| Patent | Date |
|---|
Plasma Etch Tool For High Aspect Ratio Etching
App 20220165546 - Lill; Thorsten ; et al. | 2022-05-26 |
Ion Beam Etching With Sidewall Cleaning
App 20220131071 - Lill; Thorsten ; et al. | 2022-04-28 |
Ion beam etching utilizing cryogenic wafer temperatures
Grant 11,289,306 - Lill , et al. March 29, 2 | 2022-03-29 |
Method and apparatus for processing wafer-shaped articles
Grant 11,195,730 - Obweger , et al. December 7, 2 | 2021-12-07 |
Electron Excitation Atomic Layer Etch
App 20210280433 - Berry, III; Ivan L. ; et al. | 2021-09-09 |
Ion injector and lens system for ion beam milling
Grant 11,062,920 - Berry, III , et al. July 13, 2 | 2021-07-13 |
Ion beam etch without need for wafer tilt or rotation
Grant 10,998,167 - Berry, III , et al. May 4, 2 | 2021-05-04 |
Ion beam etch without need for wafer tilt or rotation
Grant 10,825,652 - Berry, III , et al. November 3, 2 | 2020-11-03 |
Isotropic atomic layer etch for silicon oxides using no activation
Grant 10,679,868 - Berry, III , et al. | 2020-06-09 |
Differentially pumped reactive gas injector
Grant 10,580,628 - Berry, III , et al. | 2020-03-03 |
Method and apparatus for processing wafer-shaped articles
Grant 10,490,426 - Obweger , et al. Nov | 2019-11-26 |
Use of ion beam etching to generate gate-all-around structure
Grant 10,483,085 - Berry, III , et al. Nov | 2019-11-19 |
Predicting Etch Characteristics In Thermal Etching And Atomic Layer Etching
App 20190340316 - Lill; Thorsten ; et al. | 2019-11-07 |
Ion Beam Etch Without Need For Wafer Tilt Or Rotation
App 20190237298 - Berry, III; Ivan L. ; et al. | 2019-08-01 |
Systems And Methods For Patterning Of High Density Standalone Mram Devices
App 20180233662 - Berry, III; Ivan L. ; et al. | 2018-08-16 |
Ion Injector And Lens System For Ion Beam Milling
App 20180166304 - Berry, III; Ivan L. ; et al. | 2018-06-14 |
Apparatus For Achieving Ultra-high Selectivity While Etching Silicon Nitride
App 20180158692 - Zhu; Helen H. ; et al. | 2018-06-07 |
Ion injector and lens system for ion beam milling
Grant 9,916,993 - Berry, III , et al. March 13, 2 | 2018-03-13 |
Method for achieving ultra-high selectivity while etching silicon nitride
Grant 9,911,620 - Zhu , et al. March 6, 2 | 2018-03-06 |
Differentially Pumped Reactive Gas Injector
App 20180047548 - Berry, III; Ivan L. ; et al. | 2018-02-15 |
Ion Beam Etching Utilizing Cryogenic Wafer Temperatures
App 20170372911 - Lill; Thorsten ; et al. | 2017-12-28 |
Differentially pumped reactive gas injector
Grant 9,837,254 - Berry, III , et al. December 5, 2 | 2017-12-05 |
Control Of The Incidence Angle Of An Ion Beam On A Substrate
App 20170330788 - Angelov; Ivelin ; et al. | 2017-11-16 |
Control of the incidence angle of an ion beam on a substrate
Grant 9,812,349 - Angelov , et al. November 7, 2 | 2017-11-07 |
Ion beam etching utilizing cryogenic wafer temperatures
Grant 9,779,955 - Lill , et al. October 3, 2 | 2017-10-03 |
Ion Beam Etching Utilizing Cryogenic Wafer Temperatures
App 20170250087 - Lill; Thorsten ; et al. | 2017-08-31 |
Plasma dry strip pretreatment to enhance ion implanted resist removal
Grant 9,740,104 - Berry, III , et al. August 22, 2 | 2017-08-22 |
Conformal Doping Using Dopant Gas On Hydrogen Plasma Treated Surface
App 20170170018 - Kim; Yunsang ; et al. | 2017-06-15 |
Control Of The Incidence Angle Of An Ion Beam On A Substrate
App 20170154804 - Angelov; Ivelin ; et al. | 2017-06-01 |
Computer Addressable Plasma Density Modification For Etch And Deposition Processes
App 20170133202 - Berry, III; Ivan L. | 2017-05-11 |
Use Of Ion Beam Etching To Generate Gate-all-around Structure
App 20170062181 - Berry, III; Ivan L. ; et al. | 2017-03-02 |
Use of ion beam etching to generate gate-all-around structure
Grant 9,536,748 - Berry, III , et al. January 3, 2 | 2017-01-03 |
Isotropic Atomic Layer Etch For Silicon Oxides Using No Activation
App 20160329221 - Berry, III; Ivan L. ; et al. | 2016-11-10 |
Ion Injector And Lens System For Ion Beam Milling
App 20160307781 - Berry, III; Ivan L. ; et al. | 2016-10-20 |
Isotropic atomic layer etch for silicon and germanium oxides
Grant 9,431,268 - Lill , et al. August 30, 2 | 2016-08-30 |
Method For Achieving Ultra-high Selectivity While Etching Silicon Nitride
App 20160247688 - Zhu; Helen H. ; et al. | 2016-08-25 |
Isotropic atomic layer etch for silicon oxides using no activation
Grant 9,425,041 - Berry, III , et al. August 23, 2 | 2016-08-23 |
Ion injector and lens system for ion beam milling
Grant 9,406,535 - Berry, III , et al. August 2, 2 | 2016-08-02 |
Isotropic Atomic Layer Etch For Silicon Oxides Using No Activation
App 20160196969 - Berry, III; Ivan L. ; et al. | 2016-07-07 |
Isotropic Atomic Layer Etch For Silicon And Germanium Oxides
App 20160196984 - Lill; Thorsten ; et al. | 2016-07-07 |
Selective Nitride Etch
App 20160181116 - Berry, III; Ivan L. ; et al. | 2016-06-23 |
Use Of Ion Beam Etching To Generate Gate-all-around Structure
App 20160111294 - Berry, III; Ivan L. ; et al. | 2016-04-21 |
Method And Apparatus For Processing Wafer-shaped Articles
App 20160064242 - OBWEGER; Rainer ; et al. | 2016-03-03 |
Ion Injector And Lens System For Ion Beam Milling
App 20160064260 - Berry, III; Ivan L. ; et al. | 2016-03-03 |
Ion Beam Etch Without Need For Wafer Tilt Or Rotation
App 20160064232 - Berry, III; Ivan L. ; et al. | 2016-03-03 |
Differentially Pumped Reactive Gas Injector
App 20160049281 - Berry, III; Ivan L. ; et al. | 2016-02-18 |
Plasma Dry Strip Pretreatment To Enhance Ion Implanted Resist Removal
App 20150316857 - Berry, III; Ivan L. ; et al. | 2015-11-05 |
Methods for in situ surface treatment in an ion implantation system
Grant 7,888,661 - Berry, III February 15, 2 | 2011-02-15 |
Methods For In Situ Surface Treatment In An Ion Implantation System
App 20090200493 - Berry, III; Ivan L. | 2009-08-13 |
Use of ion induced luminescence (IIL) as feedback control for ion implantation
Grant 7,473,909 - Berry, III January 6, 2 | 2009-01-06 |
Fluorine-free plasma curing process for porous low-k materials
Grant 7,011,868 - Waldfried , et al. March 14, 2 | 2006-03-14 |
Plasma curing process for porous low-k materials
Grant 6,913,796 - Albano , et al. July 5, 2 | 2005-07-05 |
Plasma curing of MSQ-based porous low-k film materials
Grant 6,759,098 - Han , et al. July 6, 2 | 2004-07-06 |
Ultraviolet curing processes for advanced low-k materials
Grant 6,756,085 - Waldfried , et al. June 29, 2 | 2004-06-29 |
Plasma curing process for porous silica thin film
Grant 6,558,755 - Berry, III , et al. May 6, 2 | 2003-05-06 |
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