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Patent applications and USPTO patent grants for Beijers; Clementius Andreas Johannes.The latest application filed is for "lithographic apparatus".
Patent | Date |
---|---|
Lithographic apparatus with actuator to compensate acoustic vibration Grant 9,378,722 - Butler , et al. June 28, 2 | 2016-06-28 |
Lithographic apparatus and device manufacturing method Grant 8,553,199 - Butler , et al. October 8, 2 | 2013-10-08 |
Lithographic apparatus having acoustic resonator Grant 8,243,258 - Butler , et al. August 14, 2 | 2012-08-14 |
Lithographic apparatus and device manufacturing method Grant 7,969,550 - Geerke , et al. June 28, 2 | 2011-06-28 |
Lithographic Apparatus App 20090195763 - Butler; Hans ;   et al. | 2009-08-06 |
Lithographic Apparatus Having Acoustic Resonator App 20090161085 - Butler; Hans ;   et al. | 2009-06-25 |
Lithographic Apparatus and Device Manufacturing Method App 20090147230 - Butler; Hans ;   et al. | 2009-06-11 |
Lithographic apparatus and device manufacturing method App 20080259299 - Geerke; Johan Hendrik ;   et al. | 2008-10-23 |
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