Patent | Date |
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Chemical Vapor Deposition Flow Inlet Elements And Methods App 20180320289 - Belousov; Mikhail ;   et al. | 2018-11-08 |
Chemical vapor deposition flow inlet elements and methods Grant 10,017,876 - Belousov , et al. July 10, 2 | 2018-07-10 |
Processing methods and apparatus with temperature distribution control Grant 10,002,805 - Gurary , et al. June 19, 2 | 2018-06-19 |
Temperature control for GaN based materials Grant 9,677,944 - Gurary , et al. June 13, 2 | 2017-06-13 |
Processing Methods And Apparatus With Temperature Distribution Control App 20160204044 - Gurary; Alexander I. ;   et al. | 2016-07-14 |
Processing methods and apparatus with temperature distribution control Grant 9,324,590 - Gurary , et al. April 26, 2 | 2016-04-26 |
TEMPERATURE CONTROL FOR GaN BASED MATERIALS App 20160041037 - Gurary; Alexander I. ;   et al. | 2016-02-11 |
Temperature control for GaN based materials Grant 9,200,965 - Gurary , et al. December 1, 2 | 2015-12-01 |
Chemical vapor deposition with elevated temperature gas injection Grant 9,053,935 - Gurary , et al. June 9, 2 | 2015-06-09 |
Chemical Vapor Deposition With Elevated Temperature Gas Injection App 20150056790 - Gurary; Alexander I. ;   et al. | 2015-02-26 |
Chemical vapor deposition with elevated temperature gas injection Grant 8,937,000 - Gurary , et al. January 20, 2 | 2015-01-20 |
Chemical Vapor Deposition With Elevated Temperature Gas Injection App 20140352619 - Gurary; Alexander I. ;   et al. | 2014-12-04 |
Chemical vapor deposition with elevated temperature gas injection Grant 8,895,107 - Gurary , et al. November 25, 2 | 2014-11-25 |
Chemical Vapor Deposition Flow Inlet Elements And Methods App 20140116330 - Belousov; Mikhail ;   et al. | 2014-05-01 |
Chemical vapor deposition flow inlet elements and methods Grant 8,636,847 - Belousov , et al. January 28, 2 | 2014-01-28 |
TEMPERATURE CONTROL FOR GaN BASED MATERIALS App 20130343426 - Gurary; Alexander I. ;   et al. | 2013-12-26 |
Apparatus and method for batch non-contact material characterization Grant 8,441,653 - Lee , et al. May 14, 2 | 2013-05-14 |
Chemical Vapor Deposition Flow Inlet Elements And Methods App 20120325151 - Belousov; Mikhail ;   et al. | 2012-12-27 |
Chemical vapor deposition flow inlet elements and methods Grant 8,303,713 - Belousov , et al. November 6, 2 | 2012-11-06 |
Apparatus and Method for Batch Non-Contact Material Characterization App 20120248336 - Lee; Dong Seung ;   et al. | 2012-10-04 |
Apparatus and method for batch non-contact material characterization Grant 8,198,605 - Lee , et al. June 12, 2 | 2012-06-12 |
Chemical Vapor Deposition With Elevated Temperature Gas Injection App 20120040514 - Gurary; Alex ;   et al. | 2012-02-16 |
Apparatus And Method For Batch Non-contact Material Characterization App 20110300645 - Lee; Dong Seung ;   et al. | 2011-12-08 |
Apparatus And Method For Batch Non-contact Material Characterization App 20110297076 - Lee; Dong Seung ;   et al. | 2011-12-08 |
Apparatus and method for batch non-contact material characterization Grant 8,022,372 - Lee , et al. September 20, 2 | 2011-09-20 |
Processing Methods And Apparatus With Temperature Distribution Control App 20110206843 - Gurary; Alex ;   et al. | 2011-08-25 |
Chemical Vapor Deposition Flow Inlet Elements And Methods App 20100143588 - Belousov; Mikhail ;   et al. | 2010-06-10 |
Chemical vapor deposition with elevated temperature gas injection App 20100112216 - Gurary; Alex ;   et al. | 2010-05-06 |
Apparatus and Method for Batch Non-Contact Material Characterization App 20090224175 - Lee; Dong Seung ;   et al. | 2009-09-10 |
Method and apparatus for measuring the curvature of reflective surfaces Grant 7,570,368 - Belousov , et al. August 4, 2 | 2009-08-04 |
Calibration wafer and method of calibrating in situ temperatures Grant 7,452,125 - Volf , et al. November 18, 2 | 2008-11-18 |
Calibration wafer and method of calibrating in situ temperatures App 20070291816 - Volf; Boris ;   et al. | 2007-12-20 |
Calibration wafer and method of calibrating in situ temperatures Grant 7,275,861 - Volf , et al. October 2, 2 | 2007-10-02 |
Calibration wafer and method of calibrating in situ temperatures App 20060171442 - Volf; Boris ;   et al. | 2006-08-03 |
Method and apparatus for measuring the curvature of reflective surfaces App 20050286058 - Belousov, Mikhail ;   et al. | 2005-12-29 |