Patent | Date |
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Methods and systems for early warning detection of emergency vehicles Grant 8,842,021 - Behm , et al. September 23, 2 | 2014-09-23 |
Manufacturing execution system (MES) including a wafer sampling engine (WSE) for a semiconductor manufacturing process Grant 8,565,910 - Behm , et al. October 22, 2 | 2013-10-22 |
Methods And Systems For Early Warning Detection Of Emergency Vehicles App 20120313792 - BEHM; Gary W. ;   et al. | 2012-12-13 |
Method For Using Real-time Apc Information For An Enhanced Lot Sampling Engine App 20120215490 - BEHM; Gary W. ;   et al. | 2012-08-23 |
Manufacturing Execution System (mes) Including A Wafer Sampling Engine (wse) For A Semiconductor Manufacturing Process App 20120203369 - Behm; Gary W. ;   et al. | 2012-08-09 |
Method for using real-time APC information for an enhanced lot sampling engine Grant 8,229,691 - Behm , et al. July 24, 2 | 2012-07-24 |
Apparatus and method for enhancing field of vision of the visually impaired Grant 8,130,262 - Behm , et al. March 6, 2 | 2012-03-06 |
Method and apparatus for tactile haptic device to guide user in real-time obstacle avoidance Grant 8,077,020 - Behm , et al. December 13, 2 | 2011-12-13 |
Factory level and tool level advanced process control systems integration implementation Grant 7,899,566 - Behm , et al. March 1, 2 | 2011-03-01 |
Method of performing measurement sampling of lots in a manufacturing process Grant 7,895,008 - Behm , et al. February 22, 2 | 2011-02-22 |
Apparatus and method for sensing of three-dimensional environmental information Grant 7,778,112 - Behm , et al. August 17, 2 | 2010-08-17 |
Method And Apparatus For The Monitoring Of Water Usage With Pattern Recognition App 20100204839 - Behm; Gary W. ;   et al. | 2010-08-12 |
Apparatus And Method For Enhancing Field Of Vision Of The Visually Impaired App 20100177179 - Behm; Gary W. ;   et al. | 2010-07-15 |
Method And Apparatus For Tactile Haptic Device To Guide User In Real-time Obstacle Avoidance App 20100007474 - BEHM; GARY W. ;   et al. | 2010-01-14 |
Method For Using Real-time Apc Information For An Enhanced Lot Sampling Engine App 20090306803 - Behm; Gary W. ;   et al. | 2009-12-10 |
Method Of Performing Measurement Sampling Of Lots In A Manufacturing Process App 20090234485 - Behm; Gary W. ;   et al. | 2009-09-17 |
Providing a dynamic sampling plan for integrated metrology Grant 7,577,537 - Behm , et al. August 18, 2 | 2009-08-18 |
Factory Level And Tool Level Advanced Process Control Systems Integration Implementation App 20090118851 - Behm; Gary W. ;   et al. | 2009-05-07 |
Method and system for reducing the variation in film thickness on a plurality of semiconductor wafers having multiple deposition paths in a semiconductor manufacturing process Grant 7,509,186 - Li , et al. March 24, 2 | 2009-03-24 |
Factory level and tool level advanced process control systems integration implementation Grant 7,489,980 - Behm , et al. February 10, 2 | 2009-02-10 |
Apparatus And Method For Sensing Of Three-dimensional Environmental Information App 20090025765 - Behm; Gary W. ;   et al. | 2009-01-29 |
Apparatus And Method For Sensing Of Three-dimensional Environmental Information App 20090028003 - Behm; Gary W. ;   et al. | 2009-01-29 |
Providing A Dynamic Sampling Plan For Integrated Metrology App 20080167830 - Behm; Gary W. ;   et al. | 2008-07-10 |
Method and system of providing a dynamic sampling plan for integrated metrology Grant 7,398,172 - Behm , et al. July 8, 2 | 2008-07-08 |
Method And System For Reducing The Variation In Film Thickness On A Plurality Of Semiconductor Wafers Having Multiple Deposition Paths In A Semiconductor Manufacturing Process App 20080124818 - Li; Yue ;   et al. | 2008-05-29 |
See-through Mask To Facilitate Communication In Environments Requiring The Wearing Of A Mask App 20080092897 - Behm; Gary W. ;   et al. | 2008-04-24 |
Method And System Of Providing A Dynamic Sampling Plan For Integrated Metrology App 20070282549 - Behm; Gary W. ;   et al. | 2007-12-06 |
Integration of factory level and tool level advanced process control systems Grant 7,113,845 - Behm , et al. September 26, 2 | 2006-09-26 |