviolet assisted pore sealing of porous low k dielectric films
Grant 7,678,682 - Waldfried , et al. March 16, 2 | 2010-03-16 |
Plasma Mediated Ashing Processes That Include Formation Of A Protective Layer Before And/or During The Plasma Mediated Ashing Process
App 20090277871 - Berry; Ivan ; et al. | 2009-11-12 |
Structures And Methods For Measuring Beam Angle In An Ion Implanter
App 20090140717 - Rubin; Leonard M. ; et al. | 2009-06-04 |
Ultraviolet assisted pore sealing of porous low K dielectric films
App 20070134935 - Waldfried; Carlo ; et al. | 2007-06-14 |
Ultraviolet assisted pore sealing of porous low k dielectric films
App 20060105566 - Waldfried; Carlo ; et al. | 2006-05-18 |
Plasma process and apparatus
Grant 6,897,615 - Janos , et al. May 24, 2 | 2005-05-24 |
Plasma process for removing polymer and residues from substrates
Grant 6,834,656 - Qingyuan , et al. December 28, 2 | 2004-12-28 |
Process for optically erasing charge buildup during fabrication of an integrated circuit
Grant 6,803,319 - Janos , et al. October 12, 2 | 2004-10-12 |
Drying process for low-k dielectric films
App 20040099283 - Waldfried, Carlo ; et al. | 2004-05-27 |
Method of photoresist ash residue removal
Grant 6,734,120 - Berry , et al. May 11, 2 | 2004-05-11 |
Chemical plasma cathode
Grant 6,673,197 - Penelon , et al. January 6, 2 | 2004-01-06 |
Dielectric barrier discharge apparatus and process for treating a substrate
Grant 6,664,737 - Berry , et al. December 16, 2 | 2003-12-16 |
Oxygen free plasma stripping process
Grant 6,638,875 - Han , et al. October 28, 2 | 2003-10-28 |
Plasma ashing process
Grant 6,630,406 - Waldfried , et al. October 7, 2 | 2003-10-07 |
Process For Optically Erasing Charge Buildup During Fabrication Of An Integrated Circuit
App 20030180976 - Janos, Alan C. ; et al. | 2003-09-25 |
Process for optically erasing charge buildup during fabrication of an integrated circuit
Grant 6,605,484 - Janos , et al. August 12, 2 | 2003-08-12 |
Chemical plasma cathode
App 20030102085 - Penelon, Joel ; et al. | 2003-06-05 |
Process For Optically Erasing Charge Buildup During Fabrication Of An Integrated Circuit
App 20030104644 - Janos, Alan C. ; et al. | 2003-06-05 |
Plasma ashing process
Grant 6,548,416 - Han , et al. April 15, 2 | 2003-04-15 |
Plasma ashing process
App 20030032300 - Waldfried, Carlo ; et al. | 2003-02-13 |
Plasma Ashing Process
App 20030022511 - Han, Qingyuan ; et al. | 2003-01-30 |
Plasma process for removing polymer and residues from substrates
App 20020185151 - Qingyuan, Han ; et al. | 2002-12-12 |
Plasma process and apparatus
App 20020135308 - Janos, Alan C. ; et al. | 2002-09-26 |
Chemical plasma cathode
App 20020069828 - Penelon, Joel ; et al. | 2002-06-13 |
Oxygen free plasma stripping process
App 20010027016 - Han, Qingyan ; et al. | 2001-10-04 |
Oxygen free plasma stripping process
Grant 6,281,135 - Han , et al. August 28, 2 | 2001-08-28 |
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