Patent | Date |
---|
Integrated circuit ferroelectric infrared detector and method Grant 6,802,987 - Udayakumar , et al. October 12, 2 | 2004-10-12 |
Infrared detector with amorphous silicon detector elements, and a method of making it Grant 6,777,681 - Schimert , et al. August 17, 2 | 2004-08-17 |
Lightly donor doped electrodes for high-dielectric-constant materials Grant 6,593,638 - Summerfelt , et al. July 15, 2 | 2003-07-15 |
Methods of fabrication of ceramic wafers Grant 6,280,662 - Beratan , et al. August 28, 2 | 2001-08-28 |
High MTF optical coating for hybrid UFPA's Grant 6,245,591 - Beratan , et al. June 12, 2 | 2001-06-12 |
Lightly donor doped electrodes for high-dielectric-constant materials Grant 6,204,069 - Summerfelt , et al. March 20, 2 | 2001-03-20 |
Method and structure for etching a thin film perovskite layer Grant 6,177,351 - Beratan , et al. January 23, 2 | 2001-01-23 |
Thermal detector with stress-aligned thermally sensitive element and method Grant 6,020,216 - Beratan , et al. February 1, 2 | 2000-02-01 |
Thermal detector with preferentially-ordered thermally sensitive element and method Grant 5,990,481 - Beratan November 23, 1 | 1999-11-23 |
Thermal detector with nucleation element and method Grant 5,945,673 - Beratan , et al. August 31, 1 | 1999-08-31 |
Method and structure for forming an array of thermal sensors Grant 5,746,930 - Belcher , et al. May 5, 1 | 1998-05-05 |
Method for fabricating a focal plane array for thermal imaging system Grant 5,743,006 - Beratan April 28, 1 | 1998-04-28 |
High thermal resistance backfill material for hybrid UFPA's Grant 5,656,848 - Beratan , et al. August 12, 1 | 1997-08-12 |
Semiconductor structure for fabrication of a thermal sensor Grant 5,654,580 - Beratan , et al. August 5, 1 | 1997-08-05 |
Structure and method including dry etching techniques for forming an array of thermal sensitive elements Grant 5,647,946 - Belcher , et al. July 15, 1 | 1997-07-15 |
Method of fabricating a focal plane array for hybrid thermal imaging system Grant 5,644,838 - Beratan July 8, 1 | 1997-07-08 |
Electrodes comprising conductive perovskite-seed layers for perovskite dielectrics Grant 5,626,906 - Summerfelt , et al. May 6, 1 | 1997-05-06 |
High-dielectric-constant material electrodes comprising thin ruthenium dioxide layers Grant 5,619,393 - Summerfelt , et al. April 8, 1 | 1997-04-08 |
Semiconductor structures using high-dielectric-constant materials and an adhesion layer Grant 5,612,574 - Summerfelt , et al. March 18, 1 | 1997-03-18 |
Processing methods for high-dielectric-constant materials Grant 5,609,927 - Summerfelt , et al. March 11, 1 | 1997-03-11 |
Thermal crosstalk reduction for infrared detectors with common electrodes Grant 5,602,392 - Owen , et al. February 11, 1 | 1997-02-11 |
Electrodes comprising conductive perovskite-seed layers for perovskite dielectrics Grant 5,589,284 - Summerfelt , et al. December 31, 1 | 1996-12-31 |
High-dielectric-constant material electrodes comprising thin platinum layers Grant 5,576,928 - Summerfelt , et al. November 19, 1 | 1996-11-19 |
High-dielectric-constant material electrodes comprising thin platinum layers Grant 5,566,045 - Summerfelt , et al. October 15, 1 | 1996-10-15 |
Thermal detector and method Grant 5,559,332 - Meissner , et al. September 24, 1 | 1996-09-24 |
Porous thermal isolation mesas for hybrid uncooled infrared detectors Grant 5,536,965 - Beratan , et al. July 16, 1 | 1996-07-16 |
Etching pyroelectric devices post ion milling Grant 5,520,299 - Belcher , et al. May 28, 1 | 1996-05-28 |
Electrode interface for high-dielectric-constant materials Grant 5,471,364 - Summerfelt , et al. November 28, 1 | 1995-11-28 |
Thermal detector apparatus and method using reduced thermal capacity Grant 5,457,318 - Robinson , et al. October 10, 1 | 1995-10-10 |
Infrared detector thermal isolation structure and method Grant 5,426,304 - Belcher , et al. June 20, 1 | 1995-06-20 |
Anisotropic tantalum pentoxide etch Grant 5,312,516 - Douglas , et al. May 17, 1 | 1994-05-17 |
Anisotropic titanate etch Grant 5,238,530 - Douglas , et al. August 24, 1 | 1993-08-24 |
Anisotropic niobium pentoxide etch Grant 5,201,989 - Douglas , et al. April 13, 1 | 1993-04-13 |