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Electroplating tool with feedback of metal thickness distribution and correction Grant 10,260,855 - Egan , et al. | 2019-04-16 |
Electrolytic copper process using anion permeable barrier Grant 9,234,293 - Baskaran , et al. January 12, 2 | 2016-01-12 |
Electrolytic Copper Process Using Anion Permeable Barrier App 20150083600 - Baskaran; Rajesh ;   et al. | 2015-03-26 |
Electrolytic process using cation permeable barrier Grant 8,961,771 - Baskaran , et al. February 24, 2 | 2015-02-24 |
Electroplating Tool With Feedback Of Metal Thickness Distribution And Correction App 20140367267 - Egan; Todd J. ;   et al. | 2014-12-18 |
Electrolytic process using anion permeable barrier Grant 8,852,417 - Baskaran , et al. October 7, 2 | 2014-10-07 |
Methods For Electrochemical Deposition Of Multi-component Solder Using Cation Permeable Barrier App 20140246324 - Baskaran; Rajesh ;   et al. | 2014-09-04 |
Electrolytic Process Using Cation Permeable Barrier App 20140209472 - Baskaran; Rajesh ;   et al. | 2014-07-31 |
Electrolytic Process Using Cation Permeable Barrier App 20120292194 - Baskaran; Rajesh ;   et al. | 2012-11-22 |
Electrolytic process using cation permeable barrier Grant 8,236,159 - Baskaran , et al. August 7, 2 | 2012-08-07 |
Electrolytic Copper Process Using Anion Permeable Barrier App 20120152751 - Baskaran; Rajesh ;   et al. | 2012-06-21 |
Electrolytic copper process using anion permeable barrier Grant 8,123,926 - Baskaran , et al. February 28, 2 | 2012-02-28 |
Apparatus and method for thermally controlled processing of microelectronic workpieces Grant 7,252,714 - Hanson , et al. August 7, 2 | 2007-08-07 |
Method of submicron metallization using electrochemical deposition of recesses including a first deposition at a first current density and a second deposition at an increased current density Grant 7,144,805 - Chen , et al. December 5, 2 | 2006-12-05 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces Grant 7,048,841 - Batz, Jr. , et al. May 23, 2 | 2006-05-23 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces Grant 6,939,448 - Batz, Jr. , et al. September 6, 2 | 2005-09-06 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces Grant 6,911,127 - Batz, Jr. , et al. June 28, 2 | 2005-06-28 |
Electroplating reactor including back-side electrical contact apparatus Grant 6,849,167 - Woodruff , et al. February 1, 2 | 2005-02-01 |
Contact assembly for supplying power to workpieces during electrochemical processing Grant 6,805,778 - Batz, Jr. , et al. October 19, 2 | 2004-10-19 |
Submicron metallization using electrochemical deposition Grant 6,806,186 - Chen , et al. October 19, 2 | 2004-10-19 |
Method for high deposition rate solder electroplating on a microelectronic workpiece Grant 6,669,834 - Batz, Jr. , et al. December 30, 2 | 2003-12-30 |
Apparatus and methods for controlling workpiece surface exposure to processing liquids during the fabrication of microelectronic components Grant 6,602,383 - Batz, Jr. , et al. August 5, 2 | 2003-08-05 |
Methods for controlling semiconductor workpiece surface exposure to processing liquids Grant 6,090,711 - Batz, Jr. , et al. July 18, 2 | 2000-07-18 |