Behera; Swayambhu P.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Behera; Swayambhu P..The latest application filed is for "ultra-conformal carbon film deposition".
- Behera; Swayambhu P. - Santa Clara CA
| Patent | Date |
|---|---|
| Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system Grant 10,403,535 - Ye , et al. Sep | 2019-09-03 |
| Ultra-conformal carbon film deposition Grant 10,074,534 - Behera , et al. September 11, 2 | 2018-09-11 |
| Ultra-conformal Carbon Film Deposition App 20170301537 - BEHERA; Swayambhu P. ; et al. | 2017-10-19 |
| Ultra-conformal carbon film deposition Grant 9,721,784 - Behera , et al. August 1, 2 | 2017-08-01 |
| Method And Apparatus Of Processing Wafers With Compressive Or Tensile Stress At Elevated Temperatures In A Plasma Enhanced Chemical Vapor Deposition System App 20160049323 - YE; Zheng John ; et al. | 2016-02-18 |
| Ultra-conformal Carbon Film Deposition Layer-by-layer Deposition Of Carbon-doped Oxide Films App 20160005596 - BEHERA; Swayambhu P. ; et al. | 2016-01-07 |
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