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Method for production of a component by atomic diffusion bonding Grant 11,400,541 - Ingwersen , et al. August 2, 2 | 2022-08-02 |
Electrostatic holding apparatus and method for its production Grant 11,398,398 - Halm , et al. July 26, 2 | 2022-07-26 |
Holding apparatus for electrostatically holding a component, including a base body joined by diffusion bonding, and process for its manufacture Grant 11,201,075 - Hoescheler , et al. December 14, 2 | 2021-12-14 |
Method For Production Of A Component By Atomic Diffusion Bonding App 20210260688 - INGWERSEN; Jan ;   et al. | 2021-08-26 |
Method And Polishing Apparatus For Machining A Plate-shaped Component, And Plate-shaped Component, In Particular Electrostatic Holding Apparatus Or Immersion Wafer Panel App 20210252664 - MEWIS; Jan | 2021-08-19 |
Method of manufacturing a holding plate, in particular for a clamp for holding wafers Grant 10,987,760 - Hammer , et al. April 27, 2 | 2021-04-27 |
Electrostatic Holding Apparatus With A Layered Composite Electrode Device And Method For The Production Thereof App 20200321233 - ZIEGENHAGEN; Lars ;   et al. | 2020-10-08 |
Holding Apparatus For Electrostatically Holding A Component, Including A Base Body Joined By Diffusion Bonding, And Process For App 20200234992 - HOESCHELER; Stefan ;   et al. | 2020-07-23 |
Electrostatic Holding Apparatus And Method For Its Production App 20200013660 - HALM; Simon ;   et al. | 2020-01-09 |
Method for processing a holding plate, in particular for a clamp for holding a wafer Grant 10,475,689 - Schmidt , et al. Nov | 2019-11-12 |
Detection circuit, electrostatic holding device and method for detecting a component on an electrostatic holding device Grant 10,388,551 - Preuss , et al. A | 2019-08-20 |
Electrostatic holding device and method for the operation thereof, and charge transfer circuit Grant 10,256,130 - Preuss , et al. | 2019-04-09 |
Method For Processing A Holding Plate, In Particular For A Clamp For Holding A Wafer App 20180211861 - SCHMIDT; Volker ;   et al. | 2018-07-26 |
Lightweight carrier structure, particularly for optical components, and method for its production Grant 9,791,662 - Baldus , et al. October 17, 2 | 2017-10-17 |
Detection Circuit, Electrostatic Holding Device And Method For Detecting A Component On An Electrostatic Holding Device App 20170236736 - PREUSS; Peter ;   et al. | 2017-08-17 |
Method for producing an electrostatic holding apparatus Grant 9,728,438 - Stein August 8, 2 | 2017-08-08 |
Electrostatic Holding Device And Method For The Operation Thereof, And Charge Transfer Circuit App 20170162414 - PREUSS; Peter ;   et al. | 2017-06-08 |
Clamp with electrode carrier disk Grant 9,673,079 - Baldus June 6, 2 | 2017-06-06 |
Clamp with ceramic electrode Grant 9,673,737 - Baldus June 6, 2 | 2017-06-06 |
Clamp with burls-electrode Grant 9,537,430 - Baldus January 3, 2 | 2017-01-03 |
Method Of Manufacturing A Holding Plate, In Particular For A Clamp For Holding Wafers App 20160354864 - HAMMER; Ralf ;   et al. | 2016-12-08 |
Solid body joining of a carrier body and a cover layer, particularly by anodic bonding Grant 9,507,062 - Pampuch , et al. November 29, 2 | 2016-11-29 |
Method and apparatus for measuring the shape of a wave-front of an optical radiation field Grant 9,442,006 - Oberdoerster September 13, 2 | 2016-09-13 |
Method for processing an embedded metal film Grant 9,275,777 - Ingwersen March 1, 2 | 2016-03-01 |
Method And Apparatus For Measuring The Shape Of A Wave-front Of An Optical Radiation Field App 20160018259 - OBERDOERSTER; Thomas | 2016-01-21 |
Clamp With Electrode Carrier Disk App 20150348815 - BALDUS; Oliver | 2015-12-03 |
Clamp With Ceramic Electrode App 20150349669 - BALDUS; Oliver | 2015-12-03 |
Method For Producing An Electrostatic Holding Apparatus App 20150348816 - STEIN; Alexander | 2015-12-03 |
Clamp With Burls-electrode App 20150349670 - BALDUS; Oliver | 2015-12-03 |
Solid Body Joining Of A Carrier Body And A Cover Layer, Particularly By Anodic Bonding App 20150140276 - PAMPUCH; Carsten ;   et al. | 2015-05-21 |
Lightweight Carrier Structure, Particularly For Optical Components, And Method For Its Production App 20150028176 - BALDUS; Oliver ;   et al. | 2015-01-29 |
Triangulation camera device and triangulation imaging method Grant 8,456,521 - Schmidt June 4, 2 | 2013-06-04 |
Processing An Embedded Metal Film, And Component With An Embedded Metal Film App 20120236458 - INGWERSEN; Jan | 2012-09-20 |
Triangulation Camera Device And Triangulation Imaging Method App 20110141252 - Schmidt; Volker | 2011-06-16 |
Lightweight Carrier Structure, Particularly For Optical Components, And Method For Its Production App 20100226030 - BALDUS; Oliver ;   et al. | 2010-09-09 |