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Patent applications and USPTO patent grants for Bautista; Kevin J..The latest application filed is for "minimal contact edge ring for rapid thermal processing".
Patent | Date |
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Minimal contact edge ring for rapid thermal processing Grant 9,768,052 - Pan , et al. September 19, 2 | 2017-09-19 |
Minimal contact edge ring for rapid thermal processing Grant 9,558,982 - Pan , et al. January 31, 2 | 2017-01-31 |
Minimal Contact Edge Ring For Rapid Thermal Processing App 20140265101 - PAN; Heng ;   et al. | 2014-09-18 |
Minimal Contact Edge Ring For Rapid Thermal Processing App 20140113458 - PAN; Heng ;   et al. | 2014-04-24 |
Cvd Reactor With Multiple Processing Levels And Dual-axis Motorized Lift Mechanism App 20100075488 - Collins; Richard O. ;   et al. | 2010-03-25 |
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