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Patent applications and USPTO patent grants for BEAUDRY; Richard.The latest application filed is for "pellicle for euv lithography".
Patent | Date |
---|---|
Pellicle For Euv Lithography App 20210240070 - DE GRAAF; Dennis ;   et al. | 2021-08-05 |
Automatic Color Correction For A Dome Light Display Device App 20120153839 - Farley; Joseph D. ;   et al. | 2012-06-21 |
Deep Reactive Ion Etching App 20090242512 - Beaudry; Richard | 2009-10-01 |
Method of making a MEMS device containing a cavity with isotropic etch followed by anisotropic etch Grant 7,439,093 - Beaudry October 21, 2 | 2008-10-21 |
Micromachined structures using collimated DRIE App 20070065967 - Beaudry; Richard | 2007-03-22 |
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