Patent | Date |
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Method and device for removing pollution from a confined environment Grant 8,151,816 - Favre , et al. April 10, 2 | 2012-04-10 |
Plasma-based gas treatment system integrated in a vacuum pump Grant 7,998,426 - Maquin , et al. August 16, 2 | 2011-08-16 |
Transport pod with protection by the thermophoresis effect Grant 7,735,648 - Rival , et al. June 15, 2 | 2010-06-15 |
Apparatus for transporting substrates under a controlled atmosphere Grant 7,694,700 - Bernard , et al. April 13, 2 | 2010-04-13 |
Method and Device for Removing Pollution From a Confined Environment App 20090263216 - Favre; Arnaud ;   et al. | 2009-10-22 |
Pumping apparatus using thermal transpiration micropumps Grant 7,572,110 - Bernard , et al. August 11, 2 | 2009-08-11 |
Compact source with very bright X-ray beam Grant 7,515,687 - Bernard , et al. April 7, 2 | 2009-04-07 |
Sealed Enclosure for Transporting and Storing Semiconductor Substrates App 20080273959 - Bunod; Philippe ;   et al. | 2008-11-06 |
Station for controlling and purging a mini-environment Grant 7,350,544 - Bernard , et al. April 1, 2 | 2008-04-01 |
Compact Source With Very Bright X-ray Beam App 20070153978 - Bernard; Roland ;   et al. | 2007-07-05 |
Apparatus for conditioning the atmosphere in a chamber Grant 7,219,692 - Bernard , et al. May 22, 2 | 2007-05-22 |
Apparatus for transporting substrates under a controlled atmosphere App 20050238476 - Bernard, Roland ;   et al. | 2005-10-27 |
Transport pod with protection by the thermophoresis effect App 20050236942 - Rival, Jean-Luc ;   et al. | 2005-10-27 |
Station for controlling and purging a mini-environment App 20050160705 - Bernard, Roland ;   et al. | 2005-07-28 |
Plasma-based gas treatment system integrated in a vacuum pump App 20050142000 - Maquin, Philippe ;   et al. | 2005-06-30 |
Semiconductor component manufacturing plant with ventilated false floor Grant 6,910,497 - Bernard June 28, 2 | 2005-06-28 |
Pumping apparatus using thermal transpiration micropumps App 20050095143 - Bernard, Roland ;   et al. | 2005-05-05 |
Controlling pressure in a process chamber by variying pump speed and a regulator valve, and by injecting inert gas App 20050025634 - Bernard, Roland ;   et al. | 2005-02-03 |
Apparatus for conditioning the atmosphere in a vacuum chamber Grant 6,649,019 - Bernard , et al. November 18, 2 | 2003-11-18 |
Semiconductor component manufacturing plant with ventilated false floor App 20030205274 - Bernard, Roland | 2003-11-06 |
Method and a system for identifying gaseous effluents, and a facility provided with such a system Grant 6,643,014 - Chevalier , et al. November 4, 2 | 2003-11-04 |
Method and a system for identifying gaseous effluents, and a facility provided with such a system App 20030160956 - Chevalier, Eric ;   et al. | 2003-08-28 |
Apparatus for conditioning the atmosphere in a vacuum chamber App 20020153102 - Bernard, Roland ;   et al. | 2002-10-24 |
Apparatus for conditioning the atmosphere in a chamber App 20020022283 - Bernard, Roland ;   et al. | 2002-02-21 |
Mini-environment control system and method App 20010003572 - Bernard, Roland ;   et al. | 2001-06-14 |