Bautista; Kevin Joseph
Patent Applications and Registrations
Patent applications and USPTO patent grants for Bautista; Kevin Joseph.The latest application filed is for "thermal processing susceptor".
- Bautista; Kevin Joseph - San Jose CA
| Patent | Date |
|---|---|
| Diode laser for wafer heating for EPI processes Grant 11,171,023 - Chu , et al. November 9, 2 | 2021-11-09 |
| Thermal Processing Susceptor App 20210175115 - NGO; Anhthu ; et al. | 2021-06-10 |
| Thermal processing susceptor Grant 10,930,543 - Ngo , et al. February 23, 2 | 2021-02-23 |
| Showerhead design Grant 10,626,500 - Shah , et al. | 2020-04-21 |
| Showerhead Design App 20190194810 - SHAH; Kartik ; et al. | 2019-06-27 |
| Susceptor design to reduce edge thermal peak Grant 10,269,614 - Chu , et al. | 2019-04-23 |
| Showerhead design Grant 10,221,483 - Shah , et al. | 2019-03-05 |
| Thermal Processing Susceptor App 20180366363 - NGO; Anhthu ; et al. | 2018-12-20 |
| Thermal processing susceptor Grant 10,062,598 - Ngo , et al. August 28, 2 | 2018-08-28 |
| Diode Laser For Wafer Heating For Epi Processes App 20170103907 - CHU; Schubert S. ; et al. | 2017-04-13 |
| Minimal contact edge ring for rapid thermal processing Grant 9,403,251 - Tallavarjula , et al. August 2, 2 | 2016-08-02 |
| Susceptor Design To Reduce Edge Thermal Peak App 20160133504 - CHU; Schubert S. ; et al. | 2016-05-12 |
| Apparatus For Gas Injection To Epitaxial Chamber App 20150368796 - LI; Xuebin ; et al. | 2015-12-24 |
| Substrate Thermal Control In An Epi Chamber App 20150368829 - NGO; Anhthu ; et al. | 2015-12-24 |
| Thermal Processing Susceptor App 20150340266 - NGO; Anhthu ; et al. | 2015-11-26 |
| Showerhead Design App 20150329966 - SHAH; Kartik ; et al. | 2015-11-19 |
| Epitaxial chamber with cross flow Grant 9,127,360 - Ramachandran , et al. September 8, 2 | 2015-09-08 |
| Apparatus For Self-centering Pre-heat Ring App 20150162230 - BAUTISTA; Kevin Joseph ; et al. | 2015-06-11 |
| Minimal Contact Edge Ring For Rapid Thermal Processing App 20140105582 - TALLAVARJULA; SAIRAJU ; et al. | 2014-04-17 |
| Epitaxial Chamber With Cross Flow App 20110174212 - RAMACHANDRAN; BALASUBRAMANIAN ; et al. | 2011-07-21 |
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