BEIJING U-PRECISION TECH CO., LTD.

Patent Applications and Registrations

Patent applications and USPTO patent grants for BEIJING U-PRECISION TECH CO., LTD..The latest application filed is for "plane grating calibration system".

Company Profile

3.12.8

BEIJING U-PRECISION TECH CO., LTD. - Beijing CN

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Trademarks

Patent Activity

Patent	Date
Plane Grating Calibration System App 20220260452 - WANG; Leijie ; et al.	2022-08-18
Two-degree-of-freedom heterodyne grating interferometry measurement system Grant 11,307,018 - Zhu , et al. April 19, 2	2022-04-19
Five-degree-of-freedom Heterodyne Grating Interferometry System App 20210262834 - ZHANG; Ming ; et al.	2021-08-26
Two-degree-of-freedom Heterodyne Grating Interferometry Measurement System App 20210164772 - ZHU; Yu ; et al.	2021-06-03
Magnetic-fluid momentum sphere Grant 10,597,172 - Zhu , et al.	2020-03-24
Magnetic levitation reaction sphere Grant 10,532,832 - Zhang , et al. Ja	2020-01-14
Magnetic-fluid Momentum Sphere App 20180273212 - ZHU; Yu ; et al.	2018-09-27
Magnetic Levitation Reaction Sphere App 20180170581 - ZHANG; Ming ; et al.	2018-06-21
Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage Grant 9,995,569 - Zhu , et al. June 12, 2	2018-06-12
Six-degree-of-freedom Displacement Measurement Method For Exposure Region On Silicon Wafer Stage App 20180080757 - Zhu; Yu ; et al.	2018-03-22
Coarse motion and fine motion integrated reticle stage driven by planar motor Grant 9,904,183 - Zhu , et al. February 27, 2	2018-02-27
Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor Grant 9,791,789 - Zhang , et al. October 17, 2	2017-10-17
Coarse Motion And Fine Motion Integrated Reticle Stage Driven By Planar Motor App 20170115580 - ZHU; Yu ; et al.	2017-04-27
Magnetically Suspended Coarse Motion And Fine Motion Integrated Reticle Stage Driven By Planar Motor App 20170052461 - ZHANG; Ming ; et al.	2017-02-23

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