Patent | Date |
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Thin film resistors integrated at two different metal single die Grant 7,964,919 - Beach , et al. June 21, 2 | 2011-06-21 |
Longitudinal link trimming and method for increased link resistance and reliability App 20100258909 - Hoyt; Eric L. ;   et al. | 2010-10-14 |
Back end thin film capacitor having plates at thin film resistor and first metallization layer levels Grant 7,807,540 - Beach October 5, 2 | 2010-10-05 |
Back End Thin Film Capacitor Having Plates At Thin Film Resistor And First Metallization Layer Levels App 20100151651 - Beach; Eric W. | 2010-06-17 |
Integration of thin film resistors having different TCRs into single die Grant 7,704,871 - Beach April 27, 2 | 2010-04-27 |
Back end thin film capacitor having both plates of thin film resistor material at single metallization layer Grant 7,696,603 - Beach April 13, 2 | 2010-04-13 |
Rapid thermal anneal equipment and method using sichrome film Grant 7,455,448 - Jaiswal , et al. November 25, 2 | 2008-11-25 |
Nonlinear via arrays for resistors to reduce systematic circuit offsets Grant 7,449,783 - Beach , et al. November 11, 2 | 2008-11-11 |
Thin Film Resistors Integrated At Two Different Metal Interconnect Levels Of Single Die App 20080272460 - Beach; Eric W. ;   et al. | 2008-11-06 |
Rapid Thermal Anneal Equipment and Method Using Sichrome Film App 20080248599 - Jaiswal; Rajneesh ;   et al. | 2008-10-09 |
Thin film resistors integrated at two different metal interconnect levels of single die Grant 7,416,951 - Beach , et al. August 26, 2 | 2008-08-26 |
Thin film resistor and dummy fill structure and method to improve stability and reduce self-heating Grant 7,403,094 - Beach , et al. July 22, 2 | 2008-07-22 |
INTEGRATION OF THIN FILM RESISTORS HAVING DIFFERENT TCRs INTO SINGLE DIE App 20080132056 - Beach; Eric W. | 2008-06-05 |
Integration of thin film resistors having different TCRs into single die Grant 7,345,573 - Beach March 18, 2 | 2008-03-18 |
Back end thin film capacitor having both plates of thin film resistor material at single metallization layer App 20070170546 - Beach; Eric W. | 2007-07-26 |
Thin film resistor head structure and method for reducing head resistivity variance Grant 7,208,388 - Beach , et al. April 24, 2 | 2007-04-24 |
Thin film resistors integrated at a single metal interconnect level of die Grant 7,202,533 - Beach , et al. April 10, 2 | 2007-04-10 |
Thin Film Resistors Integrated At A Single Metal Interconnect Level Of Die App 20070069299 - Beach; Eric W. ;   et al. | 2007-03-29 |
Thin film resistors integrated at two different metal interconnect levels of single die App 20070069334 - Beach; Eric W. ;   et al. | 2007-03-29 |
Integration of thin film resistors having different TCRs into single die App 20060290462 - Beach; Eric W. | 2006-12-28 |
Nonlinear via arrays for resistors to reduce systematic circuit offsets App 20060249793 - Beach; Eric W. ;   et al. | 2006-11-09 |
Thin film resistor and dummy fill structure and method to improve stability and reduce self-heating App 20060238292 - Beach; Eric W. ;   et al. | 2006-10-26 |
Structure and method for minimizing substrate effect on nucleation during sputtering of thin film resistors App 20060228881 - Beach; Eric W. | 2006-10-12 |
Thin film resistor head structure and method for reducing head resistivity variance App 20060228879 - Beach; Eric W. ;   et al. | 2006-10-12 |
Providing high precision resistance in an integrated circuit using a thin film resistor of controlled dimension Grant 7,005,361 - Kwok , et al. February 28, 2 | 2006-02-28 |
Rapid thermal anneal equipment and method using sichrome film App 20060019415 - Jaiswal; Rajneesh ;   et al. | 2006-01-26 |
Method and structure for controlling surface properties of dielectric layers in a thin film component for improved trimming Grant 6,979,637 - Beach , et al. December 27, 2 | 2005-12-27 |
Method and structure for controlling surface properties of dielectric layers in a thin film component for improved trimming App 20050186751 - Beach, Eric W. ;   et al. | 2005-08-25 |
Method of forming an integrated circuit thin film resistor Grant 6,872,655 - Mahalingam , et al. March 29, 2 | 2005-03-29 |
Providing high precision resistance in an integrated circuit using a thin film resistor of controlled dimension App 20040227614 - Kwok, Siang Ping ;   et al. | 2004-11-18 |
Method and structure for controlling surface properties of dielectric layers in a thin film component for improved trimming Grant 6,818,966 - Beach , et al. November 16, 2 | 2004-11-16 |
Method of forming an integrated circuit thin film resistor App 20040152299 - Mahalingam, Pushpa ;   et al. | 2004-08-05 |
Method for thin film resistor integration in dual damascene structure Grant 6,734,076 - Jaiswal , et al. May 11, 2 | 2004-05-11 |
Providing high precision resistance in an integrated circuit using a thin film resistor of controlled dimension App 20040070048 - Kwok, Siang Ping ;   et al. | 2004-04-15 |
Method and structure for controlling surface properties of dielectric layers in a thin film component for improved trimming App 20040056326 - Beach, Eric W. ;   et al. | 2004-03-25 |