| Patent | Date |
|---|
Cooling For A Plasma-based Reactor
App 20220139671 - Drewery; John Stephen ; et al. | 2022-05-05 |
Magnetic Shielding For Plasma Sources
App 20220044864 - Mopidevi; Hema Swaroop ; et al. | 2022-02-10 |
Magnetic shielding for plasma sources
Grant 11,177,067 - Mopidevi , et al. November 16, 2 | 2021-11-16 |
Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods
Grant 11,101,107 - Benjamin , et al. August 24, 2 | 2021-08-24 |
Maintenance mode power supply system
Grant 10,896,808 - Benjamin , et al. January 19, 2 | 2021-01-19 |
Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods
Grant 10,892,179 - Benjamin , et al. January 12, 2 | 2021-01-12 |
High-power radio-frequency spiral-coil filter
Grant 10,812,033 - O'Brien , et al. October 20, 2 | 2020-10-20 |
Magnetic Shielding For Plasma Sources
App 20200035409 - Mopidevi; Hema Swaroop ; et al. | 2020-01-30 |
Maintenance Mode Power Supply System
App 20200035460 - Benjamin; Neil Martin Paul ; et al. | 2020-01-30 |
Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods
App 20200035455 - Benjamin; Neil Martin Paul ; et al. | 2020-01-30 |
Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods
Grant 10,475,623 - Benjamin , et al. Nov | 2019-11-12 |
Plasma ignition and sustaining apparatus
Grant 10,395,901 - Benjamin , et al. A | 2019-08-27 |
High-power Radio-frequency Spiral-coil Filter
App 20190207579 - O'Brien; Sean Kelly ; et al. | 2019-07-04 |
Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
Grant 10,192,767 - Benjamin , et al. Ja | 2019-01-29 |
Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods for Operation, Monitoring, and Control
App 20180358254 - Benjamin; Neil Martin Paul ; et al. | 2018-12-13 |
Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control
Grant 10,079,168 - Benjamin , et al. September 18, 2 | 2018-09-18 |
Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
Grant 10,014,161 - Benjamin , et al. July 3, 2 | 2018-07-03 |
Electrostatic Chuck Including Clamp Electrode Assembly Forming Portion of Faraday Cage for RF Delivery and Associated Methods
App 20180130689 - Benjamin; Neil Martin Paul ; et al. | 2018-05-10 |
Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods for Operation, Monitoring, and Control
App 20180130690 - Benjamin; Neil Martin Paul ; et al. | 2018-05-10 |
Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods
App 20170287680 - Benjamin; Neil Martin Paul ; et al. | 2017-10-05 |
Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods for Operation, Monitoring, and Control
App 20170263418 - Benjamin; Neil Martin Paul ; et al. | 2017-09-14 |
Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
Grant 9,673,025 - Benjamin , et al. June 6, 2 | 2017-06-06 |
Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods for Operation, Monitoring, and Control
App 20170032935 - Benjamin; Neil Martin Paul ; et al. | 2017-02-02 |
Method and apparatus for chuck thermal calibration
Grant 9,530,679 - Gaff , et al. December 27, 2 | 2016-12-27 |
Plasma Ignition and Sustaining Apparatus
App 20160056023 - Benjamin; Neil Martin Paul ; et al. | 2016-02-25 |
Plasma ignition and sustaining methods and apparatuses
Grant 9,174,296 - Benjamin , et al. November 3, 2 | 2015-11-03 |
Integrated steerability array arrangement for minimizing non-uniformity and methods thereof
Grant 8,991,331 - Benjamin March 31, 2 | 2015-03-31 |
Methods and apparatus for igniting and sustaining plasma
Grant 8,884,178 - Fischer , et al. November 11, 2 | 2014-11-11 |
Current control in plasma processing systems
Grant 8,736,175 - Long , et al. May 27, 2 | 2014-05-27 |
Synchronized and shortened master-slave RF pulsing in a plasma processing chamber
Grant 8,692,467 - Benjamin , et al. April 8, 2 | 2014-04-08 |
Method and Apparatus for Chuck Thermal Calibration
App 20130235506 - Gaff; Keith William ; et al. | 2013-09-12 |
Method and apparatus for chuck thermal calibration
Grant 8,449,174 - Gaff , et al. May 28, 2 | 2013-05-28 |
Synchronized And Shortened Master-slave Rf Pulsing In A Plasma Processing Chamber
App 20130009545 - Benjamin; Neil Martin Paul ; et al. | 2013-01-10 |
Methods and arrangements for in-situ process monitoring and control for plasma processing tools
Grant 8,271,121 - Venugopal , et al. September 18, 2 | 2012-09-18 |
Methods And Apparatus For Igniting And Sustaining Plasma
App 20120097647 - Fischer; Andreas ; et al. | 2012-04-26 |
Plasma Ignition And Sustaining Methods And Apparatuses
App 20120097646 - Benjamin; Neil Martin Paul ; et al. | 2012-04-26 |
Methods And Apparatus For An Induction Coil Arrangement In A Plasma Processing System
App 20110253310 - Benjamin; Neil Martin Paul | 2011-10-20 |
Current Control In Plasma Processing Systems
App 20110115379 - Long; Maolin ; et al. | 2011-05-19 |
Methods And Arrangements For In-situ Process Monitoring And Control For Plasma Processing Tools
App 20100332011 - Venugopal; Vijayakumar C. ; et al. | 2010-12-30 |
Method and Apparatus for Chuck Thermal Calibration
App 20100309604 - Gaff; Keith William ; et al. | 2010-12-09 |
Method and apparatus for chuck thermal calibration
Grant 7,802,917 - Gaff , et al. September 28, 2 | 2010-09-28 |
Apparatus for determining a temperature of a substrate and methods therefor
Grant 7,578,616 - Gaff , et al. August 25, 2 | 2009-08-25 |
Apparatus for determining a temperature of a substrate and methods therefor
Grant 7,497,614 - Gaff , et al. March 3, 2 | 2009-03-03 |
Apparatus For Determining A Temperature Of A Substrate And Methods Therefor
App 20080019418 - Gaff; Keith ; et al. | 2008-01-24 |
Methods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing system
Grant 5,793,192 - Kubly , et al. August 11, 1 | 1998-08-11 |
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