loadpatents
name:-0.0078291893005371
name:-0.0069639682769775
name:-0.00067901611328125
Benz; Daniel Patent Filings

Benz; Daniel

Patent Applications and Registrations

Patent applications and USPTO patent grants for Benz; Daniel.The latest application filed is for "microlithographic projection exposure apparatus".

Company Profile
0.9.6
  • Benz; Daniel - Winnenden DE
  • Benz; Daniel - Luetenbach DE
  • Benz; Daniel - Leutenbach DE
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Microlithographic projection exposure apparatus
Grant 9,535,336 - Bleidistel , et al. January 3, 2
2017-01-03
Illumination system of a microlithographic projection exposure apparatus having a temperature control device
Grant 9,523,922 - Bach , et al. December 20, 2
2016-12-20
Microlithographic Projection Exposure Apparatus
App 20140333912 - Bleidistel; Sascha ;   et al.
2014-11-13
Illumination System Of A Microlithographic Projection Exposure Apparatus Having A Temperature Control Device
App 20140307239 - Bach; Florian ;   et al.
2014-10-16
Illumination system of a microlithographic projection exposure apparatus having a temperature control device
Grant 8,797,507 - Bach , et al. August 5, 2
2014-08-05
Microlithographic projection exposure apparatus
Grant 8,767,176 - Bleidistel , et al. July 1, 2
2014-07-01
Mirror for guiding a radiation bundle
Grant 8,717,531 - Waldis , et al. May 6, 2
2014-05-06
Pump element and pump having such a pump element
Grant 8,241,019 - Kueck , et al. August 14, 2
2012-08-14
Microlithographic Projection Exposure Apparatus
App 20110181852 - Bleidistel; Sascha ;   et al.
2011-07-28
Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20110181850 - Bach; Florian ;   et al.
2011-07-28
Mirror For Guiding A Radiation Bundle
App 20100261120 - Waldis; Severin ;   et al.
2010-10-14
Pump Element And Pump Having Such A Pump Element
App 20090180905 - Kueck; Heinz ;   et al.
2009-07-16
Company Registrations

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