Beder; Susanne

Patent Applications and Registrations

Patent applications and USPTO patent grants for Beder; Susanne.The latest application filed is for "optical system, heating arrangement, and method for heating an optical element in an optical system".

Company Profile

2.34.40

Beder; Susanne - Aalen DE
Beder; Susanne - 73434 Aalen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical System, Heating Arrangement, And Method For Heating An Optical Element In An Optical System App 20220299732 - Berner; Andrea ; et al.	2022-09-22
Imaging optical unit for imaging an object field into an image field Grant 11,119,413 - Ruoff , et al. September 14, 2	2021-09-14
Imaging Optical Unit For Imaging An Object Field Into An Image Field App 20200218045 - Ruoff; Johannes ; et al.	2020-07-09
Imaging optical unit for a metrology system for examining a lithography mask Grant 10,606,048 - Ruoff , et al.	2020-03-31
Imaging Optical Unit For A Metrology System For Examining A Lithography Mask App 20170131528 - Ruoff; Johannes ; et al.	2017-05-11
Imaging optical unit for a projection exposure apparatus Grant 9,459,539 - Mann , et al. October 4, 2	2016-10-04
Catadioptric Projection Objective App 20160274343 - Shafer; David R. ; et al.	2016-09-22
Projection lens system of a microlithographic projection exposure installation Grant 9,164,396 - Beierl , et al. October 20, 2	2015-10-20
Catadioptric Projection Objective App 20150055214 - Shafer; David R. ; et al.	2015-02-26
Immersion catadioptric projection objective having two intermediate images Grant 8,908,269 - Shafer , et al. December 9, 2	2014-12-09
Catadioptric projection objective Grant 8,730,572 - Shafer , et al. May 20, 2	2014-05-20
Catadioptric Projection Objective App 20140111787 - Shafer; David R. ; et al.	2014-04-24
Imaging Optical Unit For A Projection Exposure Apparatus App 20140038110 - Mann; Hans-Juergen ; et al.	2014-02-06
Catadioptric projection objective Grant 8,416,490 - Shafer , et al. April 9, 2	2013-04-09
Projection Lens System Of A Microlithographic Projection Exposure Installation App 20130070224 - Beierl; Helmut ; et al.	2013-03-21
Catadioptric projection objective Grant 8,355,201 - Shafer , et al. January 15, 2	2013-01-15
Projection objective of a microlithographic projection exposure apparatus Grant 8,325,426 - Schuster , et al. December 4, 2	2012-12-04
Projection lens system of a microlithographic projection exposure installation Grant 8,319,944 - Beierl , et al. November 27, 2	2012-11-27
Catadioptric Projection Objective App 20120250147 - Shafer; David ; et al.	2012-10-04
Catadioptric projection objective Grant 8,208,198 - Shafer , et al. June 26, 2	2012-06-26
Catadioptric projection objective Grant 8,208,199 - Shafer , et al. June 26, 2	2012-06-26
Catadioptric projection objective Grant 8,199,400 - Shafer , et al. June 12, 2	2012-06-12
Projection objective for lithography Grant 8,068,276 - Feldmann , et al. November 29, 2	2011-11-29
Illumination system or projection lens of a microlithographic exposure system Grant 8,031,326 - Totzeck , et al. October 4, 2	2011-10-04
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20110235013 - Schuster; Karl-Heinz ; et al.	2011-09-29
Projection Objective For A Microlithographic Projection Exposure Apparatus App 20110228246 - Kneer; Bernhard ; et al.	2011-09-22
Catadioptric Projection Objective App 20110211252 - Shafer; David ; et al.	2011-09-01
Projection objective of a microlithographic projection exposure apparatus Grant 7,982,969 - Schuster , et al. July 19, 2	2011-07-19
Projection Objective For Lithography App 20110026110 - Feldmann; Heiko ; et al.	2011-02-03
Hologram and method of manufacturing an optical element using a hologram Grant 7,848,031 - Hetzler , et al. December 7, 2	2010-12-07
Projection objective for lithography Grant 7,835,073 - Feldmann , et al. November 16, 2	2010-11-16
Projection Lens System Of A Microlithographic Projection Exposure Installation App 20100265478 - Beierl; Helmut ; et al.	2010-10-21
Catadioptric Projection Objective App 20100265572 - Shafer; David ; et al.	2010-10-21
Projection objective having a high aperture and a planar end surface Grant 7,782,538 - Beder , et al. August 24, 2	2010-08-24
Projection lens system of a microlithographic projection exposure installation Grant 7,782,440 - Beierl , et al. August 24, 2	2010-08-24
Method of manufacturing an optical element Grant 7,728,987 - Arnold , et al. June 1, 2	2010-06-01
Imaging system for a microlithographical projection light system Grant 7,719,658 - Dorsel , et al. May 18, 2	2010-05-18
Projection objective of a microlithographic projection exposure apparatus Grant 7,710,640 - Beder , et al. May 4, 2	2010-05-04
Catadioptric Projection Objective App 20100014153 - Shafer; David ; et al.	2010-01-21
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20090284831 - Schuster; Karl-Heinz ; et al.	2009-11-19
Projection objective adapted for use with different immersion fluids or liquids, method of conversion of such and production method Grant 7,589,903 - Beder , et al. September 15, 2	2009-09-15
Microlithographic projection exposure apparatus Grant 7,570,343 - Dodoc , et al. August 4, 2	2009-08-04
Catadioptric Projection Objective App 20090190208 - Shafer; David ; et al.	2009-07-30
Projection Objective Having A High Aperture And A Planar End Surface App 20090059385 - BEDER; Susanne ; et al.	2009-03-05
Projection Lens Of A Microlithographic Exposure System App 20090021830 - Totzeck; Michael ; et al.	2009-01-22
Arrangement of optical elements in a microlithographic projection exposure apparatus Grant 7,474,469 - Totzeck , et al. January 6, 2	2009-01-06
Projection objective having a high aperture and a planar end surface Grant 7,466,489 - Beder , et al. December 16, 2	2008-12-16
Projection Objective For A Microlithographic Projection Exposure Apparatus App 20080304033 - Kneer; Bernhard ; et al.	2008-12-11
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20080278799 - Beder; Susanne ; et al.	2008-11-13
Projection Objective Adapted For Use With Different Immersion Fluids Or Liquids, Method Of Conversion Of Such And Production Method App 20080273248 - Beder; Susanne ; et al.	2008-11-06
Objectives as a microlithography projection objective with at least one liquid lens Grant 7,428,105 - Shafer , et al. September 23, 2	2008-09-23
Illumination System Or Projection Lens Of A Microlithographic Exposure System App 20080204877 - Totzeck; Michael ; et al.	2008-08-28
Projection Objective For Lithography App 20080174858 - Feldmann; Heiko ; et al.	2008-07-24
Hologram and Method of Manufacturing an Optical Element Using a Hologram App 20080137090 - Hetzler; Jochen ; et al.	2008-06-12
Objectives as a microlithography projection objective with at least one liquid lens Grant 7,385,764 - Shafer , et al. June 10, 2	2008-06-10
Projection Lens System of a Microlithographic Projection Exposure Installation App 20080106711 - Beierl; Helmut ; et al.	2008-05-08
Projection Optical System And Method App 20080068705 - Shafer; David ; et al.	2008-03-20
Method of Manufacturing an Optical Element App 20080043247 - Arnold; Ralf ; et al.	2008-02-21
Objectives As A Microlithography Projection Objective With At Least One Liquid Lens App 20080030869 - Shafer; David R. ; et al.	2008-02-07
Imaging System for a Microlithographical Projection Light System App 20070285637 - Dorsel; Andreas ; et al.	2007-12-13
Projection optical system and method Grant 7,301,707 - Shafer , et al. November 27, 2	2007-11-27
Catadioptric projection objective App 20070236674 - Shafer; David ; et al.	2007-10-11
Projection objective for a microlithographic projection exposure apparatus App 20070165198 - Kneer; Bernhard ; et al.	2007-07-19
Objectives as a microlithography projection objective with at least one liquid lens App 20060221456 - Shafer; David R. ; et al.	2006-10-05
Microlithographic projection exposure apparatus App 20060187430 - Dodoc; Aurelian ; et al.	2006-08-24
Method of manufacturing an optical element using a hologram Grant 7,061,626 - Schillke , et al. June 13, 2	2006-06-13
Arrangement of optical elements in a microlithographic projection exposure apparatus App 20060066962 - Totzeck; Michael ; et al.	2006-03-30
Projection optical system and method App 20060056064 - Shafer; Dave ; et al.	2006-03-16
Projection objective having a high aperture and a planar end surface App 20060012885 - Beder; Susanne ; et al.	2006-01-19
Method of calibrating an interferometer and method of manufacturing an optical element App 20050275849 - Freimann, Rolf ; et al.	2005-12-15
Method for measuring and manufacturing an optical element and optical apparatus App 20050225774 - Freimann, Rolf ; et al.	2005-10-13