Belostotskiy; Sergey G.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Belostotskiy; Sergey G..The latest application filed is for "process chamber for etching low k and other dielectric films".

Company Profile

0.15.23

Belostotskiy; Sergey G. - Sunnyvale CA
Belostotskiy; Sergey G. - Santa Clara CA
Belostotskiy; Sergey G. - Bellevue WA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Process chamber for etching low k and other dielectric films Grant 11,410,860 - Lubomirsky , et al. August 9, 2	2022-08-09
Method of patterning a low-k dielectric film Grant 11,302,519 - Nemani , et al. April 12, 2	2022-04-12
Process Chamber For Etching Low K And Other Dielectric Films App 20210134618 - Lubomirsky; Dmitry ; et al.	2021-05-06
Process chamber for etching low K and other dielectric films Grant 10,923,367 - Lubomirsky , et al. February 16, 2	2021-02-16
Process Chamber For Etching Low K And Other Dielectric Films App 20180358244 - LUBOMIRSKY; Dmitry ; et al.	2018-12-13
Process chamber for etching low K and other dielectric films Grant 10,096,496 - Lubomirsky , et al. October 9, 2	2018-10-09
Process Chamber For Etching Low K And Other Dielectric Films App 20170229325 - LUBOMIRSKY; Dmitry ; et al.	2017-08-10
Process chamber for etching low k and other dielectric films Grant 9,666,414 - Lubomirsky , et al. May 30, 2	2017-05-30
Non-intrusive measurement of a wafer DC self-bias in semiconductor processing equipment Grant 9,601,301 - Belostotskiy , et al. March 21, 2	2017-03-21
Temperature ramping using gas distribution plate heat Grant 9,368,370 - Belostotskiy , et al. June 14, 2	2016-06-14
Method Of Patterning A Low-k Dielectric Film App 20150380215 - Nemani; Srinivas D. ; et al.	2015-12-31
Method of patterning a low-k dielectric film Grant 9,165,783 - Nemani , et al. October 20, 2	2015-10-20
Temperature Ramping Using Gas Distribution Plate Heat App 20150262834 - BELOSTOTSKIY; Sergey G. ; et al.	2015-09-17
Method of patterning a silicon nitride dielectric film Grant 9,093,389 - Nemani , et al. July 28, 2	2015-07-28
Low Temperature Plasma Anneal Process For Sublimative Etch Processes App 20150064921 - NEMANI; Srinivas D. ; et al.	2015-03-05
Multizone Hollow Cathode Discharge System With Coaxial And Azimuthal Symmetry And With Consistent Central Trigger App 20150040829 - RAMASWAMY; Kartik ; et al.	2015-02-12
Method and system for etching plural layers on a workpiece including a lower layer containing an advanced memory material Grant 8,932,959 - Nemani , et al. January 13, 2	2015-01-13
Non-intrusive Measurement Of A Wafer Dc Self-bias In Semiconductor Processing Equipment App 20140375299 - Belostotskiy; Sergey G. ; et al.	2014-12-25
Near Surface Etch Selectivity Enhancement App 20140342569 - Zhu; Lina ; et al.	2014-11-20
Pressure Controller Configuration For Semiconductor Processing Applications App 20140311581 - Belostotskiy; Sergey G. ; et al.	2014-10-23
Multi-mode Etch Chamber Source Assembly App 20140262031 - BELOSTOTSKIY; Sergey G. ; et al.	2014-09-18
Method of patterning a low-k dielectric film Grant 8,802,572 - Nemani , et al. August 12, 2	2014-08-12
Method Of Patterning A Silicon Nitride Dielectric Film App 20140199851 - Nemani; Srinivas D. ; et al.	2014-07-17
Method And System For Etching Plural Layers On A Workpiece Including A Lower Layer Containing An Advanced Memory Material App 20140170856 - Nemani; Srinivas D. ; et al.	2014-06-19
Silicon oxide recess etch Grant 8,748,322 - Fung , et al. June 10, 2	2014-06-10
Method Of Patterning A Low-k Dielectric Film App 20140120726 - Nemani; Srinivas D. ; et al.	2014-05-01
Method Of Patterning A Low-k Dielectric Film App 20140017898 - Nemani; Srinivas D. ; et al.	2014-01-16
Temperature enhanced electrostatic chucking in plasma processing apparatus Grant 8,580,693 - Belostotskiy , et al. November 12, 2	2013-11-12
Process Chamber For Etching Low K And Other Dielectric Films App 20130105303 - LUBOMIRSKY; Dmitry ; et al.	2013-05-02
Temperature Enhanced Electrostatic Chucking In Plasma Processing Apparatus App 20120052690 - BELOSTOTSKIY; Sergey G. ; et al.	2012-03-01

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