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Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use
Grant 11,332,488 - Anthis , et al. May 17, 2 | 2022-05-17 |
Doped And Undoped Vanadium Oxides For Low-K Spacer Applications
App 20210358744 - Venkatasubramanian; Eswaranand ; et al. | 2021-11-18 |
Doped and undoped vanadium oxides for low-k spacer applications
Grant 11,094,533 - Venkatasubramanian , et al. August 17, 2 | 2021-08-17 |
Precursors for the atomic layer deposition of transition metals and methods of use
Grant 11,078,224 - Anthis , et al. August 3, 2 | 2021-08-03 |
Methods and materials for modifying the threshold voltage of metal oxide stacks
Grant 11,049,722 - Krishnan , et al. June 29, 2 | 2021-06-29 |
Fill process optimization using feature scale modeling
Grant 10,977,405 - Bowes , et al. April 13, 2 | 2021-04-13 |
Metal Precursors With Modified Diazabutadiene Ligands For CVD And ALD And Methods Of Use
App 20200377538 - Anthis; Jeffrey W. ; et al. | 2020-12-03 |
Silicon nitride films with high nitrogen content
Grant 10,811,250 - Basu , et al. October 20, 2 | 2020-10-20 |
Methods And Precursors For Selective Deposition Of Metal Films
App 20200312653 - Fredrickson; Kurt ; et al. | 2020-10-01 |
Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use
Grant 10,752,649 - Anthis , et al. A | 2020-08-25 |
Fill Process Optimization Using Feature Scale Modeling
App 20200242209 - Bowes; Michael ; et al. | 2020-07-30 |
Methods And Materials For Modifying The Threshold Voltage Of Metal Oxide Stacks
App 20200234959 - Krishnan; Siddarth ; et al. | 2020-07-23 |
Deposition and treatment of films for patterning
Grant 10,699,952 - Basu , et al. | 2020-06-30 |
Methods and materials for modifying the threshold voltage of metal oxide stacks
Grant 10,615,041 - Krishnan , et al. | 2020-04-07 |
Low thickness dependent work-function nMOS integration for metal gate
Grant 10,608,097 - Ma , et al. | 2020-03-31 |
Doped And Undoped Vanadium Oxides For Low-K Spacer Applications
App 20200035486 - Venkatasubramanian; Eswaranand ; et al. | 2020-01-30 |
Schemes for selective deposition for patterning applications
Grant 10,510,546 - Basu , et al. Dec | 2019-12-17 |
Doped and undoped vanadium oxides for low-k spacer applications
Grant 10,475,642 - Venkatasubramanian , et al. Nov | 2019-11-12 |
Schemes for Selective Deposition for Patterning Applications
App 20190287807 - Basu; Atashi ; et al. | 2019-09-19 |
Deposition And Treatment Of Films For Patterning
App 20190252252 - Basu; Atashi ; et al. | 2019-08-15 |
Deployment of light energy within specific spectral bands in specific sequences for deposition, treatment and removal of materials
Grant 10,373,823 - Srinivasan , et al. | 2019-08-06 |
Schemes for selective deposition for patterning applications
Grant 10,347,495 - Basu , et al. July 9, 2 | 2019-07-09 |
Methods And Materials For Modifying The Threshold Voltage Of Metal Oxide Stacks
App 20190181011 - Krishnan; Siddarth ; et al. | 2019-06-13 |
Deposition and treatment of films for patterning
Grant 10,319,636 - Basu , et al. | 2019-06-11 |
Methods For Forming Capping Protection For An Interconnection Structure
App 20190148150 - LEE; Joung Joo ; et al. | 2019-05-16 |
Low Thickness Dependent Work-Function nMOS Integration For Metal Gate
App 20190019874 - Ma; Paul F. ; et al. | 2019-01-17 |
Silicon Nitride Films With High Nitrogen Content
App 20190013197 - Basu; Atashi ; et al. | 2019-01-10 |
Aluminum content control of TiAIN films
Grant 10,170,321 - Zhang , et al. J | 2019-01-01 |
Deployment Of Light Energy Within Specific Spectral Bands In Specific Sequences For Deposition, Treatment And Removal Of Materials
App 20180350595 - SRINIVASAN; Swaminathan T. ; et al. | 2018-12-06 |
Metal Precursors With Modified Diazabutadiene Ligands For Cvd And Ald And Methods Of Use
App 20180291052 - Anthis; Jeffrey W. ; et al. | 2018-10-11 |
Precursors For The Atomic Layer Deposition Of Transition Metals And Methods Of Use
App 20180291051 - Anthis; Jeffrey W. ; et al. | 2018-10-11 |
Aluminum Content Control of TiAIN Films
App 20180269065 - Zhang; Wenyu ; et al. | 2018-09-20 |
Schemes for Selective Deposition for Patterning Applications
App 20180218914 - Basu; Atashi ; et al. | 2018-08-02 |
Deposition And Treatment Of Films For Patterning
App 20180144980 - Basu; Atashi ; et al. | 2018-05-24 |
Doped And Undoped Vanadium Oxides For Low-K Spacer Applications
App 20170309476 - Venkatasubramanian; Eswaranand ; et al. | 2017-10-26 |
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