Patent | Date |
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Method for temperature compensation in MEMS resonators with isolated regions of distinct material Grant 9,422,157 - Quevy , et al. August 23, 2 | 2016-08-23 |
Method For Temperature Compensation In Mems Resonators With Isolated Regions Of Distinct Material App 20150266724 - Quevy; Emmanuel P. ;   et al. | 2015-09-24 |
Out-of-plane resonator Grant 8,674,775 - Motiee , et al. March 18, 2 | 2014-03-18 |
Method for temperature compensation in MEMS resonators with isolated regions of distinct material Grant 8,669,831 - Quevy , et al. March 11, 2 | 2014-03-11 |
Out-of plane MEMS resonator with static out-of-plane deflection Grant 8,629,739 - Quevy , et al. January 14, 2 | 2014-01-14 |
Method for temperature compensation in MEMS resonators with isolated regions of distinct material Grant 8,464,418 - Quevy , et al. June 18, 2 | 2013-06-18 |
Out-of-plane Resonator App 20130002363 - Motiee; Mehrnaz ;   et al. | 2013-01-03 |
Out-of-plane Mems Resonator With Static Out-of-plane Deflection App 20120329255 - Quevy; Emmanuel P. ;   et al. | 2012-12-27 |
Out-of-plane MEMS resonator with static out-of-plane deflection Grant 8,258,893 - Quevy , et al. September 4, 2 | 2012-09-04 |
Out-of-plane Mems Resonator With Static Out-of-plane Deflection App 20110260810 - Quevy; Emmanuel P. ;   et al. | 2011-10-27 |
MEMS structure having a stress inverter temperature-compensated resonator member Grant 7,956,517 - Motiee , et al. June 7, 2 | 2011-06-07 |
MEMS structure having a stress-inducer temperature-compensated resonator member Grant 7,944,124 - Bernstein May 17, 2 | 2011-05-17 |
Method For Temperature Compensation In MEMS Resonators With Isolated Regions Of Distinct Material App 20110084781 - Quevy; Emmanuel P. ;   et al. | 2011-04-14 |
Method For Temperature Compensation In Mems Resonators With Isolated Regions Of Distinct Material App 20100093125 - Quevy; Emmanuel P. ;   et al. | 2010-04-15 |
Method for temperature compensation in MEMS resonators with isolated regions of distinct material Grant 7,639,104 - Quevy , et al. December 29, 2 | 2009-12-29 |
MEMS structure having a compensated resonating member Grant 7,591,201 - Bernstein , et al. September 22, 2 | 2009-09-22 |
MEMS structure having a stress inverter temperature-compensated resonating member Grant 7,514,853 - Howe , et al. April 7, 2 | 2009-04-07 |
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