Patent | Date |
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Ultrasonic/megasonic Cleaning Device App 20200406312 - TENG; Yu ;   et al. | 2020-12-31 |
Ultrasonic/megasonic Cleaning Device App 20180056340 - Teng; Yu ;   et al. | 2018-03-01 |
Swing spray device of cleaning apparatus and cleaning method Grant 9,744,565 - Shi , et al. August 29, 2 | 2017-08-29 |
Apparatus, System And Method Of Mass Flow Controlling For Use In Integrated Gas Delivery System App 20170115670 - MOU; Changhua ;   et al. | 2017-04-27 |
Method And Apparatus Of Mass Flow Controlling For Use In Integrated Gas Delivery System App 20170115671 - Mou; Changhua ;   et al. | 2017-04-27 |
Gas-liquid two-phase atomizing cleaning device and cleaning method Grant 9,460,943 - Su , et al. October 4, 2 | 2016-10-04 |
Device and method for loading and unloading quartz reaction tube to and from semiconductor diffusion equipment Grant 9,390,952 - Lin , et al. July 12, 2 | 2016-07-12 |
Vertical No-spin Process Chamber App 20160086811 - Mackedanz; Bruce ;   et al. | 2016-03-24 |
Liquid replenishing device Grant 9,275,880 - Chu , et al. March 1, 2 | 2016-03-01 |
Cleaning device resistant to liquid backsplash and cleaning system therewith Grant 9,266,151 - Liu , et al. February 23, 2 | 2016-02-23 |
Positioning Device For Horizontal External Ignition Apparatus App 20150308688 - Tan; Ruilei ;   et al. | 2015-10-29 |
Swing Spray Device Of Cleaning Apparatus And Cleaning Method App 20150209834 - Shi; Yanhui ;   et al. | 2015-07-30 |
Cleaning Device Resistant To Liquid Backsplash And Cleaning System Therewith App 20150206771 - Liu; Xiaoyan ;   et al. | 2015-07-23 |
Thermocouple Fixing Device And Temperature Measuring Apparatus App 20150153238 - Yang; Shuai ;   et al. | 2015-06-04 |
Device And Method For Loading And Unloading Quartz Reaction Tube To And From Semiconductor Diffusion Equipment App 20150151772 - Lin; Xinjia ;   et al. | 2015-06-04 |
Etchant, Preparation Thereof And Method Of Using The Same In The Cleaning Process App 20150144160 - Henry; Sally Ann ;   et al. | 2015-05-28 |
Device for holding disk-shaped articles and method thereof Grant 9,038,262 - Wu , et al. May 26, 2 | 2015-05-26 |
Zero Lag Dispense Apparatus App 20140352735 - Burkman; Don C. ;   et al. | 2014-12-04 |
Zero Lag Dispense Apparatus App 20140352738 - Burkman; Don C. ;   et al. | 2014-12-04 |
Gas-liquid Two-phase Atomizing Cleaning Device And Cleaning Method App 20140311531 - Su; Yujia ;   et al. | 2014-10-23 |
Liquid Replenishing Device App 20140305515 - Chu; Guochao ;   et al. | 2014-10-16 |
Apparatus for manufacturing semiconductor wafer Grant 8,834,582 - Zhao , et al. September 16, 2 | 2014-09-16 |
Liquid storage device Grant 8,794,257 - He , et al. August 5, 2 | 2014-08-05 |
Automation for high throughput semiconductor batch-wafer processing equipment Grant 8,747,052 - Emami , et al. June 10, 2 | 2014-06-10 |
Flow meter with digital temperature compensation Grant 8,733,179 - Mou , et al. May 27, 2 | 2014-05-27 |
Device For Holding Disk-shaped Articles And Method Thereof App 20130219693 - Wu; Yi ;   et al. | 2013-08-29 |
Liquid Storage Device App 20130174919 - He; Jinqun ;   et al. | 2013-07-11 |
Apparatus For Manufacturing Semiconductor Wafer App 20130160261 - Zhao; Hongyu ;   et al. | 2013-06-27 |
Flow Meter With Digital Temperature Compensation App 20120325012 - Mou; Changhua ;   et al. | 2012-12-27 |
Automation for high throughput semiconductor batch-wafer processing equipment App 20080118333 - Emami; Arsalan Alan ;   et al. | 2008-05-22 |