Bauch; Lothar

Patent Applications and Registrations

Patent applications and USPTO patent grants for Bauch; Lothar.The latest application filed is for "method and system for determining overlap process windows in semiconductors by inspection techniques".

Company Profile

0.7.11

Bauch; Lothar - Dresden DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and system for determining overlap process windows in semiconductors by inspection techniques Grant 9,099,353 - Bauch August 4, 2	2015-08-04
Method And System For Determining Overlap Process Windows In Semiconductors By Inspection Techniques App 20150140695 - Bauch; Lothar	2015-05-21
Method and system for determining overlap process windows in semiconductors by inspection techniques Grant 8,940,555 - Bauch January 27, 2	2015-01-27
Method And System For Determining Overlap Process Windows In Semiconductors By Inspection Techniques App 20140065734 - Bauch; Lothar	2014-03-06
Photolithographic mask having half tone main features and perpendicular half tone assist features Grant 7,465,522 - Bauch , et al. December 16, 2	2008-12-16
Hard Mask Layer Stack And A Method Of Patterning App 20070243707 - Manger; Dirk ; et al.	2007-10-18
Device and a method and mask for forming a device App 20070218627 - Lattard; Ludovic ; et al.	2007-09-20
Method for transferring structures from a photomask into a photoresist layer App 20060257794 - Voelkel; Lars ; et al.	2006-11-16
Method for detecting positioning errors of circuit patterns during the transfer by means of a mask into layers of a substrate of a semiconductor wafer Grant 7,084,962 - Bauch , et al. August 1, 2	2006-08-01
Photolithographic mask Grant 7,078,133 - Bauch , et al. July 18, 2	2006-07-18
Lithography mask and lithography system for direction-dependent exposure App 20050153216 - Crell, Christian ; et al.	2005-07-14
Method for detecting positioning errors of circuit patterns during the transfer by means of a mask into layers of a substrate of a semiconductor wafer App 20050068515 - Bauch, Lothar ; et al.	2005-03-31
Photolithographic mask App 20040256356 - Bauch, Lothar ; et al.	2004-12-23
Stacked via with specially designed landing pad for integrated semiconductor structures Grant 6,737,748 - Bauch , et al. May 18, 2	2004-05-18
Photolithographic mask App 20030152846 - Bauch, Lothar ; et al.	2003-08-14
Stacked via with specially designed landing pad for integrated semiconductor structures App 20020117759 - Bauch, Lothar ; et al.	2002-08-29

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