Behdjat; Mehran
Patent Applications and Registrations
Patent applications and USPTO patent grants for Behdjat; Mehran.The latest application filed is for "support ring with masked edge".
Company Profile
5.43.37
- Behdjat; Mehran - San Jose CA
- Behdjat; Mehran - US
Patent Activity
| Patent | Date |
|---|---|
| Graphite susceptor Grant 11,021,794 - Rao , et al. June 1, 2 | 2021-06-01 |
| Non-contact temperature calibration tool for a substrate support and method of using the same Grant 10,763,141 - Merchant , et al. Sep | 2020-09-01 |
| Semiconductor processing chamber Grant 10,741,428 - Hunter , et al. A | 2020-08-11 |
| Substrate processing system, valve assembly, and processing method Grant 10,665,476 - Quiles , et al. | 2020-05-26 |
| Slit valve door with moving mating part Grant 10,453,718 - Behdjat , et al. Oc | 2019-10-22 |
| Support ring with masked edge Grant 10,373,859 - Behdjat , et al. | 2019-08-06 |
| Support cylinder for thermal processing chamber Grant 10,128,144 - Behdjat , et al. November 13, 2 | 2018-11-13 |
| Support Ring With Masked Edge App 20180315639 - BEHDJAT; Mehran ; et al. | 2018-11-01 |
| Graphite Susceptor App 20180298494 - RAO; Preetham ; et al. | 2018-10-18 |
| Non-contact Temperature Calibration Tool For A Substrate Support And Method Of Using The Same App 20180269089 - MERCHANT; Niraj ; et al. | 2018-09-20 |
| Support ring with masked edge Grant 10,056,286 - Behdjat , et al. August 21, 2 | 2018-08-21 |
| Graphite susceptor Grant 10,000,847 - Rao , et al. June 19, 2 | 2018-06-19 |
| Support Ring With Masked Edge App 20180102274 - BEHDJAT; Mehran ; et al. | 2018-04-12 |
| Patterned heater pedestal Grant D807,481 - Iu , et al. January 9, 2 | 2018-01-09 |
| Support ring with masked edge Grant 9,842,759 - Behdjat , et al. December 12, 2 | 2017-12-12 |
| Semiconductor Processing Chamber App 20170294325 - HUNTER; Aaron Muir ; et al. | 2017-10-12 |
| Vacuum Chuck Pressure Control System App 20170294333 - IU; Dongming ; et al. | 2017-10-12 |
| Support Cylinder For Thermal Processing Cylinder App 20170263493 - BEHDJAT; Mehran ; et al. | 2017-09-14 |
| Showerhead for a semiconductor processing chamber Grant D793,526 - Behdjat August 1, 2 | 2017-08-01 |
| Support cylinder for thermal processing chamber Grant 9,659,809 - Behdjat , et al. May 23, 2 | 2017-05-23 |
| Particle control in laser processing systems Grant 9,579,750 - Hunter , et al. February 28, 2 | 2017-02-28 |
| Apparatus for reducing the effect of contamination on a rapid thermal process Grant 9,514,969 - Miller , et al. December 6, 2 | 2016-12-06 |
| Support Cylinder For Thermal Processing Chamber App 20160300752 - BEHDJAT; Mehran ; et al. | 2016-10-13 |
| Support Ring With Masked Edge App 20160247708 - BEHDJAT; Mehran ; et al. | 2016-08-25 |
| Support cylinder for thermal processing chamber Grant 9,385,004 - Behdjat , et al. July 5, 2 | 2016-07-05 |
| Support ring with masked edge Grant 9,330,955 - Behdjat , et al. May 3, 2 | 2016-05-03 |
| Graphite Susceptor App 20160083840 - RAO; PREETHAM ; et al. | 2016-03-24 |
| Test apparatus for reflective cavity characterization Grant 9,140,647 - Ranish , et al. September 22, 2 | 2015-09-22 |
| Chucking Capability For Bowed Wafers On Dsa App 20150228528 - BEHDJAT; Mehran | 2015-08-13 |
| Support Ring With Masked Edge App 20150187630 - BEHDJAT; Mehran ; et al. | 2015-07-02 |
| Apparatus For Reducing The Effect Of Contamination On A Rapid Thermal Process App 20150155190 - MILLER; Aaron ; et al. | 2015-06-04 |
| Test Apparatus For Reflective Cavity Characterization App 20150070686 - RANISH; Joseph M. ; et al. | 2015-03-12 |
| Support Cylinder For Thermal Processing Chamber App 20150050819 - BEHDJAT; Mehran ; et al. | 2015-02-19 |
| Substrate Processing System, Valve Assembly, And Processing Method App 20150013771 - Quiles; Efrain ; et al. | 2015-01-15 |
| Electron beam welding of large vacuum chamber body having a high emissivity coating Grant 8,915,389 - Kurita , et al. December 23, 2 | 2014-12-23 |
| Test apparatus for reflective cavity characterization Grant 8,896,837 - Ranish , et al. November 25, 2 | 2014-11-25 |
| Thermal reactor with improved gas flow distribution Grant 8,888,916 - Tseng , et al. November 18, 2 | 2014-11-18 |
| Processing system with the dual end-effector handling Grant 8,796,589 - Quiles , et al. August 5, 2 | 2014-08-05 |
| High temperature vacuum chuck assembly Grant 8,698,048 - Lerner , et al. April 15, 2 | 2014-04-15 |
| Thermal Reactor With Improved Gas Flow Distribution App 20140079376 - TSENG; Ming-Kuei (Michael) ; et al. | 2014-03-20 |
| Slit Valve Door With Moving Mating Part App 20140023460 - BEHDJAT; Mehran ; et al. | 2014-01-23 |
| Thermal reactor with improved gas flow distribution Grant 8,608,853 - Tseng , et al. December 17, 2 | 2013-12-17 |
| Electron Beam Welding Of Large Vacuum Chamber Body Having A High Emissivity Coating App 20130327764 - KURITA; Shinichi ; et al. | 2013-12-12 |
| Slit valve door able to compensate for chamber deflection Grant 8,567,756 - Behdjat , et al. October 29, 2 | 2013-10-29 |
| Electron beam welding of large vacuum chamber body having a high emissivity coating Grant 8,528,762 - Kurita , et al. September 10, 2 | 2013-09-10 |
| Method of thermally treating silicon with oxygen Grant 8,497,193 - Yokota , et al. July 30, 2 | 2013-07-30 |
| Particle Control In Laser Processing Systems App 20130087547 - Hunter; Aaron Muir ; et al. | 2013-04-11 |
| Water cooled gas injector Grant 8,409,353 - Yokota , et al. April 2, 2 | 2013-04-02 |
| Lift pin for substrate processing Grant 8,256,754 - Lerner , et al. September 4, 2 | 2012-09-04 |
| High Temperature Vacuum Chuck Assembly App 20120205878 - Lerner; Alexander N. ; et al. | 2012-08-16 |
| Temperature measurement and control of wafer support in thermal processing chamber Grant 8,222,574 - Sorabji , et al. July 17, 2 | 2012-07-17 |
| High temperature vacuum chuck assembly Grant 8,198,567 - Lerner , et al. June 12, 2 | 2012-06-12 |
| Thermal Reactor With Improved Gas Flow Distribution App 20120058648 - Tseng; Ming-Kuei (Michael) ; et al. | 2012-03-08 |
| Water cooled gas injector App 20120031332 - Yokota; Yoshitaka ; et al. | 2012-02-09 |
| Load lock chamber for large area substrate processing system Grant 8,070,408 - Behdjat , et al. December 6, 2 | 2011-12-06 |
| Thermal reactor with improved gas flow distribution Grant 8,056,500 - Tseng , et al. November 15, 2 | 2011-11-15 |
| Method of thermally treating silicon with oxygen App 20110250764 - Yokota; Yoshitaka ; et al. | 2011-10-13 |
| Thermal oxidation of silicon using ozone Grant 7,972,441 - Yokota , et al. July 5, 2 | 2011-07-05 |
| Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20110089166 - HUNTER; AARON MUIR ; et al. | 2011-04-21 |
| Temperature measurement and control of wafer support in thermal processing chamber Grant 7,860,379 - Hunter , et al. December 28, 2 | 2010-12-28 |
| Electron Beam Welding Of Large Vacuum Chamber Body Having A High Emissivity Coating App 20100122982 - KURITA; SHINICHI ; et al. | 2010-05-20 |
| Load Lock Chamber For Large Area Substrate Processing System App 20100054905 - BEHDJAT; MEHRAN ; et al. | 2010-03-04 |
| Slotted Tssl Door To Couple O-ring With Moving Mating Part App 20100050534 - Behdjat; Mehran ; et al. | 2010-03-04 |
| Tube Diffuser For Load Lock Chamber App 20100011785 - Behdjat; Mehran ; et al. | 2010-01-21 |
| High Temperature Vacuum Chuck Assembly App 20090179365 - Lerner; Alexander N. ; et al. | 2009-07-16 |
| Lift Pin For Substrate Processing App 20090155025 - LERNER; ALEXANDER N. ; et al. | 2009-06-18 |
| Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20080169282 - SORABJI; KHURSHED ; et al. | 2008-07-17 |
| Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20080170842 - HUNTER; AARON MUIR ; et al. | 2008-07-17 |
| Method of Thermally Oxidizing Silicon Using Ozone App 20070026693 - YOKOTA; Yoshitaka ; et al. | 2007-02-01 |
| Thermal oxidation of silicon using ozone App 20060223315 - Yokota; Yoshitaka ; et al. | 2006-10-05 |
| Processing system App 20050072716 - Quiles, Efrain ; et al. | 2005-04-07 |
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