Patent | Date |
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Particle beam system and method for operating a particle optical unit Grant 9,991,089 - Mueller , et al. June 5, 2 | 2018-06-05 |
Particle Beam System And Method For Operating A Particle Optical Unit App 20180040454 - Mueller; Ingo ;   et al. | 2018-02-08 |
Particle beam system and method for operating a particle optical unit Grant 9,799,485 - Mueller , et al. October 24, 2 | 2017-10-24 |
Electron microscope Grant 9,543,115 - Benner , et al. January 10, 2 | 2017-01-10 |
Particle optical system Grant 9,349,571 - Kemen , et al. May 24, 2 | 2016-05-24 |
Particle Beam System And Method For Operating A Particle Optical Unit App 20150357157 - Mueller; Ingo ;   et al. | 2015-12-10 |
Electron Microscope App 20150144787 - Benner; Gerd ;   et al. | 2015-05-28 |
Particle Optical System App 20150069235 - Kemen; Thomas ;   et al. | 2015-03-12 |
Transmission electron microscopy system and method of operating a transmission electron microscopy system Grant 8,748,819 - Benner June 10, 2 | 2014-06-10 |
Transmission electron microscope Grant 8,598,526 - Benner December 3, 2 | 2013-12-03 |
Transmission Electron Microscopy System and Method of Operating a Transmission Electron Microscopy System App 20130292566 - Benner; Gerd | 2013-11-07 |
Apparatus For Contaminants Being Deposited Thereon App 20130256558 - DIETL; Christian ;   et al. | 2013-10-03 |
Precession diffraction charged particle beam system Grant 8,541,739 - Benner , et al. September 24, 2 | 2013-09-24 |
Particle beam microscope Grant 8,476,589 - Benner , et al. July 2, 2 | 2013-07-02 |
Particle-beam microscope Grant 8,471,203 - Benner , et al. June 25, 2 | 2013-06-25 |
Phase-shifting element and particle beam device having a phase-shifting element Grant 8,436,302 - Schroder , et al. May 7, 2 | 2013-05-07 |
Electron beam device Grant 8,431,894 - Essers , et al. April 30, 2 | 2013-04-30 |
Phase-shifting Element And Particle Beam Device Having A Phase-shifting Element App 20130001445 - SCHRODER; Rasmus ;   et al. | 2013-01-03 |
Particle Beam Microscope App 20120326030 - Benner; Gerd ;   et al. | 2012-12-27 |
Particle Beam Microscope App 20120326032 - Benner; Gerd ;   et al. | 2012-12-27 |
Phase contrast electron microscope Grant 8,330,105 - Benner , et al. December 11, 2 | 2012-12-11 |
Particle beam apparatus having an annularly-shaped illumination aperture Grant 8,299,442 - Benner October 30, 2 | 2012-10-30 |
Phase-shifting element and particle beam device having a phase-shifting element Grant 8,173,963 - Schroder , et al. May 8, 2 | 2012-05-08 |
Phase Contrast Electron Microscope App 20120049062 - Benner; Gerd ;   et al. | 2012-03-01 |
Charged Particle Beam System App 20120025094 - Benner; Gerd ;   et al. | 2012-02-02 |
Phase contrast electron microscope Grant 8,039,796 - Benner , et al. October 18, 2 | 2011-10-18 |
Phase-shifting element and particle beam device having a phase-shifting element App 20110233402 - Schroder; Rasmus ;   et al. | 2011-09-29 |
Transmission Electron Microscope App 20110210249 - Benner; Gerd | 2011-09-01 |
Phase-shifting element and particle beam device having a phase-shifting element Grant 7,902,506 - Schroder , et al. March 8, 2 | 2011-03-08 |
Particle-beam Microscope App 20100258719 - Benner; Gerd ;   et al. | 2010-10-14 |
Phase contrast electron microscope App 20100181481 - Benner; Gerd ;   et al. | 2010-07-22 |
Phase contrast electron microscope Grant 7,741,602 - Benner , et al. June 22, 2 | 2010-06-22 |
Particle beam apparatus having an annularly-shaped illumination aperture App 20100038537 - Benner; Gerd | 2010-02-18 |
Electron beam device App 20090039257 - Essers; Erik ;   et al. | 2009-02-12 |
Phase-shifting element and particle beam device having a phase-shifting element App 20080296509 - Schroder; Rasmus ;   et al. | 2008-12-04 |
Phase contrast electron microscope App 20070284528 - Benner; Gerd ;   et al. | 2007-12-13 |
Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system Grant 7,060,978 - Drexel , et al. June 13, 2 | 2006-06-13 |
Electron microscope with annular illuminating aperture Grant 6,797,956 - Benner September 28, 2 | 2004-09-28 |
Process for electron beam lithography, and electron-optical lithography system Grant 6,657,211 - Benner December 2, 2 | 2003-12-02 |
Electron microscope with annular illuminating aperture App 20030132383 - Benner, Gerd | 2003-07-17 |
Process for electron beam lithography, and electron-optical lithography system App 20020043629 - Benner, Gerd | 2002-04-18 |
Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system App 20020011565 - Drexel, Volker ;   et al. | 2002-01-31 |
Energy filter, particularly for an electron microscope Grant 6,040,576 - Benner March 21, 2 | 2000-03-21 |
Method of illuminating an object with a focused electron beam and an electron-optical illuminating system therefor Grant 5,483,073 - Benner January 9, 1 | 1996-01-09 |
Method of illuminating an object in a transmission electron microscope Grant 5,013,913 - Benner May 7, 1 | 1991-05-07 |