Patent | Date |
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Projection Exposure Apparatus Having A Device For Determining The Concentration Of Atomic Hydrogen App 20220308457 - EHM; Dirk ;   et al. | 2022-09-29 |
Method for operating an optical apparatus, and optical apparatus Grant 11,307,505 - Becker , et al. April 19, 2 | 2022-04-19 |
Method for removing a contamination layer by an atomic layer etching process Grant 11,199,363 - Roozeboom , et al. December 14, 2 | 2021-12-14 |
Optical arrangement for EUV radiation with a shield for protection against the etching effect of a plasma Grant 11,137,687 - Liebaug , et al. October 5, 2 | 2021-10-05 |
Projection exposure system for semiconductor lithography, comprising elements for plasma conditioning Grant 10,712,677 - Ament , et al. | 2020-07-14 |
Method For Operating An Optical Apparatus, And Optical Apparatus App 20200183292 - BECKER; Moritz ;   et al. | 2020-06-11 |
Optical Arrangement For Euv Radiation With A Shield For Protection Against The Etching Effect Of A Plasma App 20200166847 - LIEBAUG; Bjoern ;   et al. | 2020-05-28 |
Reflective optical element for EUV lithography Grant 10,649,340 - Ehm , et al. | 2020-05-12 |
Method For Removing A Contamination Layer By An Atomic Layer Etching Process App 20200142327 - ROOZEBOOM; Fred ;   et al. | 2020-05-07 |
Method for determining the thickness of a contaminating layer and/or the type of contaminating material, optical element and EUV-lithography system Grant 10,627,217 - Ament , et al. | 2020-04-21 |
Projection Exposure System For Semiconductor Lithography, Comprising Elements For Plasma Conditioning App 20190243258 - AMENT; Irene ;   et al. | 2019-08-08 |
Reflective Optical Element For Euv Lithography App 20190171108 - EHM; Dirk Heinrich ;   et al. | 2019-06-06 |
Reflective optical element Grant 10,061,205 - Ehm , et al. August 28, 2 | 2018-08-28 |
External heat engine device Grant 9,874,175 - Risla , et al. January 23, 2 | 2018-01-23 |
Method For Determining The Thickness Of A Contaminating Layer And/or The Type Of Contaminating Material, Optical Element And Euv-lithography System App 20170292830 - AMENT; Irene ;   et al. | 2017-10-12 |
Reflective Optical Element App 20170160639 - EHM; Dirk Heinrich ;   et al. | 2017-06-08 |
Improved External Heat Engine Device App 20160245225 - Risla; Harald Nes ;   et al. | 2016-08-25 |
Optical Arrangement, In Particular Plasma Light Source Or Euv Lithography System App 20160207078 - BECKER; Moritz ;   et al. | 2016-07-21 |
Evaluating detectability of information in authorization policies Grant 9,251,342 - Becker February 2, 2 | 2016-02-02 |
Delegation-based authorization Grant 9,160,738 - Becker October 13, 2 | 2015-10-13 |
Evaluating Detectability of Information in Authorization Policies App 20130031596 - Becker; Moritz | 2013-01-31 |
Projection objective of a microlithographic projection exposure apparatus Grant 8,339,576 - Loering , et al. December 25, 2 | 2012-12-25 |
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20120281196 - Loering; Ulrich ;   et al. | 2012-11-08 |
State-updating authorization Grant 8,296,822 - Becker October 23, 2 | 2012-10-23 |
Delegation-Based Authorization App 20110296497 - Becker; Moritz | 2011-12-01 |
State-Updating Authorization App 20110016507 - Becker; Moritz | 2011-01-20 |