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Patent applications and USPTO patent grants for Beppu, Tatsuro.The latest application filed is for "cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas".
Patent | Date |
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Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas App 20050252451 - Beppu, Tatsuro ;   et al. | 2005-11-17 |
Method of forming semiconductor thin film and method of fabricating solar cell Grant 5,866,471 - Beppu , et al. February 2, 1 | 1999-02-02 |
Surface shape sensor, identification device using this sensor, and protected system using this device Grant 5,745,046 - Itsumi , et al. April 28, 1 | 1998-04-28 |
Surface shape sensor, identification device using this sensor, and protected system using this device Grant 5,559,504 - Itsumi , et al. September 24, 1 | 1996-09-24 |
Green light emitting device Grant 4,224,632 - Iwamoto , et al. September 23, 1 | 1980-09-23 |
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