Baumann; Helmut
Patent Applications and Registrations
Patent applications and USPTO patent grants for Baumann; Helmut.The latest application filed is for "micromechanical capacitive sensor element".
- Baumann; Helmut - Gomaringen DE
| Patent | Date |
|---|---|
| Device made of single-crystal silicon Grant 8,298,962 - Kaelberer , et al. October 30, 2 | 2012-10-30 |
| Micromechanical Capacitive Sensor Element App 20110108932 - Benzel; Hubert ; et al. | 2011-05-12 |
| Device Made Of Single-crystal Silicon App 20110014794 - KAELBERER; Arnd ; et al. | 2011-01-20 |
| Device made of single-crystal silicon Grant 7,834,452 - Kaelberer , et al. November 16, 2 | 2010-11-16 |
| Device made of single-crystal silicon App 20090008749 - Kaelberer; Arnd ; et al. | 2009-01-08 |
| Sensor with at least one micromechanical structure, and method for producing it Grant 7,273,764 - Reichenbach , et al. September 25, 2 | 2007-09-25 |
| Sensor with at least one micromechanical structure, and method for producing it App 20050230708 - Reichenbach, Frank ; et al. | 2005-10-20 |
| Sensor with at least one micromechanical structure and method for production thereof Grant 6,936,902 - Reichenbach , et al. August 30, 2 | 2005-08-30 |
| Method of producing structured wafers Grant 6,723,250 - Schaefer , et al. April 20, 2 | 2004-04-20 |
| Sensor with at least one micromechanical structure and method for production thereof App 20040065932 - Reichenbach, Frank ; et al. | 2004-04-08 |
| Wafer stack and method of producing sensors Grant 6,106,735 - Kurle , et al. August 22, 2 | 2000-08-22 |
| Angular velocity sensor with built-in limit stops Grant 5,721,377 - Kurle , et al. February 24, 1 | 1998-02-24 |
| Mass flow sensor Grant 5,705,745 - Treutler , et al. January 6, 1 | 1998-01-06 |
| Method for producing a component according to the anodic bonding method and component Grant 5,683,947 - Baumann November 4, 1 | 1997-11-04 |
| Semiconductor sensor having a protective layer Grant 5,629,538 - Lipphardt , et al. May 13, 1 | 1997-05-13 |
| Acceleration sensor Grant 5,461,917 - Marek , et al. October 31, 1 | 1995-10-31 |
| Method of assembling micromechanical sensors Grant 5,273,939 - Becker , et al. December 28, 1 | 1993-12-28 |
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