Beckers; Marcel
Patent Applications and Registrations
Patent applications and USPTO patent grants for Beckers; Marcel.The latest application filed is for "lithographic apparatus and device manufacturing method".
Company Profile
5.49.39
- Beckers; Marcel - Eindhoven NL
- Beckers; Marcel - Waalre NL
- Beckers; Marcel - RK Eindhoven NL
Patent Activity
| Patent | Date |
|---|---|
| Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid Grant 10,802,410 - Kemper , et al. October 13, 2 | 2020-10-13 |
| Lithographic apparatus Grant 10,649,341 - Van Den Dungen , et al. | 2020-05-12 |
| Lithographic apparatus and device manufacturing method Grant 10,495,984 - Beckers , et al. De | 2019-12-03 |
| Lithographic Apparatus And Device Manufacturing Method App 20190179232 - BECKERS; Marcel ; et al. | 2019-06-13 |
| Lithographic apparatus and device manufacturing method Grant 10,209,629 - Beckers , et al. Feb | 2019-02-19 |
| Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20180292762 - KEMPER; Nicolaas Rudolf ; et al. | 2018-10-11 |
| Lithographic apparatus and device manufacturing method Grant 10,088,755 - Van De Kerkhof , et al. October 2, 2 | 2018-10-02 |
| Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 10,018,925 - Kemper , et al. July 10, 2 | 2018-07-10 |
| Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation Grant 9,983,489 - Berendsen , et al. May 29, 2 | 2018-05-29 |
| Lithographic Apparatus And Device Manufacturing Method App 20180081285 - BECKERS; Marcel ; et al. | 2018-03-22 |
| Lithographic apparatus and device manufacturing method Grant 9,857,695 - Beckers , et al. January 2, 2 | 2018-01-02 |
| Lithographic Apparatus And Device Manufacturing Method App 20170285489 - VAN DE KERKHOF; Marcus Adrianus ; et al. | 2017-10-05 |
| Lithographic apparatus and device manufacturing method Grant 9,715,179 - Van De Kerkhof , et al. July 25, 2 | 2017-07-25 |
| Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20170192365 - KEMPER; Nicolaas Rudolf ; et al. | 2017-07-06 |
| Method For Compensating for an Exposure Error, a Device Manufacturing Method, a Substrate Table, a Lithographic Apparatus, a Control System, a Method for Measuring Reflectivity and a Method for Measuring a Dose of EUV Radiation App 20170115578 - BERENDSEN; Christianus Wilhelmus Johannes ; et al. | 2017-04-27 |
| Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 9,606,429 - Kemper , et al. March 28, 2 | 2017-03-28 |
| Lithographic Apparatus And Device Manufacturing Method App 20170038695 - KEMPER; Nicolaas Rudolf ; et al. | 2017-02-09 |
| Lithographic Apparatus App 20170023870 - VAN DEN DUNGEN; Clemens Johannes Gerardus ; et al. | 2017-01-26 |
| Lithographic Apparatus And Device Manufacturing Method App 20160370713 - BECKERS; Marcel ; et al. | 2016-12-22 |
| Lithographic apparatus and device manufacturing method Grant 9,477,158 - Kemper , et al. October 25, 2 | 2016-10-25 |
| Lithographic apparatus and device manufacturing method Grant 9,429,853 - Beckers , et al. August 30, 2 | 2016-08-30 |
| Lithographic Apparatus And Device Manufacturing Method App 20160054647 - VAN DE KERKHOF; Marcus Adrianus ; et al. | 2016-02-25 |
| Lithographic apparatus and device manufacturing method Grant 9,182,678 - Van De Kerkhof , et al. November 10, 2 | 2015-11-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20150309420 - BECKERS; Marcel ; et al. | 2015-10-29 |
| Lithographic Apparatus App 20150234294 - VAN DEN DUNGEN; Clemens Johannes Gerardus ; et al. | 2015-08-20 |
| Lithographic apparatus Grant 9,036,127 - Van den Dungen , et al. May 19, 2 | 2015-05-19 |
| Lithographic apparatus and device manufacturing method Grant 8,988,651 - Beckers , et al. March 24, 2 | 2015-03-24 |
| Lithographic apparatus and device manufacturing method Grant 8,976,334 - Beckers , et al. March 10, 2 | 2015-03-10 |
| Lithographic apparatus and device manufacturing method Grant 8,958,054 - Beckers , et al. February 17, 2 | 2015-02-17 |
| Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 8,953,142 - Kemper , et al. February 10, 2 | 2015-02-10 |
| Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20150015857 - KEMPER; Nicolaas Rudolf ; et al. | 2015-01-15 |
| Methods relating to immersion lithography and an immersion lithographic apparatus Grant 8,587,762 - Streefkerk , et al. November 19, 2 | 2013-11-19 |
| Lithographic apparatus and device manufacturing method Grant 8,462,314 - Beckers , et al. June 11, 2 | 2013-06-11 |
| Lithographic apparatus and method Grant 8,451,423 - Janssen , et al. May 28, 2 | 2013-05-28 |
| Lithographic apparatus and device manufacturing method Grant 8,427,629 - Luijten , et al. April 23, 2 | 2013-04-23 |
| Lithographic apparatus Grant 8,421,996 - Leenders , et al. April 16, 2 | 2013-04-16 |
| Lithographic Apparatus And Device Manufacturing Method App 20120274912 - VAN DE KERKHOF; Marcus Adrianus ; et al. | 2012-11-01 |
| Lithographic apparatus and device manufacturing method Grant 8,259,287 - Beckers , et al. September 4, 2 | 2012-09-04 |
| Lithographic apparatus and device manufacturing method Grant 8,233,134 - Van De Kerkhof , et al. July 31, 2 | 2012-07-31 |
| Lithographic Apparatus And Device Manufacturing Method App 20120008116 - Beckers; Marcel ; et al. | 2012-01-12 |
| Lithographic Apparatus And Device Manufacturing Method App 20120008118 - BECKERS; Marcel ; et al. | 2012-01-12 |
| Lithographic Apparatus And Device Manufacturing Method App 20110273695 - BECKERS; Marcel ; et al. | 2011-11-10 |
| Lithographic apparatus and device manufacturing method Grant 8,004,654 - Beckers , et al. August 23, 2 | 2011-08-23 |
| Lithographic Apparatus App 20100321653 - Leenders; Martinus Hendrikus Antonius ; et al. | 2010-12-23 |
| Lithographic Apparatus And Device Manufacturing Method App 20100321651 - LUIJTEN; Carlo Cornelis Maria ; et al. | 2010-12-23 |
| Lithographic apparatus and device manufacturing method Grant 7,808,614 - Luijten , et al. October 5, 2 | 2010-10-05 |
| Lithographic apparatus Grant 7,804,577 - Leenders , et al. September 28, 2 | 2010-09-28 |
| Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20100045950 - Kemper; Nicolaas Rudolf ; et al. | 2010-02-25 |
| Lithographic Apparatus And Method App 20090316121 - JANSSEN; Franciscus Johannes Joseph ; et al. | 2009-12-24 |
| Lithographic Apparatus App 20090262318 - VAN DEN DUNGEN; Clemens Johannes Gerardus ; et al. | 2009-10-22 |
| Lithographic Apparatus And Device Manufacturing Method App 20090153823 - LUIJTEN; Carlo Cornelis Maria ; et al. | 2009-06-18 |
| Lithographic apparatus and method for manufacturing a device Grant 7,542,127 - Sengers , et al. June 2, 2 | 2009-06-02 |
| Lithographic Apparatus And Device Manufacturing Method App 20090103062 - VAN DE KERKHOF; Marcus Adrianus ; et al. | 2009-04-23 |
| Lithographic apparatus and device manufacturing method Grant 7,522,261 - Luijten , et al. April 21, 2 | 2009-04-21 |
| Methods Relating To Immersion Lithography And An Immersion Lithographic Apparatus App 20090086175 - Streefkerk; Bob ; et al. | 2009-04-02 |
| Lithographic apparatus and device manufacturing method App 20090059192 - Beckers; Marcel ; et al. | 2009-03-05 |
| Lithographic apparatus and device manufacturing method App 20080273182 - Beckers; Marcel ; et al. | 2008-11-06 |
| Lithographic apparatus and device manufacturing method App 20080212051 - Beckers; Marcel ; et al. | 2008-09-04 |
| Lithographic apparatus and device manufacturing method Grant 7,411,654 - Beckers , et al. August 12, 2 | 2008-08-12 |
| Lithographic apparatus and device manufacturing method Grant 7,411,658 - Beckers , et al. August 12, 2 | 2008-08-12 |
| Lithographic apparatus and device manufacturing method App 20070242243 - Kemper; Nicolaas Rudolf ; et al. | 2007-10-18 |
| Lithographic apparatus and device manufacturing method Grant 7,271,873 - Lallemant , et al. September 18, 2 | 2007-09-18 |
| Lithographic apparatus and method for manufacturing a device App 20070139629 - Sengers; Timotheus Franciscus ; et al. | 2007-06-21 |
| Lithographic apparatus App 20070110213 - Leenders; Martinus Hendrikus Antonius ; et al. | 2007-05-17 |
| Lithographic apparatus and device manufacturing method App 20070081140 - Beckers; Marcel ; et al. | 2007-04-12 |
| Lithographic apparatus Grant 7,148,951 - Lallemant , et al. December 12, 2 | 2006-12-12 |
| Lithographic apparatus having a gas flushing device Grant 7,136,142 - Beckers , et al. November 14, 2 | 2006-11-14 |
| Lithographic apparatus and device manufacturing method App 20060232754 - Lallemant; Nicolas Alban ; et al. | 2006-10-19 |
| Lithographic apparatus and device manufacturing method App 20060221315 - Beckers; Marcel ; et al. | 2006-10-05 |
| Lithographic apparatus and device manufacturing method Grant 7,072,021 - Lallemant , et al. July 4, 2 | 2006-07-04 |
| Lithographic apparatus and device manufacturing method Grant 7,057,702 - Lof , et al. June 6, 2 | 2006-06-06 |
| Lithographic apparatus App 20060087631 - Lallemant; Nicolas ; et al. | 2006-04-27 |
| Lithographic apparatus and device manufacturing method App 20060066826 - Maria Luijten; Carlo Cornelis ; et al. | 2006-03-30 |
| Lithographic apparatus and device manufacturing method App 20050286032 - Lof, Joeri ; et al. | 2005-12-29 |
| Lithographic apparatus having a gas flushing device App 20050264773 - Beckers, Marcel ; et al. | 2005-12-01 |
| Lithographic apparatus and device manufacturing method App 20050254025 - Lallemant, Nicolas Alban ; et al. | 2005-11-17 |
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