BEERENS; Ruud Antonius Catharina Maria
Patent Applications and Registrations
Patent applications and USPTO patent grants for BEERENS; Ruud Antonius Catharina Maria.The latest application filed is for "laser focussing module".
Company Profile
0.32.25
- BEERENS; Ruud Antonius Catharina Maria - Roggel NL
Patent Activity
| Patent | Date |
|---|---|
| Laser Focussing Module App 20220206397 - BEERENS; Ruud Antonius Catharina Maria ; et al. | 2022-06-30 |
| Sensor, object positioning system, lithographic apparatus and device manufacturing method Grant 10,061,213 - Akkermans , et al. August 28, 2 | 2018-08-28 |
| Radiation collector, radiation source and lithographic apparatus Grant 9,983,482 - Loopstra , et al. May 29, 2 | 2018-05-29 |
| Stage system and lithographic apparatus comprising such stage system Grant 9,785,060 - Beerens , et al. October 10, 2 | 2017-10-10 |
| Sensor, Object Positioning System, Lithographic Apparatus And Device Manufacturing Method App 20170277042 - AKKERMANS; Johannes Antonius Gerardus ; et al. | 2017-09-28 |
| Lithographic apparatus, device manufacturing method and displacement measurement system Grant 9,575,416 - Van Der Pasch , et al. February 21, 2 | 2017-02-21 |
| Rotatable Frame, Lithographic Apparatus, Projection System, Method For Focusing Radiation And Device Manufacturing Method App 20160349628 - BLEEKER; Arno Jan ; et al. | 2016-12-01 |
| Lithographic apparatus and device manufacturing method Grant 9,507,277 - Aangenent , et al. November 29, 2 | 2016-11-29 |
| Lithographic apparatus and device manufacturing method Grant 9,494,869 - Butler , et al. November 15, 2 | 2016-11-15 |
| Lithographic apparatus and method Grant 9,410,796 - Beerens , et al. August 9, 2 | 2016-08-09 |
| Positioning system, lithographic apparatus and device manufacturing method Grant 9,383,659 - Beerens , et al. July 5, 2 | 2016-07-05 |
| Lithographic apparatus with a deformation sensor Grant 9,360,774 - Spruit , et al. June 7, 2 | 2016-06-07 |
| Optical element mount for lithographic apparatus Grant 9,335,641 - Tegenbosch , et al. May 10, 2 | 2016-05-10 |
| Radiation Collector, Radiation Source and Lithographic Apparatus App 20160026091 - LOOPSTRA; Erik Roelof ; et al. | 2016-01-28 |
| Lithographic apparatus and device manufacturing method Grant 9,207,547 - Spruit , et al. December 8, 2 | 2015-12-08 |
| Lithographic apparatus and lithographic projection method Grant 9,182,683 - Beerens , et al. November 10, 2 | 2015-11-10 |
| Lithographic apparatus and method Grant 9,141,004 - Vermeulen , et al. September 22, 2 | 2015-09-22 |
| Lithographic apparatus and device manufacturing method Grant 9,141,003 - Beerens , et al. September 22, 2 | 2015-09-22 |
| Stage System And Lithographic Apparatus Comprising Such Stage System App 20150227060 - Beerens; Ruud Antonius Catharina Maria ; et al. | 2015-08-13 |
| Lithographic Apparatus, Device Manufacturing Method And Displacement Measurement System App 20150212428 - Van Der Pasch; Engelbertus Antonius Fransiscus ; et al. | 2015-07-30 |
| Positioning System, Lithographic Apparatus And Device Manufacturing Method App 20150168852 - Beerens; Ruud Antonius Catharina Maria ; et al. | 2015-06-18 |
| Lithographic apparatus and removable member Grant 8,976,335 - Beerens , et al. March 10, 2 | 2015-03-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20140340666 - Butler; Hans ; et al. | 2014-11-20 |
| Lithographic apparatus having an encoder type position sensor system Grant 8,836,913 - Steijaert , et al. September 16, 2 | 2014-09-16 |
| Lithographic Apparatus, Method Of Setting Up A Lithographic Apparatus And Device Manufacturing Method App 20140192337 - Jan Bleeker; Arno ; et al. | 2014-07-10 |
| Lithographic apparatus having encoder type position sensor system Grant 8,760,615 - Steijaert , et al. June 24, 2 | 2014-06-24 |
| Position sensor and lithographic apparatus Grant 8,736,815 - Beerens , et al. May 27, 2 | 2014-05-27 |
| Lithographic apparatus having an encoder position sensor system Grant 8,687,166 - Steijaert , et al. April 1, 2 | 2014-04-01 |
| Lithographic Apparatus And Device Manufacturing Method App 20130335722 - Aangenent; Wilhelmus Henricus Theodorus Maria ; et al. | 2013-12-19 |
| Lithographic Apparatus and Method App 20130162966 - BEERENS; Ruud Antonius Catharina Maria ; et al. | 2013-06-27 |
| Lithographic Apparatus And Device Manufacturing Method App 20130077072 - SPRUIT; Johannes Hendrikus Maria ; et al. | 2013-03-28 |
| Lithographic apparatus and device manufacturing method Grant 8,334,983 - Beerens , et al. December 18, 2 | 2012-12-18 |
| Lithographic Apparatus And Method App 20120249987 - Vermeulen; Johannes Petrus Martinus Bernardus ; et al. | 2012-10-04 |
| Lithographic Apparatus and Method App 20120224161 - BEERENS; Ruud Antonius Catharina Maria ; et al. | 2012-09-06 |
| Lithographic Apparatus And Lithographic Projection Method App 20120212715 - Beerens; Ruud Antonius Catharina Maria ; et al. | 2012-08-23 |
| Lithographic Apparatus And Removable Member App 20120162621 - Beerens; Ruud Antonius Catharina Maria ; et al. | 2012-06-28 |
| Lithographic Apparatus Having an Encoder Type Position Sensor System App 20120075613 - STEIJAERT; Peter Paul ; et al. | 2012-03-29 |
| Position Sensor And Lithographic Apparatus App 20110304839 - BEERENS; Ruud Antonius Catharina Maria ; et al. | 2011-12-15 |
| Optical Element Mount For Lithographic Apparatus App 20110205517 - Tegenbosch; Henricus Gerardus ; et al. | 2011-08-25 |
| Lithographic apparatus and sensor calibration method Grant 7,999,912 - Van Der Pasch , et al. August 16, 2 | 2011-08-16 |
| Lithographic Apparatus And Device Manufacturing Method App 20110085180 - Beerens; Ruud Antonius Catharina Maria ; et al. | 2011-04-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20100297561 - BEERENS; Ruud Antonius Catharina Maria ; et al. | 2010-11-25 |
| Lithographic apparatus and sensor calibration method App 20080278702 - Van Der Pasch; Engelbertus Antonius Fransiscus ; et al. | 2008-11-13 |
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