Benzing; David W.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Benzing; David W..The latest application filed is for "hollow anode plasma reactor and method".
- Benzing; David W. - San Jose CA US
| Patent | Date |
|---|---|
| Hollow anode plasma reactor and method Grant 8,465,620 - Benzing , et al. June 18, 2 | 2013-06-18 |
| Wafer area pressure control for plasma confinement Grant 7,470,627 - Han , et al. December 30, 2 | 2008-12-30 |
| Hollow Anode Plasma Reactor And Method App 20080271849 - Benzing; David W. ; et al. | 2008-11-06 |
| Hollow anode plasma reactor and method App 20060027328 - Benzing; David W. ; et al. | 2006-02-09 |
| Hollow anode plasma reactor and method Grant 6,974,523 - Benzing , et al. December 13, 2 | 2005-12-13 |
| Wafer area pressure control for plasma confinement App 20050051268 - Han, Taejoon ; et al. | 2005-03-10 |
| Wafer area pressure control for plasma confinement Grant 6,823,815 - Han , et al. November 30, 2 | 2004-11-30 |
| Wafer boat and boat holder Grant 6,669,253 - Benzing , et al. December 30, 2 | 2003-12-30 |
| Wafer area pressure control for plasma confinement App 20020190657 - Han, Taejoon ; et al. | 2002-12-19 |
| Wafer area pressure control for plasma confinement Grant 6,492,774 - Han , et al. December 10, 2 | 2002-12-10 |
| Hollow anode plasma reactor and method App 20020170881 - Benzing, David W. ; et al. | 2002-11-21 |
| Wafer boat and boat holder App 20020076316 - Benzing, David W. ; et al. | 2002-06-20 |
| Apparatus for in-situ chamber cleaning Grant 4,786,352 - Benzing November 22, 1 | 1988-11-22 |
| In-situ CVD chamber cleaner Grant 4,657,616 - Benzing , et al. April 14, 1 | 1987-04-14 |
| Troide plasma reactor with magnetic enhancement Grant 4,572,759 - Benzing February 25, 1 | 1986-02-25 |
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