Berrian; Donald W.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Berrian; Donald W..The latest application filed is for "ion beam profiler".
- Berrian; Donald W. - Topsfield MA
| Patent | Date |
|---|---|
| Particulate prevention in ion implantation Grant 7,547,898 - Berrian , et al. June 16, 2 | 2009-06-16 |
| Ion beam profiler Grant 7,381,977 - Pollock , et al. June 3, 2 | 2008-06-03 |
| Reciprocating drive for scanning a workpiece Grant 7,323,695 - Vanderpot , et al. January 29, 2 | 2008-01-29 |
| System and method for rapidly controlling the output of an ion source for ion implantation Grant 7,247,863 - Berrian July 24, 2 | 2007-07-24 |
| Ion beam profiler App 20070069156 - Pollock; John D. ; et al. | 2007-03-29 |
| Particulate prevention in ion implantation App 20060284116 - Berrian; Donald W. ; et al. | 2006-12-21 |
| Method for reciprocating a workpiece through an ion beam Grant 7,141,809 - Vanderpot , et al. November 28, 2 | 2006-11-28 |
| Reciprocating drive for scanning a workpiece through an ion beam Grant 7,135,691 - Vanderpot , et al. November 14, 2 | 2006-11-14 |
| Method for reciprocating a workpiece through an ion beam App 20050232749 - Vanderpot, John W. ; et al. | 2005-10-20 |
| Reciprocating drive for scanning a workpiece App 20050232748 - Vanderpot, John W. ; et al. | 2005-10-20 |
| Reciprocating drive for scanning a workpiece through an ion beam App 20050230643 - Vanderpot, John W. ; et al. | 2005-10-20 |
| Substrate positioning system Grant 6,921,907 - Vanderpot , et al. July 26, 2 | 2005-07-26 |
| System and method for implanting a wafer with an ion beam Grant 6,833,552 - Berrian December 21, 2 | 2004-12-21 |
| Substrate positioning system App 20040245480 - Vanderpot, John W. ; et al. | 2004-12-09 |
| Substrate positioning system Grant 6,777,687 - Vanderpot , et al. August 17, 2 | 2004-08-17 |
| Hybrid scanning system and methods for ion implantation Grant 6,765,219 - Berrian , et al. July 20, 2 | 2004-07-20 |
| System and method for implanting a wafer with an ion beam App 20040084636 - Berrian, Donald W. | 2004-05-06 |
| System and method for uniformly implanting a wafer with an ion beam Grant 6,677,599 - Berrian January 13, 2 | 2004-01-13 |
| Ion implantation uniformity correction using beam current control Grant 6,661,016 - Berrian December 9, 2 | 2003-12-09 |
| High efficiency scanning in ion implanters Grant 6,580,083 - Berrian June 17, 2 | 2003-06-17 |
| System and method for amplifying an angle of divergence of a scanned ion beam App 20030001110 - Enge, Harald ; et al. | 2003-01-02 |
| Substrate positioning system App 20020134950 - Vanderpot, John W. ; et al. | 2002-09-26 |
| Substrate positioning system App 20020125446 - Vanderpot, John W. ; et al. | 2002-09-12 |
| Hybrid scanning system and methods for ion implantation App 20020109106 - Berrian, Donald W. ; et al. | 2002-08-15 |
| System and method for rapidly controlling the output of an ion source for ion implantation App 20020053642 - Berrian, Donald W. | 2002-05-09 |
| Magnetic scanning system with a nonzero field App 20020050569 - Berrian, Donald W. | 2002-05-02 |
| High efficiency scanning in ion implanters App 20020003215 - Berrian, Donald W. | 2002-01-10 |
| Ion implantation uniformity correction using beam current control App 20010054698 - Berrian, Donald W. | 2001-12-27 |
| System and method for uniformity enhancement during ion implantation App 20010032937 - Berrian, Donald W. | 2001-10-25 |
| Disposable electronic monitor device Grant RE36,200 - Berrian , et al. April 27, 1 | 1999-04-27 |
| Methods and apparatus for measuring temperatures at high potential Grant 5,806,980 - Berrian September 15, 1 | 1998-09-15 |
| Disposable electronic monitor device Grant 5,313,848 - Santin , et al. May 24, 1 | 1994-05-24 |
| Method and apparatus for high efficiency scanning in an ion implanter Grant 4,980,562 - Berrian , et al. December 25, 1 | 1990-12-25 |
| Ion beam scanning method and apparatus Grant 4,922,106 - Berrian , et al. May 1, 1 | 1990-05-01 |
| Pattern data handling system for an electron beam exposure system Grant 4,433,384 - Berrian , et al. February 21, 1 | 1984-02-21 |
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