Patent | Date |
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Method of testing of MEMS devices on a wafer level Grant 9,034,666 - Vaganov , et al. May 19, 2 | 2015-05-19 |
Seek scan probe (SSP) cantilever to mover wafer bond stop Grant 8,644,125 - Chou , et al. February 4, 2 | 2014-02-04 |
Seek Scan Probe (ssp) Cantilever To Mover Wafer Bond Stop App 20130058202 - Chou; Tsung-Kuan Allen ;   et al. | 2013-03-07 |
Method And System For Testing Of Mems Devices App 20120194207 - Vaganov; Vladimir ;   et al. | 2012-08-02 |
Force input control device and method of fabrication Grant 8,183,077 - Vaganov , et al. May 22, 2 | 2012-05-22 |
Wireless Sensing Module and Method of Operation App 20110248846 - Belov; Nickolai ;   et al. | 2011-10-13 |
Arrangements for and fabrication of mechanical suspension of a movable structure Grant 7,928,522 - Zhu , et al. April 19, 2 | 2011-04-19 |
Semiconductor input control device Grant 7,880,247 - Vaganov , et al. February 1, 2 | 2011-02-01 |
Force Input Control Device And Method Of Fabrication App 20100323467 - VAGANOV; Vladimir ;   et al. | 2010-12-23 |
Autonomous Sensing Module, a System and a Method of Long-Term Condition Monitoring of Structures App 20100271199 - Belov; Nickolai ;   et al. | 2010-10-28 |
Force input control device and method of fabrication Grant 7,791,151 - Vaganov , et al. September 7, 2 | 2010-09-07 |
Package With Integrated Magnets For Electromagnetically-actuated Probe-storage Device App 20100039729 - Heck; John ;   et al. | 2010-02-18 |
Method of wafer-to-wafer bonding Grant 7,659,182 - Vaganov , et al. February 9, 2 | 2010-02-09 |
Process For Fabricating High Density Storage Device With High-temperature Media App 20090294028 - Heck; John ;   et al. | 2009-12-03 |
Semiconductor Input Control Device App 20090212377 - Vaganov; Vladimir ;   et al. | 2009-08-27 |
Method And System For Improving Domain Formation In A Ferroelectric Media And For Improving Tip Lifetime App 20090129247 - Tran; Quan A. ;   et al. | 2009-05-21 |
Arrangements for a micro-electro-mechanical system App 20090084946 - Zhu; Terry ;   et al. | 2009-04-02 |
Semiconductor input control device Grant 7,476,952 - Vaganov , et al. January 13, 2 | 2009-01-13 |
Patterned media for a high density data storage device Grant 7,463,573 - Fan , et al. December 9, 2 | 2008-12-09 |
Method for forming a reinforced tip for a probe storage device Grant 7,367,119 - Belov May 6, 2 | 2008-05-06 |
System and method for a three-axis MEMS accelerometer Grant 7,367,232 - Vaganov , et al. May 6, 2 | 2008-05-06 |
Method of wafer-to-wafer bonding App 20080070376 - Vaganov; Vladimir ;   et al. | 2008-03-20 |
Three-axis integrated MEMS accelerometer Grant 7,318,349 - Vaganov , et al. January 15, 2 | 2008-01-15 |
Memory Stage For A Probe Storage Device App 20080001075 - Ascanio; Peter David ;   et al. | 2008-01-03 |
Cantilever With Control Of Vertical And Lateral Position Of Contact Probe Tip App 20070291623 - Belov; Nickolai ;   et al. | 2007-12-20 |
Bonded Chip Assembly With A Micro-mover For Microelectromechanical Systems App 20070290282 - Belov; Nickolai ;   et al. | 2007-12-20 |
Method for forming patterned media for a high density data storage device Grant 7,309,630 - Fan , et al. December 18, 2 | 2007-12-18 |
Semiconductor input control device App 20070264743 - Vaganov; Vladimir ;   et al. | 2007-11-15 |
Cantilever With Control Of Vertical And Lateral Position Of Contact Probe Tip App 20070121477 - Belov; Nickolai ;   et al. | 2007-05-31 |
High density data storage devices with read/write probes with hollow or reinforced tips App 20070041238 - Belov; Nickolai | 2007-02-22 |
Methods for forming high density data storage devices with read/write probes with hollow or reinforced tips App 20070006455 - Belov; Nickolai | 2007-01-11 |
Method for forming patterned media for a high density data storage device App 20070010054 - Fan; Zhaohui ;   et al. | 2007-01-11 |
Patterned media for a high density data storage device App 20070008864 - Fan; Zhaohui ;   et al. | 2007-01-11 |
Three-axis Integrated Mems Accelerometer App 20060272413 - Vaganov; Vladimir ;   et al. | 2006-12-07 |
System and method for a three-axis MEMS accelerometer App 20050160814 - Vaganov, Vladimir ;   et al. | 2005-07-28 |
Method and apparatus of optical components having improved optical properties App 20040008967 - Chu, Ching ;   et al. | 2004-01-15 |