Patent | Date |
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Integration Of Distributed Thermoelectric Heating And Cooling App 20220128276 - Makansi; Tarek ;   et al. | 2022-04-28 |
Integration Of Distributed Thermoelectric Heating And Cooling App 20200326107 - Makansi; Tarek ;   et al. | 2020-10-15 |
Integration of distributed thermoelectric heating and cooling Grant 10,571,162 - Makansi , et al. Feb | 2020-02-25 |
Methods And Systems For Distributed Thermoelectric Heating And Cooling App 20170261241 - Makansi; Tarek ;   et al. | 2017-09-14 |
Integration Of Distributed Thermoelectric Heating And Cooling App 20170159980 - Makansi; Tarek ;   et al. | 2017-06-08 |
Medical, topper, pet wireless, and automated manufacturing of distributed thermoelectric heating and cooling Grant 9,638,442 - Makansi , et al. May 2, 2 | 2017-05-02 |
Integration of distributed thermoelectric heating and cooling Grant 9,596,944 - Makansi , et al. March 21, 2 | 2017-03-21 |
Apparatus And Method To Improve Coatings Of A Moving Surface App 20150015889 - Berman; Michael J. | 2015-01-15 |
Method for heat dissipation on semiconductor device Grant 8,653,357 - Prather , et al. February 18, 2 | 2014-02-18 |
Medical, Topper, Pet Wireless, And Automated Manufacturing Of Distributed Thermoelectric Heating And Cooling App 20140041396 - MAKANSI; TAREK ;   et al. | 2014-02-13 |
Vehicle Text-Cell Sensor App 20130253760 - Berman; Michael J. ;   et al. | 2013-09-26 |
Method for heat dissipation on semiconductor device Grant 8,404,960 - Prather , et al. March 26, 2 | 2013-03-26 |
Integration Of Distributed Thermoelectric Heating And Cooling App 20130008181 - Makansi; Tarek ;   et al. | 2013-01-10 |
Distributed Thermoelectric String And Insulating Panel And Applications For Local Heating, Local Cooling, And Power Generation From Heat App 20120198616 - Makansi; Tarek ;   et al. | 2012-08-09 |
Determination of film thickness during chemical mechanical polishing Grant 7,751,609 - Berman July 6, 2 | 2010-07-06 |
Visual wear confirmation polishing pad Grant 7,442,113 - Berman , et al. October 28, 2 | 2008-10-28 |
Electroplating tool for semiconductor manufacture having electric field control Grant 7,332,062 - Reder , et al. February 19, 2 | 2008-02-19 |
Optical error minimization in a semiconductor manufacturing apparatus Grant 7,298,458 - Berman , et al. November 20, 2 | 2007-11-20 |
Contact resistance device for improved process control Grant 7,183,787 - Berman , et al. February 27, 2 | 2007-02-27 |
Finger positioner Grant 7,135,006 - Weber , et al. November 14, 2 | 2006-11-14 |
Optical error minimization in a semiconductor manufacturing apparatus App 20060238728 - Berman; Michael J. ;   et al. | 2006-10-26 |
Abrasive Electrolyte App 20060219572 - Berman; Michael J. ;   et al. | 2006-10-05 |
Optical error minimization in a semiconductor manufacturing apparatus Grant 7,098,996 - Berman , et al. August 29, 2 | 2006-08-29 |
Method to improve the control of electro-polishing by use of a plating electrode in an electrolyte bath App 20060185986 - Berman; Michael J. ;   et al. | 2006-08-24 |
Pad conditioner setup Grant 7,081,037 - Berman , et al. July 25, 2 | 2006-07-25 |
Method to improve the control of electro-polishing by use of a plating electrode an electrolyte bath Grant 7,067,048 - Berman , et al. June 27, 2 | 2006-06-27 |
Dual source lithography for direct write application Grant 7,023,530 - Berman , et al. April 4, 2 | 2006-04-04 |
Substrate edge scribe App 20060065985 - Berman; Michael J. ;   et al. | 2006-03-30 |
Method for heat dissipation on semiconductor device App 20060043582 - Prather; Zachary A. ;   et al. | 2006-03-02 |
Mechanism for improving the structural integrity of low-k films Grant 6,982,206 - Berman , et al. January 3, 2 | 2006-01-03 |
Method to monitor pad wear in CMP processing App 20050287927 - Berman, Michael J. ;   et al. | 2005-12-29 |
Method and apparatus to add slurry to a polishing system Grant 6,979,251 - Berman December 27, 2 | 2005-12-27 |
Method and control system for improving CMP process by detecting and reacting to harmonic oscillation Grant 6,971,944 - Berman , et al. December 6, 2 | 2005-12-06 |
Magnetic focus rings for improved copper plating App 20050258044 - Berman, Michael J. ;   et al. | 2005-11-24 |
Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer Grant 6,943,055 - Berman , et al. September 13, 2 | 2005-09-13 |
Method And Control System For Improving Cmp Process By Detecting And Reacting To Harmonic Oscillation App 20050181706 - Berman, Michael J. ;   et al. | 2005-08-18 |
Chemical mechanical electropolishing system Grant 6,927,177 - Reder , et al. August 9, 2 | 2005-08-09 |
Method to use a laser to perform the edge clean operation on a semiconductor wafer App 20050109369 - Reder, Steven ;   et al. | 2005-05-26 |
Contact resistance device for improved process control App 20050110512 - Berman, Michael J. ;   et al. | 2005-05-26 |
System and method for optimizing the electrostatic removal of a workpiece from a chuck Grant 6,898,064 - Berman , et al. May 24, 2 | 2005-05-24 |
Dual source lithography for direct write application Grant 6,894,762 - Berman , et al. May 17, 2 | 2005-05-17 |
System and method for using film deposition techniques to provide an antenna within an integrated circuit package App 20050093111 - Berman, Michael J. ;   et al. | 2005-05-05 |
Abrasive electrolyte App 20050087451 - Berman, Michael J. ;   et al. | 2005-04-28 |
Electropolishing pad App 20050087450 - Reder, Steven E. ;   et al. | 2005-04-28 |
Chemical mechanical electropolishing system App 20050090121 - Reder, Steven E. ;   et al. | 2005-04-28 |
Optical error minimization in a semiconductor manufacturing apparatus Grant 6,885,436 - Berman , et al. April 26, 2 | 2005-04-26 |
Pad conditioner setup App 20050064792 - Berman, Michael J. ;   et al. | 2005-03-24 |
Method for achieving wafer contact for electro-processing App 20050037620 - Berman, Michael J. ;   et al. | 2005-02-17 |
Method to improve the control of electro-polishing by use of a plating electrode an electrolyte bath App 20050029122 - Berman, Michael J. ;   et al. | 2005-02-10 |
Method to improve control in CMP processing App 20050026551 - Berman, Michael J> ;   et al. | 2005-02-03 |
System and method for using film deposition techniques to provide an antenna within an integrated circuit package Grant 6,849,936 - Berman , et al. February 1, 2 | 2005-02-01 |
Method and apparatus for cleaning deposited films from the edge of a wafer Grant 6,837,967 - Berman , et al. January 4, 2 | 2005-01-04 |
Method and apparatus to add slurry to a polishing system App 20040266321 - Berman, Michael J. | 2004-12-30 |
Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamber Grant 6,831,022 - Broyles , et al. December 14, 2 | 2004-12-14 |
Method to use a laser to perform the edge clean operation on a semiconductor wafer App 20040154638 - Reder, Steven ;   et al. | 2004-08-12 |
Method to improve the resolution of a photolithography system by use of a coupling layer between the photo resist and the ARC Grant 6,764,749 - Berman , et al. July 20, 2 | 2004-07-20 |
Method for the formation of active area utilizing reverse trench isolation Grant 6,743,701 - Berman , et al. June 1, 2 | 2004-06-01 |
Bonding pad isolation Grant 6,743,979 - Berman , et al. June 1, 2 | 2004-06-01 |
Mechanical stress free processing method Grant 6,739,953 - Berman , et al. May 25, 2 | 2004-05-25 |
Pad conditioning monitor Grant 6,722,948 - Berman April 20, 2 | 2004-04-20 |
Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer App 20040069407 - Berman, Michael J. ;   et al. | 2004-04-15 |
Apparatus and method to improve the resolution of photolithography systems by improving the temperature stability of the reticle App 20040067421 - Berman, Michael J. ;   et al. | 2004-04-08 |
Method of making a cosmetic sampler using bulk thin film application techniques Grant 6,691,872 - Berman , et al. February 17, 2 | 2004-02-17 |
Method to improve the resolution of a photolithography system by use of a coupling layer between the photo resist and the ARC App 20040018448 - Berman, Michael J. ;   et al. | 2004-01-29 |
Adaptable multi zone carrier App 20030211811 - Berman, Michael J. ;   et al. | 2003-11-13 |
Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamber Grant 6,630,411 - Broyles , et al. October 7, 2 | 2003-10-07 |
Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer Grant 6,627,466 - Berman , et al. September 30, 2 | 2003-09-30 |
Apparatus and method for linearly planarizing a surface of a semiconductor wafer Grant 6,464,566 - Berman , et al. October 15, 2 | 2002-10-15 |
Method and apparatus for enhancing uniformity during polishing of a semiconductor wafer Grant 6,375,550 - Berman April 23, 2 | 2002-04-23 |
Substrate position location system Grant 6,347,291 - Berman February 12, 2 | 2002-02-12 |
Pre-conditioning polishing pads for chemical-mechanical polishing Grant 6,273,798 - Berman August 14, 2 | 2001-08-14 |
Method of making a cosmetic sampler using bulk thin film application techniques Grant 6,182,420 - Berman , et al. February 6, 2 | 2001-02-06 |
Automated inspection system for residual metal after chemical-mechanical polishing Grant 6,108,093 - Berman August 22, 2 | 2000-08-22 |
Pre-conditioning polishing pads for chemical-mechanical polishing Grant 5,990,010 - Berman November 23, 1 | 1999-11-23 |
Automated endpoint detection system during chemical-mechanical polishing Grant 5,985,679 - Berman November 16, 1 | 1999-11-16 |
Use of ethylene glycol as a corrosion inhibitor during cleaning after metal chemical mechanical polishing Grant 5,893,756 - Berman , et al. April 13, 1 | 1999-04-13 |
Odorant composition delivery system and method Grant 5,885,701 - Berman , et al. March 23, 1 | 1999-03-23 |
Chemical mechanical polishing pad slurry distribution grooves Grant 5,882,251 - Berman , et al. March 16, 1 | 1999-03-16 |
Method for determining optical constants prior to film processing to be used improve accuracy of post-processing thickness measurements Grant 5,835,226 - Berman , et al. November 10, 1 | 1998-11-10 |
Odorant composition, delivery system and method Grant 5,637,401 - Berman , et al. June 10, 1 | 1997-06-10 |
Automatic terminal signal equalization Grant 4,653,114 - Berman March 24, 1 | 1987-03-24 |