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Patent applications and USPTO patent grants for Beese; Steven C..The latest application filed is for "dynamic support system for quartz process chamber".
Patent | Date |
---|---|
Multi-channel gas-delivery system Grant 9,441,295 - Rozenzon , et al. September 13, 2 | 2016-09-13 |
Dynamic Support System For Quartz Process Chamber App 20160133778 - Trujillo; Robert T. ;   et al. | 2016-05-12 |
Dynamic support system for quartz process chamber Grant 9,240,513 - Trujillo , et al. January 19, 2 | 2016-01-19 |
Rapid thermal process reactor utilizing a low profile dome Grant 8,610,033 - Moore , et al. December 17, 2 | 2013-12-17 |
Stable wafer-carrier system Grant 8,562,745 - Rozenzon , et al. October 22, 2 | 2013-10-22 |
Stable Wafer-carrier System App 20110283941 - Rozenzon; Yan ;   et al. | 2011-11-24 |
Multi-channel Gas-delivery System App 20110277690 - Rozenzon; Yan ;   et al. | 2011-11-17 |
Dynamic Support System For Quartz Process Chamber App 20110277688 - Trujillo; Robert T. ;   et al. | 2011-11-17 |
Power management system for a semiconductor processing facility Grant 5,801,961 - Moore , et al. September 1, 1 | 1998-09-01 |
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