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Patent applications and USPTO patent grants for BEHERA; Swayambhu Prasad.The latest application filed is for "film thickness uniformity improvement using edge ring and bias electrode geometry".
Patent | Date |
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Film Thickness Uniformity Improvement Using Edge Ring And Bias Electrode Geometry App 20220301920 - LO; Kin Pong ;   et al. | 2022-09-22 |
Film thickness uniformity improvement using edge ring and bias electrode geometry Grant 11,380,575 - Lo , et al. July 5, 2 | 2022-07-05 |
Film Thickness Uniformity Improvement Using Edge Ring And Bias Electrode Geometry App 20220028656 - LO; Kin Pong ;   et al. | 2022-01-27 |
High Temperature Electrostatic Chucking With Dielectric Constant Engineered In-situ Charge Trap Materials App 20190355609 - KULSHRESHTHA; Prashant ;   et al. | 2019-11-21 |
High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials Grant 10,325,800 - Kulshreshtha , et al. | 2019-06-18 |
High Temperature Electrostatic Chucking With Dielectric Constant Engineered In-situ Charge Trap Materials App 20160064264 - KULSHRESHTHA; Prashant ;   et al. | 2016-03-03 |
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