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Method, Device And Computer Program For Repairing A Mask Defect App 20220308443 - Schoneberg; Johannes ;   et al. | 2022-09-29 |
Method And Apparatuses For Disposing Of Excess Material Of A Photolithographic Mask App 20220299864 - Budach; Michael ;   et al. | 2022-09-22 |
Methods And Devices For Extending A Time Period Until Changing A Measuring Tip Of A Scanning Probe Microscope App 20220291255 - Baralia; Gabriel ;   et al. | 2022-09-15 |
Method and apparatus for removing a particle from a photolithographic mask Grant 11,429,020 - Baur , et al. August 30, 2 | 2022-08-30 |
Apparatus And Method For Examining And/or Processing A Sample App 20220178965 - Baur; Christof ;   et al. | 2022-06-09 |
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope Grant 11,353,478 - Baralia , et al. June 7, 2 | 2022-06-07 |
Apparatus And Method For A Scanning Probe Microscope App 20220146548 - Matejka; Ulrich ;   et al. | 2022-05-12 |
Method And Apparatus For Examining A Measuring Tip Of A Scanning Probe Microscope App 20220107340 - Kornilov; Kinga ;   et al. | 2022-04-07 |
Device And Method For Operating A Bending Beam In A Closed Control Loop App 20220082583 - Baur; Christof ;   et al. | 2022-03-17 |
Apparatus and method for examining and/or processing a sample Grant 11,262,378 - Baur , et al. March 1, 2 | 2022-03-01 |
Method and apparatus for examining a measuring tip of a scanning probe microscope Grant 11,237,187 - Kornilov , et al. February 1, 2 | 2022-02-01 |
Apparatus and method for a scanning probe microscope Grant 11,237,185 - Matejka , et al. February 1, 2 | 2022-02-01 |
Apparatus And Method For Removing A Single Particulate From A Substrate App 20220011682 - Edinger; Klaus ;   et al. | 2022-01-13 |
Device And Method For Analysing A Defect Of A Photolithographic Mask Or Of A Wafer App 20210247336 - Baralia; Gabriel ;   et al. | 2021-08-12 |
Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan mode Grant 11,054,439 - Baur July 6, 2 | 2021-07-06 |
Device and method for analysing a defect of a photolithographic mask or of a wafer Grant 10,983,075 - Baralia , et al. April 20, 2 | 2021-04-20 |
Apparatus And Method For Examining And/or Processing A Sample App 20210109126 - Baur; Christof ;   et al. | 2021-04-15 |
Method And Apparatus For Removing A Particle From A Photolithographic Mask App 20210048744 - Baur; Christof ;   et al. | 2021-02-18 |
Method And Apparatus For Examining A Measuring Tip Of A Scanning Probe Microscope App 20200141972 - Kornilov; Kinga ;   et al. | 2020-05-07 |
Method And Apparatuses For Disposing Of Excess Material Of A Photolithographic Mask App 20200103751 - Budach; Michael ;   et al. | 2020-04-02 |
Probe system and method for receiving a probe of a scanning probe microscope Grant 10,578,644 - Baur , et al. | 2020-03-03 |
Apparatus And Method For A Scanning Probe Microscope App 20200025796 - Matejka; Ulrich ;   et al. | 2020-01-23 |
Methods And Devices For Extending A Time Period Until Changing A Measuring Tip Of A Scanning Probe Microscope App 20190317126 - Baralia; Gabriel ;   et al. | 2019-10-17 |
Beam blanker and method for blanking a charged particle beam Grant 10,410,820 - Budach , et al. Sept | 2019-09-10 |
Scanning Probe Microscope And Method For Increasing A Scan Speed Of A Scanning Probe Microscope In The Step-in Scan Mode App 20190250185 - Baur; Christof | 2019-08-15 |
Scanning probe microscope and method for examining a surface with a high aspect ratio Grant 10,119,990 - Baur , et al. November 6, 2 | 2018-11-06 |
Method and apparatus for avoiding damage when analysing a sample surface with a scanning probe microscope Grant 9,995,764 - Pieper , et al. June 12, 2 | 2018-06-12 |
Beam Blanker And Method For Blanking A Charged Particle Beam App 20180151327 - Budach; Michael ;   et al. | 2018-05-31 |
Probe System And Method For Receiving A Probe Of A Scanning Probe Microscope App 20180095108 - Baur; Christof ;   et al. | 2018-04-05 |
Device And Method For Analysing A Defect Of A Photolithographic Mask Or Of A Wafer App 20170292923 - Baralia; Gabriel ;   et al. | 2017-10-12 |
Method And Apparatus For Avoiding Damage When Analysing A Sample Surface With A Scanning Probe Microscope App 20170261532 - Pieper; Hans Hermann ;   et al. | 2017-09-14 |
Scanning Probe Microscope And Method For Examining A Surface With A High Aspect Ratio App 20170102407 - Baur; Christof ;   et al. | 2017-04-13 |
Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope Grant 9,336,983 - Budach , et al. May 10, 2 | 2016-05-10 |
Scanning Particle Microscope And Method For Determining A Position Change Of A Particle Beam Of The Scanning Particle Microscope App 20150380210 - Budach; Michael ;   et al. | 2015-12-31 |
Apparatus and method for investigating an object Grant 9,115,981 - Baur , et al. August 25, 2 | 2015-08-25 |
Apparatus and method for analyzing and modifying a specimen surface Grant 8,769,709 - Baur , et al. July 1, 2 | 2014-07-01 |
Apparatus And Method For Investigating An Object App 20140027512 - Baur; Christof ;   et al. | 2014-01-30 |
Apparatus And Method For Analyzing And Modifying A Specimen Surface App 20140007306 - Baur; Christof ;   et al. | 2014-01-02 |
Patterned atomic layer epitaxy Grant 7,799,132 - Randall , et al. September 21, 2 | 2010-09-21 |
Charged particle beam device probe operation Grant 7,675,300 - Baur , et al. March 9, 2 | 2010-03-09 |
Charged Particle Beam Device Probe Operation App 20080150557 - BAUR; Christof ;   et al. | 2008-06-26 |
Patterned Atomic Layer Epitaxy App 20080092803 - Randall; John N. ;   et al. | 2008-04-24 |
Patterned atomic layer epitaxy Grant 7,326,293 - Randall , et al. February 5, 2 | 2008-02-05 |
Charged particle beam device probe operation Grant 7,319,336 - Baur , et al. January 15, 2 | 2008-01-15 |
Probe current imaging Grant 7,285,778 - Baur , et al. October 23, 2 | 2007-10-23 |
Positioning device for microscopic motion Grant 7,196,454 - Baur , et al. March 27, 2 | 2007-03-27 |
Charged particle beam device probe operation App 20060192116 - Baur; Christof ;   et al. | 2006-08-31 |
Systems and method for picking and placing of nanoscale objects utilizing differences in chemical and physical binding forces Grant 6,987,277 - Baur , et al. January 17, 2 | 2006-01-17 |
Patterned atomic layer epitaxy App 20050223968 - Randall, John N. ;   et al. | 2005-10-13 |
Probe tip processing App 20050184028 - Baur, Christof ;   et al. | 2005-08-25 |
Probe current imaging App 20050184236 - Baur, Christof ;   et al. | 2005-08-25 |
Positioning device for microscopic motion App 20050184623 - Baur, Christof ;   et al. | 2005-08-25 |
System and method for picking and placing of nanoscale objects utilizing differences in chemical and physical binding forces App 20050077468 - Baur, Christof ;   et al. | 2005-04-14 |
Nano-manipulation by gyration Grant 6,812,460 - Stallcup, II , et al. November 2, 2 | 2004-11-02 |
System and method for accurate positioning of a scanning probe microscope Grant 6,608,307 - Baur August 19, 2 | 2003-08-19 |