Berney; Butch

Patent Applications and Registrations

Patent applications and USPTO patent grants for Berney; Butch.The latest application filed is for "apparatus for photoresist dry deposition".

Company Profile

5.9.9

Berney; Butch - Pleasanton CA
- Pleasanton CA US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus For Photoresist Dry Deposition App 20220308462 - Berney; Butch ; et al.	2022-09-29
Vapor Delivery Head For Preventing Stiction Of High Aspect Ratio Structures And/or Repairing High Aspect Ratio Structures App 20210366738 - BANDARAPU; Bhaskar ; et al.	2021-11-25
Method and apparatus for processing wafer-shaped articles Grant 10,861,719 - Mui , et al. December 8, 2	2020-12-08
Method and apparatus for processing wafer-shaped articles Grant 10,720,343 - Mui , et al.	2020-07-21
Method And Apparatus For Processing Wafer-shaped Articles App 20200227284 - Mui; David ; et al.	2020-07-16
Method and apparatus for processing wafer-shaped articles Grant 10679871 -	2020-06-09
Apparatus and radiant heating plate for processing wafer-shaped articles Grant 10,312,117 - Si , et al.	2019-06-04
Apparatus And Radiant Heating Plate For Processing Wafer-shaped Articles App 20180047596 - SI; Hongbo ; et al.	2018-02-15
Method And Apparatus For Processing Wafer-shaped Articles App 20170345681 - MUI; David ; et al.	2017-11-30
Minimizing arcing in a plasma processing chamber Grant 7,611,640 - Howald , et al. November 3, 2	2009-11-03
Apparatus and methods for minimizing arcing in a plasma processing chamber Grant 7,086,347 - Howald , et al. August 8, 2	2006-08-08
Inductively coupled plasma downstream strip module App 20040149223 - Collison, Wenli Z. ; et al.	2004-08-05
Inductively coupled plasma downstream strip module Grant 6,692,649 - Collison , et al. February 17, 2	2004-02-17
Apparatus and methods for minimizing arcing in a plasma processing chamber App 20030205327 - Howald, Arthur M. ; et al.	2003-11-06
Inductively coupled plasma downstream strip module App 20010023741 - Collison, Wenli Z. ; et al.	2001-09-27
Inductively coupled plasma CVD App 20010019903 - Shufflebotham, Paul Kevin ; et al.	2001-09-06
Inductively coupled plasma downstream strip module Grant 6,203,657 - Collison , et al. March 20, 2	2001-03-20
Inductively coupled plasma CVD Grant 6,184,158 - Shufflebotham , et al. February 6, 2	2001-02-06
Variable high temperature chuck for high density plasma chemical vapor deposition Grant 5,835,334 - McMillin , et al. November 10, 1	1998-11-10

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