| Patent | Date |
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Inductively coupled RF plasma source with magnetic confinement and Faraday shielding
Grant 10,049,861 - Benveniste , et al. August 14, 2 | 2018-08-14 |
Triple Mode Electrostatic Collimator
App 20160379799 - Sinclair; Frank ; et al. | 2016-12-29 |
Plasma potential modulated ion implantation system
Grant 9,297,063 - Radovanov , et al. March 29, 2 | 2016-03-29 |
Inductively Coupled Rf Plasma Source With Magnetic Confinement And Faraday Shielding
App 20160071704 - Benveniste; Victor M. ; et al. | 2016-03-10 |
Triple Mode Electrostatic Collimator
App 20150144810 - Sinclair; Frank ; et al. | 2015-05-28 |
Inductively coupled plasma flood gun using an immersed low inductance RF coil and multicusp magnetic arrangement
Grant 8,847,496 - Kurunczi , et al. September 30, 2 | 2014-09-30 |
System and method for manipulating an ion beam
Grant 8,604,443 - Sinclair , et al. December 10, 2 | 2013-12-10 |
Inductively Coupled Plasma Flood Gun Using An Immersed Low Inductance Rf Coil And Multicusp Magnetic Arrangement
App 20130320854 - Kurunczi; Peter F. ; et al. | 2013-12-05 |
Plasma Potential Modulated ION Implantation System
App 20130287964 - Radovanov; Svetlana B. ; et al. | 2013-10-31 |
Inductively coupled plasma flood gun using an immersed low inductance FR coil and multicusp magnetic arrangement
Grant 8,471,476 - Kurunczi , et al. June 25, 2 | 2013-06-25 |
Inductively Coupled Rf Plasma Source With Magnetic Confinement And Faraday Shielding
App 20130015053 - Benveniste; Victor M. ; et al. | 2013-01-17 |
System And Method For Producing A Mass Analyzed Ion Beam For High Throughput Operation
App 20130001414 - Benveniste; Victor M. ; et al. | 2013-01-03 |
System And Method For Producing A Mass Analyzed Ion Beam
App 20120168622 - Benveniste; Victor M. ; et al. | 2012-07-05 |
Inductively Coupled Plasma Flood Gun Using An Immersed Low Inductance Fr Coil And Multicusp Magnetic Arrangement
App 20120085917 - Kurunczi; Peter F. ; et al. | 2012-04-12 |
System And Method For Manipulating An Ion Beam
App 20110114849 - Sinclair; Frank ; et al. | 2011-05-19 |
Techniques for independently controlling deflection, deceleration and focus of an ion beam
Grant 7,888,653 - Kellerman , et al. February 15, 2 | 2011-02-15 |
Implant uniformity control
Grant 7,820,988 - Benveniste , et al. October 26, 2 | 2010-10-26 |
Techniques For Improving Extracted Ion Beam Quality Using High-transparency Electrodes
App 20100200768 - BUFF; JAMES ; et al. | 2010-08-12 |
Techniques For Independently Controlling Deflection, Deceleration And Focus Of An Ion Beam
App 20100171042 - KELLERMAN; Peter L. ; et al. | 2010-07-08 |
Segmented resonant antenna for radio frequency inductively coupled plasmas
Grant 7,748,344 - DiVergilio , et al. July 6, 2 | 2010-07-06 |
Techniques For Providing A Multimode Ion Source
App 20100148088 - Radovanov; Svetlana ; et al. | 2010-06-17 |
Techniques for measuring ion beam emittance
Grant 7,723,705 - Benveniste May 25, 2 | 2010-05-25 |
Techniques for plasma injection
Grant 7,723,707 - Benveniste , et al. May 25, 2 | 2010-05-25 |
Techniques for providing a multimode ion source
Grant 7,700,925 - Radovanov , et al. April 20, 2 | 2010-04-20 |
Implant Uniformity Control
App 20100084581 - Benveniste; Victor M. ; et al. | 2010-04-08 |
Technique for shaping a ribbon-shaped ion beam
Grant 7,675,047 - Radovanov , et al. March 9, 2 | 2010-03-09 |
Techniques For Measuring Ion Beam Emittance
App 20090314932 - Benveniste; Victor M. | 2009-12-24 |
Multichannel ion gun
Grant 7,598,505 - Benveniste October 6, 2 | 2009-10-06 |
Methods and systems for trapping ion beam particles and focusing an ion beam
Grant 7,598,495 - Kellerman , et al. October 6, 2 | 2009-10-06 |
Ion implantation with a collimator magnet and a neutral filter magnet
Grant 7,579,602 - Benveniste , et al. August 25, 2 | 2009-08-25 |
Techniques For Providing A Multimode Ion Source
App 20090166554 - Radovanov; Svetlana ; et al. | 2009-07-02 |
Ion beam scanning control methods and systems for ion implantation uniformity
Grant 7,550,751 - Benveniste , et al. June 23, 2 | 2009-06-23 |
Techniques For Measuring And Controlling Ion Beam Angle And Density Uniformity
App 20090121122 - Kellerman; Peter L. ; et al. | 2009-05-14 |
Techniques For Shaping An Ion Beam
App 20090121149 - Radovanov; Svetlana ; et al. | 2009-05-14 |
Techniques For Plasma Injection
App 20090026390 - Benveniste; Victor M. ; et al. | 2009-01-29 |
System and method for performing SIMOX implants using an ion shower
Grant 7,421,973 - Kellerman , et al. September 9, 2 | 2008-09-09 |
Ion Implantation With A Collimator Magnet And A Neutral Filter Magnet
App 20080149845 - Benveniste; Victor M. ; et al. | 2008-06-26 |
Ribbon beam ion implanter cluster tool
Grant 7,375,355 - Ferrara , et al. May 20, 2 | 2008-05-20 |
Ion beam scanning control methods and systems for ion implantation uniformity
App 20080067444 - Benveniste; Victor M. ; et al. | 2008-03-20 |
Methods And Systems For Trapping Ion Beam Particles And Focusing An Ion Beam
App 20070295901 - Kellerman; Peter L. ; et al. | 2007-12-27 |
Ribbon beam ion implanter cluster tool
App 20070262271 - Ferrara; Joseph ; et al. | 2007-11-15 |
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights
Grant 7,267,520 - Kellerman , et al. September 11, 2 | 2007-09-11 |
Technique for Shaping a Ribbon-Shaped Ion Beam
App 20070108390 - Radovanov; Svetlana B. ; et al. | 2007-05-17 |
Segmented resonant antenna for radio frequency inductively coupled plasmas
App 20070044717 - DiVergilio; William F. ; et al. | 2007-03-01 |
Multichannel ion gun
App 20060219944 - Benveniste; Victor M. | 2006-10-05 |
Electrostatic lens for ion beams
Grant 7,112,809 - Rathmell , et al. September 26, 2 | 2006-09-26 |
In-situ monitoring on an ion implanter
Grant 7,078,712 - Perel , et al. July 18, 2 | 2006-07-18 |
Ion beam scanning control methods and systems for ion implantation uniformity
Grant 7,078,707 - Benveniste , et al. July 18, 2 | 2006-07-18 |
Ion Beam Scanning Control Methods And Systems For Ion Implantation Uniformity
App 20060145096 - Benveniste; Victor M. ; et al. | 2006-07-06 |
Gas-cooled clamp for RTP
Grant 7,033,443 - Kellerman , et al. April 25, 2 | 2006-04-25 |
Systems and methods for ion beam focusing
Grant 7,019,314 - Benveniste , et al. March 28, 2 | 2006-03-28 |
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights
App 20050254932 - Kellerman, Peter L. ; et al. | 2005-11-17 |
Mounting mechanism for plasma extraction aperture
App 20050242293 - Benveniste, Victor M. | 2005-11-03 |
Method and apparatus for selective pre-dispersion of extracted ion beams in ion implantation systems
Grant 6,956,225 - Benveniste October 18, 2 | 2005-10-18 |
Method And Apparatus For Selective Pre-dispersion Of Extracted Ion Beams In Ion Implantation Systems
App 20050218343 - Benveniste, Victor M. | 2005-10-06 |
In-situ monitoring on an ion implanter
App 20050205807 - Perel, Alexander S. ; et al. | 2005-09-22 |
System and method for performing SIMOX implants using an ion shower
App 20050098742 - Kellerman, Peter L. ; et al. | 2005-05-12 |
Segmented resonant antenna for radio frequency inductively coupled plasmas
App 20050098117 - DiVergilio, William F. ; et al. | 2005-05-12 |
Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam
Grant 6,885,014 - Benveniste April 26, 2 | 2005-04-26 |
Hybrid magnetic/electrostatic deflector for ion implantation systems
Grant 6,881,966 - Benveniste , et al. April 19, 2 | 2005-04-19 |
Thin magnetron structures for plasma generation in ion implantation systems
Grant 6,879,109 - Benveniste , et al. April 12, 2 | 2005-04-12 |
Two dimensional stationary beam profile and angular mapping
Grant 6,872,953 - Benveniste March 29, 2 | 2005-03-29 |
Ion beam slit extraction with mass separation
App 20050061997 - Benveniste, Victor M. | 2005-03-24 |
Electrostatic lens for ion beams
App 20040262542 - Rathmell, Robert D. ; et al. | 2004-12-30 |
High mass resolution magnet for ribbon beam ion implanters
Grant 6,835,930 - Benveniste , et al. December 28, 2 | 2004-12-28 |
Probe assembly for detecting an ion in a plasma generated in an ion source
Grant 6,833,710 - Benveniste December 21, 2 | 2004-12-21 |
High mass resolution magnet for ribbon beam ion implanters
App 20040227074 - Benveniste, Victor M. ; et al. | 2004-11-18 |
Hybrid Magnetic/electrostatic Deflector For Ion Implantation Systems
App 20040227105 - Benveniste, Victor M. ; et al. | 2004-11-18 |
Thin magnetron structures for plasma generation in ion implantation systems
App 20040227470 - Benveniste, Victor M. ; et al. | 2004-11-18 |
Gas-cooled clamp for RTP
App 20040187788 - Kellerman, Peter L. ; et al. | 2004-09-30 |
Electrostatic parallelizing lens for ion beams
Grant 6,774,377 - Rathmell , et al. August 10, 2 | 2004-08-10 |
High mass resolution magnet for ribbon beam ion implanters
Grant 6,770,888 - Benveniste , et al. August 3, 2 | 2004-08-03 |
Method and system for ion beam containment in an ion beam guide
Grant 6,759,665 - Benveniste , et al. July 6, 2 | 2004-07-06 |
Method and system for ion beam containment in an ion beam guide
Grant 6,703,628 - Ye , et al. March 9, 2 | 2004-03-09 |
Beam uniformity and angular distribution measurement system
Grant 6,677,598 - Benveniste January 13, 2 | 2004-01-13 |
Ion source and coaxial inductive coupler for ion implantation system
Grant 6,664,548 - Benveniste , et al. December 16, 2 | 2003-12-16 |
Ion source providing ribbon beam with controllable density profile
Grant 6,664,547 - Benveniste December 16, 2 | 2003-12-16 |
Ion source and coaxial inductive coupler for ion implantation system
App 20030205680 - Benveniste, Victor M. ; et al. | 2003-11-06 |
Ion source providing ribbon beam with controllable density profile
App 20030205679 - Benveniste, Victor M. | 2003-11-06 |
Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam
App 20030205683 - Benveniste, Victor M. | 2003-11-06 |
Method and system for ion beam containment in an ion beam guide
App 20030201402 - Ye, John Zheng ; et al. | 2003-10-30 |
Waveguide for microwave excitation of plasma in an ion beam guide
Grant 6,541,781 - Benveniste , et al. April 1, 2 | 2003-04-01 |
System and method for removing particles entrained in an ion beam
Grant 6,525,326 - Harrington , et al. February 25, 2 | 2003-02-25 |
System and method for removing contaminant particles relative to an ion beam
Grant 6,476,399 - Harrington , et al. November 5, 2 | 2002-11-05 |
Probe assembly for detecting an ion in a plasma generated in an ion source
App 20020089332 - Benveniste, Victor M. | 2002-07-11 |
Method and system for microwave excitation of plasma in an ion beam guide
Grant 6,414,329 - Benveniste , et al. July 2, 2 | 2002-07-02 |
Method and system for ion beam containment in an ion beam guide
App 20020014587 - Benveniste, Victor M. ; et al. | 2002-02-07 |
Glass-like insulator for electrically isolating electrodes from ion implanter housing
Grant 6,291,828 - Saadatmand , et al. September 18, 2 | 2001-09-18 |
Method for in-process cleaning of an ion source
Grant 6,135,128 - Graf , et al. October 24, 2 | 2000-10-24 |
Accelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanter
Grant 5,780,863 - Benveniste , et al. July 14, 1 | 1998-07-14 |
Method and apparatus for ion formation in an ion implanter
Grant 5,661,308 - Benveniste , et al. August 26, 1 | 1997-08-26 |
Method and apparatus for ion beam formation in an ion implanter
Grant 5,554,857 - Benveniste September 10, 1 | 1996-09-10 |
Ion beam conical scanning system
Grant 5,373,164 - Benveniste December 13, 1 | 1994-12-13 |
Elliptical ion beam distribution method and apparatus
Grant 5,026,997 - Benveniste June 25, 1 | 1991-06-25 |
Uniform cross section ion beam system
Grant 4,914,305 - Benveniste , et al. April 3, 1 | 1990-04-03 |
Ion implanter target chamber
Grant 4,672,210 - Armstrong , et al. June 9, 1 | 1987-06-09 |
Treating workpiece with beams
Grant 4,419,584 - Benveniste December 6, 1 | 1983-12-06 |
High resolution radiation detector
Grant 4,303,860 - Bjorkholm , et al. December 1, 1 | 1981-12-01 |
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