Berner; Robert W.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Berner; Robert W..The latest application filed is for "modular semiconductor workpiece processing tool".

Company Profile

0.23.8

Berner; Robert W. - Kalispell MT
Berner; Robert W. - Eagle ID
Berner, Robert W. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plating system for semiconductor materials Grant 7,087,143 - Schmidt , et al. August 8, 2	2006-08-08
Modular semiconductor workpiece processing tool Grant 7,074,246 - Berner , et al. July 11, 2	2006-07-11
Semiconductor processing system with wafer container docking and loading station Grant 6,960,257 - Thompson , et al. November 1, 2	2005-11-01
Modular semiconductor workpiece processing tool App 20050193537 - Berner, Robert W. ; et al.	2005-09-08
Cathode current control system for a wafer electroplating apparatus Grant 6,843,894 - Berner , et al. January 18, 2	2005-01-18
Semiconductor processing system with wafer container docking and loading station Grant 6,833,035 - Thompson , et al. December 21, 2	2004-12-21
Contact assembly for supplying power to workpieces during electrochemical processing Grant 6,805,778 - Batz, Jr. , et al. October 19, 2	2004-10-19
Cathode current control system for a wafer electroplating apparatus App 20040055879 - Berner, Robert W. ; et al.	2004-03-25
Methods for plating semiconductor workpieces using a workpiece-engaging electrode assembly with sealing boot App 20040035707 - Batz, Robert W. JR. ; et al.	2004-02-26
Semiconductor processing system with wafer container docking and loading station App 20030202871 - Thompson, Raymon F. ; et al.	2003-10-30
Cathode current control system for a wafer electroplating apparatus Grant 6,627,051 - Berner , et al. September 30, 2	2003-09-30
Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas App 20030029732 - Ritzdorf, Thomas L. ; et al.	2003-02-13
Modular semiconductor workpiece processing tool App 20020194716 - Berner, Robert W. ; et al.	2002-12-26
Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas Grant 6,454,926 - Ritzdorf , et al. September 24, 2	2002-09-24
Cathode current control system for a wafer electroplating apparatus App 20020003084 - Berner, Robert W. ; et al.	2002-01-10
Cathode current control system for a wafer electroplating apparatus Grant 6,322,674 - Berner , et al. November 27, 2	2001-11-27
Modular semiconductor workpiece processing tool App 20010030101 - Berner, Robert W. ; et al.	2001-10-18
Modular semiconductor workpiece processing tool Grant 6,203,582 - Berner , et al. March 20, 2	2001-03-20
Semiconductor processing using vapor mixtures Grant 6,162,734 - Bergman , et al. December 19, 2	2000-12-19
Cathode current control system for a wafer electroplating apparatus Grant 6,139,703 - Hanson , et al. October 31, 2	2000-10-31
Process architecture and manufacturing tool sets employing hard mask patterning for use in the manufacture of one or more metallization levels on a workpiece Grant 6,120,641 - Stevens , et al. September 19, 2	2000-09-19
Semiconductor wafer processing system Grant 6,014,817 - Thompson , et al. January 18, 2	2000-01-18
Cathode current control system for a wafer electroplating apparatus Grant 6,004,440 - Hanson , et al. December 21, 1	1999-12-21
Semiconductor processing systems Grant 5,882,168 - Thompson , et al. March 16, 1	1999-03-16
Semiconductor processing system with wafer container docking and loading station Grant 5,836,736 - Thompson , et al. November 17, 1	1998-11-17
Carrierless centrifugal semiconductor processing system Grant 5,784,797 - Curtis , et al. July 28, 1	1998-07-28
Semiconductor processing systems Grant 5,784,802 - Thompson , et al. July 28, 1	1998-07-28
Processing head for semiconductor processing machines Grant 5,731,678 - Zila , et al. March 24, 1	1998-03-24
Semiconductor processing systems Grant 5,678,320 - Thompson , et al. October 21, 1	1997-10-21
Semiconductor processing system with wafer container docking and loading station Grant 5,660,517 - Thompson , et al. August 26, 1	1997-08-26
Semiconductor wafer processing system Grant 5,544,421 - Thompson , et al. August 13, 1	1996-08-13

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