Patent | Date |
---|
Method For Carbon Nanotube Purification App 20220081298 - Provine; John ;   et al. | 2022-03-17 |
Method for carbon nanotube purification Grant 11,208,328 - Provine , et al. December 28, 2 | 2021-12-28 |
Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor Grant 10,788,744 - Hofmann , et al. September 29, 2 | 2020-09-29 |
Method For Carbon Nanotube Purification App 20200216320 - Provine; John ;   et al. | 2020-07-09 |
Method For Carbon Nanotube Purification App 20200148540 - Provine; John ;   et al. | 2020-05-14 |
Glass Ceramic For Ultraviolet Lithography And Method Of Manufacturing Thereof App 20200142292 - Hofmann; Ralf ;   et al. | 2020-05-07 |
Method for carbon nanotube purification Grant 10,633,253 - Provine , et al. | 2020-04-28 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor App 20200058213 - Hassan; Vinayak Vishwanath ;   et al. | 2020-02-20 |
Glass ceramic for ultraviolet lithography and method of manufacturing thereof Grant 10,551,731 - Hofmann , et al. Fe | 2020-02-04 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor Grant 10,551,732 - Hassan , et al. Fe | 2020-02-04 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor App 20190130731 - Hassan; Vinayak Vishwanath ;   et al. | 2019-05-02 |
System and method for manufacturing planarized extreme ultraviolet lithography blank Grant 10,209,613 - Beasley , et al. Feb | 2019-02-19 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor Grant 10,197,907 - Hassan , et al. Fe | 2019-02-05 |
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor Grant 10,012,897 - Hassan , et al. July 3, 2 | 2018-07-03 |
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof Grant 10,012,908 - Hofmann , et al. July 3, 2 | 2018-07-03 |
Growing Graphene On Substrates App 20180158677 - BEASLEY; Cara ;   et al. | 2018-06-07 |
Growing graphene on substrates Grant 9,905,418 - Beasley , et al. February 27, 2 | 2018-02-27 |
Extreme ultraviolet capping layer and method of manufacturing and lithography thereof Grant 9,739,913 - Beasley , et al. August 22, 2 | 2017-08-22 |
Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof Grant 9,690,016 - Hofmann , et al. June 27, 2 | 2017-06-27 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor App 20170160632 - Hassan; Vinayak Vishwanath ;   et al. | 2017-06-08 |
Growing Graphene On Substrates App 20170148631 - BEASLEY; Cara ;   et al. | 2017-05-25 |
Extreme Ultraviolet Reflective Element With Multilayer Stack And Method Of Manufacturing Thereof App 20170131637 - Hofmann; Ralf ;   et al. | 2017-05-11 |
Planarized Extreme Ultraviolet Lithography Blank With Absorber And Manufacturing System Therefor App 20170131627 - Hassan; Vinayak Vishwanath ;   et al. | 2017-05-11 |
Extreme Ultraviolet Lithography Mask Blank Manufacturing System And Method Of Operation Therefor App 20170115555 - Hofmann; Ralf ;   et al. | 2017-04-27 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor Grant 9,612,522 - Hassan , et al. April 4, 2 | 2017-04-04 |
Growing graphene on substrates Grant 9,595,436 - Beasley , et al. March 14, 2 | 2017-03-14 |
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof Grant 9,581,890 - Hofmann , et al. February 28, 2 | 2017-02-28 |
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor Grant 9,581,889 - Hassan , et al. February 28, 2 | 2017-02-28 |
Glass Ceramic For Ultraviolet Lithography And Method Of Manufacturing Thereof App 20160377972 - Hofmann; Ralf ;   et al. | 2016-12-29 |
System And Method For Manufacturing Planarized Extreme Ultraviolet Lithography Blank App 20160274454 - Beasley; Cara ;   et al. | 2016-09-22 |
Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor Grant 9,417,515 - Barman , et al. August 16, 2 | 2016-08-16 |
Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor Grant 9,354,508 - Beasley , et al. May 31, 2 | 2016-05-31 |
Planarized Extreme Ultraviolet Lithography Blank With Absorber And Manufacturing System Therefor App 20160011500 - Hassan; Vinayak Vishwanath ;   et al. | 2016-01-14 |
Extreme Ultraviolet Reflective Element With Amorphous Layers And Method Of Manufacturing Thereof App 20160011345 - Hofmann; Ralf ;   et al. | 2016-01-14 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor App 20160011499 - Hassan; Vinayak Vishwanath ;   et al. | 2016-01-14 |
Extreme Ultraviolet Capping Layer And Method Of Manufacturing And Lithography Thereof App 20160011344 - Beasley; Cara ;   et al. | 2016-01-14 |
Extreme Ultraviolet Reflective Element With Multilayer Stack And Method Of Manufacturing Thereof App 20160011502 - Hofmann; Ralf ;   et al. | 2016-01-14 |
Growing Graphene On Substrates App 20150235847 - Beasley; Cara ;   et al. | 2015-08-20 |
Planarized Extreme Ultraviolet Lithography Blank, And Manufacturing And Lithography Systems Therefor App 20140268080 - Beasley; Cara ;   et al. | 2014-09-18 |
Ultra-smooth Layer Ultraviolet Lithography Mirrors And Blanks, And Manufacturing And Lithography Systems Therefor App 20140268083 - Barman; Soumendra N. ;   et al. | 2014-09-18 |
Extreme Ultraviolet Lithography Mask Blank Manufacturing System And Method Of Operation Therefor App 20140272684 - Hofmann; Ralf ;   et al. | 2014-09-18 |