Benjamin; Neil

Patent Applications and Registrations

Patent applications and USPTO patent grants for Benjamin; Neil.The latest application filed is for "power switching system for esc with array of thermal control elements".

Company Profile

2.57.38

Benjamin; Neil - E. Palo Alto CA
Benjamin; Neil - East Palo Alto CA
Benjamin; Neil - Palo Alto CA
Benjamin; Neil - Austin TX US
Benjamin; Neil - E.P.A. CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Power switching system for ESC with array of thermal control elements Grant 10,770,363 - Gaff , et al. Sep	2020-09-08
Substrate support with thermal zones for semiconductor processing Grant 10,720,346 - Singh , et al.	2020-07-21
Tunable multi-zone gas injection system Grant 10,403,475 - Cooperberg , et al. Sep	2019-09-03
Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system Grant 10,276,348 - Marakhtanov , et al.	2019-04-30
Substrate supports with multi-layer structure including independent operated heater zones Grant 10,236,193 - Singh , et al.	2019-03-19
RF isolation for power circuitry Grant RE47,276 - Benjamin	2019-03-05
Power Switching System For Esc With Array Of Thermal Control Elements App 20180374763 - Gaff; Keith William ; et al.	2018-12-27
Hollow RF feed with coaxial DC power feed Grant 10,153,136 - Augustino , et al. Dec	2018-12-11
Power switching system for ESC with array of thermal control elements Grant 10,049,948 - Gaff , et al. August 14, 2	2018-08-14
Hybrid edge ring for plasma wafer processing Grant 9,997,381 - McMillin , et al. June 12, 2	2018-06-12
Method and apparatus for controlling spatial temperature distribution Grant 9,824,904 - Benjamin , et al. November 21, 2	2017-11-21
Multiplexed heater array using AC drive for semiconductor processing Grant 9,775,194 - Pease , et al. September 26, 2	2017-09-26
Substrate Supports With Multi-layer Structure Including Independent Operated Heater Zones App 20170229327 - Singh; Harmeet ; et al.	2017-08-10
Heating plate with heating zones for substrate processing and method of use thereof Grant 9,646,861 - Singh , et al. May 9, 2	2017-05-09
Hollow Rf Feed With Coaxial Dc Power Feed App 20170040148 - Augustino; Jason ; et al.	2017-02-09
Substrate Support With Thermal Zones For Semiconductor Processing App 20160300741 - Singh; Harmeet ; et al.	2016-10-13
Heating plate with planar heater zones for semiconductor processing Grant 9,392,643 - Singh , et al. July 12, 2	2016-07-12
Multiplexed Heater Array Using Ac Drive For Semiconductor Processing App 20160198524 - PEASE; John ; et al.	2016-07-07
Methods And Apparatus For A Hybrid Capacitively-coupled And An Inductively-coupled Plasma Processing System App 20160155615 - MARAKHTANOV; Alexei ; et al.	2016-06-02
Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system Grant 9,287,096 - Marakhtanov , et al. March 15, 2	2016-03-15
Tunable Multi-zone Gas Injection System App 20150235811 - Cooperberg; David J. ; et al.	2015-08-20
Distributed power arrangements for localizing power delivery Grant 9,105,449 - Benjamin August 11, 2	2015-08-11
Method And Apparatus For Controlling Spatial Temperature Distribution App 20150187619 - Benjamin; Neil ; et al.	2015-07-02
Tunable multi-zone gas injection system Grant 9,051,647 - Cooperberg , et al. June 9, 2	2015-06-09
Method for controlling spatial temperature distribution across a semiconductor wafer Grant 8,963,052 - Benjamin , et al. February 24, 2	2015-02-24
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support Grant 8,921,740 - Benjamin , et al. December 30, 2	2014-12-30
Heating plate with planar heater zones for semiconductor processing Grant 8,884,194 - Singh , et al. November 11, 2	2014-11-11
Hybrid Edge Ring For Plasma Wafer Processing App 20140235063 - McMillin; Brian ; et al.	2014-08-21
Current peak spreading schemes for multiplexed heated array Grant 8,809,747 - Pease , et al. August 19, 2	2014-08-19
RF isolation for power circuitry Grant 8,755,204 - Benjamin June 17, 2	2014-06-17
Power Switching System For Esc With Array Of Thermal Control Elements App 20140154819 - Gaff; Keith William ; et al.	2014-06-05
Heating Plate With Planar Heater Zones For Semiconductor Processing App 20140096909 - Singh; Harmeet ; et al.	2014-04-10
Heating Plate With Planar Heater Zones For Semiconductor Processing App 20140047705 - Singh; Harmeet ; et al.	2014-02-20
Heating Plate With Planar Heater Zones For Semiconductor Processing App 20140045337 - Singh; Harmeet ; et al.	2014-02-13
Method And Apparatus For Controlling The Spatial Temperature Distribution Across The Surface Of A Workpiece Support App 20140034608 - Benjamin; Neil ; et al.	2014-02-06
Heating plate with planar heating zones for semiconductor processing Grant 8,637,794 - Singh , et al. January 28, 2	2014-01-28
Integrated Steerability Array Arrangement For Minimizing Non-uniformity And Methods Thereof App 20130334171 - Benjamin; Neil	2013-12-19
Current Peak Spreading Schemes For Multiplexed Heated Array App 20130270250 - Pease; John ; et al.	2013-10-17
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support Grant 8,536,494 - Benjamin , et al. September 17, 2	2013-09-17
Integrated steerability array arrangement for minimizing non-uniformity Grant 8,528,498 - Benjamin September 10, 2	2013-09-10
Rf Isolation For Power Circuitry App 20110090719 - Benjamin; Neil	2011-04-21
Heating Plate With Planar Heating Zones For Semiconductor Processing App 20110092072 - Singh; Harmeet ; et al.	2011-04-21
Tunable Multi-zone Gas Injection System App 20100041238 - Cooperberg; David J. ; et al.	2010-02-18
Method For Controlling Spatial Temperature Distribution Across A Semiconductor Wafer App 20090215201 - Benjamin; Neil ; et al.	2009-08-27
Plasma processor coil Grant 7,571,697 - Benjamin , et al. August 11, 2	2009-08-11
Methods And Apparatus For A Hybrid Capacitively-coupled And An Inductively-coupled Plasma Processing System App 20090149028 - Marakhtanov; Alexei ; et al.	2009-06-11
Integrated Steerability Array Arrangement For Minimizing Non-uniformity App 20090078677 - Benjamin; Neil	2009-03-26
Distributed Power Arrangements For Localizing Power Delivery App 20090081811 - Benjamin; Neil	2009-03-26
Arrays Of Inductive Elements For Minimizing Radial Non-uniformity In Plasma App 20090000738 - Benjamin; Neil	2009-01-01
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support Grant 7,274,004 - Benjamin , et al. September 25, 2	2007-09-25
Smart component-based management techniques in a substrate processing system Grant 7,254,510 - Benjamin , et al. August 7, 2	2007-08-07
Smart component-based management techniques in a substrate processing system Grant 7,152,011 - Benjamin , et al. December 19, 2	2006-12-19
Smart component-based management techniques in a substrate processing system App 20060271325 - Benjamin; Neil ; et al.	2006-11-30
Temperature sensing system for temperature measurement in a high radio frequency environment Grant 7,080,941 - Benjamin , et al. July 25, 2	2006-07-25
Smart component-based management techniques in a substrate processing system App 20060047458 - Benjamin; Neil ; et al.	2006-03-02
Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generator Grant 6,974,550 - Benjamin , et al. December 13, 2	2005-12-13
Wafer integrated plasma probe assembly array Grant 6,972,579 - Benjamin December 6, 2	2005-12-06
System and method for integrated multi-use optical alignment Grant 6,952,255 - Perry , et al. October 4, 2	2005-10-04
Method and apparatus for controlling spatial temperature distribution App 20050211385 - Benjamin, Neil ; et al.	2005-09-29
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support App 20050173403 - Benjamin, Neil ; et al.	2005-08-11
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support App 20050173404 - Benjamin, Neil ; et al.	2005-08-11
RF generating system with fast loop control Grant 6,920,312 - Benjamin July 19, 2	2005-07-19
Pump baffle and screen to improve etch uniformity App 20050121143 - Daugherty, John ; et al.	2005-06-09
Capacitive manometer having reduced process drift Grant 6,901,808 - Sharpless , et al. June 7, 2	2005-06-07
System and method for integrated multi-use optical alignment App 20050030524 - Perry, Andrew ; et al.	2005-02-10
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support Grant 6,847,014 - Benjamin , et al. January 25, 2	2005-01-25
Wafer integrated plasma probe assembly array App 20040263190 - Benjamin, Neil	2004-12-30
Pump baffle and screen to improve etch uniformity Grant 6,821,378 - Daugherty , et al. November 23, 2	2004-11-23
Methods relating to wafer integrated plasma probe assembly arrays Grant 6,781,393 - Benjamin August 24, 2	2004-08-24
Methods relating to wafer integrated plasma probe assembly arrays App 20040066206 - Benjamin, Neil	2004-04-08
Wafer integrated plasma probe assembly array Grant 6,653,852 - Benjamin November 25, 2	2003-11-25
Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generator App 20030205557 - Benjamin, Neil ; et al.	2003-11-06
Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor Grant 6,563,076 - Benjamin , et al. May 13, 2	2003-05-13
Tunable multi-zone gas injection system App 20030070620 - Cooperberg, David J. ; et al.	2003-04-17
Plasma processor coil App 20030067273 - Benjamin, Neil ; et al.	2003-04-10
Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor Grant 6,509,542 - Benjamin , et al. January 21, 2	2003-01-21
Ceramic electrostatic chuck assembly and method of making Grant 6,483,690 - Nakajima , et al. November 19, 2	2002-11-19
Techniques for improving etch rate uniformity Grant 6,344,105 - Daugherty , et al. February 5, 2	2002-02-05
Scalable helicon wave plasma processing device with a non-cylindrical source chamber having a serpentine antenna Grant 6,087,778 - Benjamin , et al. July 11, 2	2000-07-11
High flow vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support Grant 5,948,704 - Benjamin , et al. September 7, 1	1999-09-07
Temperature controlling method and apparatus for a plasma processing chamber Grant 5,863,376 - Wicker , et al. January 26, 1	1999-01-26
Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support Grant 5,820,723 - Benjamin , et al. October 13, 1	1998-10-13
Voltage controller for electrostatic chuck of vacuum plasma processors Grant 5,708,250 - Benjamin , et al. January 13, 1	1998-01-13
Plasma processor for large workpieces Grant 5,589,737 - Barnes , et al. December 31, 1	1996-12-31

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.