loadpatents
Patent applications and USPTO patent grants for Bassom; Neil J..The latest application filed is for "dynamic temperature control of an ion source".
Patent | Date |
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Dynamic temperature control of an ion source Grant 10,347,457 - Perel, Sr. , et al. July 9, 2 | 2019-07-09 |
Dynamic Temperature Control Of An Ion Source App 20190189387 - Perel; Alexander S. ;   et al. | 2019-06-20 |
Coating insulating materials for improved life Grant 10,221,476 - Chaney , et al. | 2019-03-05 |
Ceramic ion source chamber Grant 9,887,060 - Chaney , et al. February 6, 2 | 2018-02-06 |
Ceramic Ion Source Chamber App 20170309434 - Chaney; Craig R. ;   et al. | 2017-10-26 |
Ceramic ion source chamber Grant 9,741,522 - Chaney , et al. August 22, 2 | 2017-08-22 |
Ceramic Ion Source Chamber App 20170221669 - Chaney; Craig R. ;   et al. | 2017-08-03 |
Techniques for improving the performance and extending the lifetime of an ion source Grant 9,530,615 - Kurunczi , et al. December 27, 2 | 2016-12-27 |
Gallium ION source and materials therefore Grant 9,396,902 - Biloiu , et al. July 19, 2 | 2016-07-19 |
Apparatus for dynamic temperature control of an ion source Grant 9,287,079 - Chaney , et al. March 15, 2 | 2016-03-15 |
Gas coupled arc chamber cooling Grant 9,275,820 - Lee , et al. March 1, 2 | 2016-03-01 |
Apparatus For Dynamic Temperature Control Of An Ion Source App 20160005564 - Chaney; Craig R. ;   et al. | 2016-01-07 |
Self-cleaning radio frequency plasma source Grant 9,142,392 - Bassom September 22, 2 | 2015-09-22 |
Method and apparatus for thermal control of ion sources and sputtering targets Grant 9,134,074 - Bassom September 15, 2 | 2015-09-15 |
Excited gas injection for ion implant control Grant 9,018,829 - Koo , et al. April 28, 2 | 2015-04-28 |
Gas Coupled Arc Chamber Cooling App 20150061490 - Lee; William Davis ;   et al. | 2015-03-05 |
Technique for ion implanting a target Grant 8,937,003 - Perel , et al. January 20, 2 | 2015-01-20 |
Coating Insulating Materials For Improved Life App 20140352617 - Chaney; Craig R. ;   et al. | 2014-12-04 |
Self-cleaning Radio Frequency Plasma Source App 20140320012 - Bassom; Neil J. | 2014-10-30 |
Method And Apparatus For Thermal Control Of Ion Sources And Sputtering Targets App 20140099782 - Bassom; Neil J. | 2014-04-10 |
Techniques For Improving The Performance And Extending The Lifetime Of An Ion Source App 20140041684 - Kurunczi; Peter F. ;   et al. | 2014-02-13 |
Methods For Extending Ion Source Life And Improving Ion Source Performance During Carbon Implantation App 20130341761 - SINHA; Ashwini K. ;   et al. | 2013-12-26 |
Gallium ION Source and Materials Therefore App 20130313971 - Biloiu; Costel ;   et al. | 2013-11-28 |
Excited Gas Injection For Ion Implant Control App 20130313443 - Koo; Bon-Woong ;   et al. | 2013-11-28 |
Excited gas injection for ion implant control Grant 8,501,624 - Koo , et al. August 6, 2 | 2013-08-06 |
Cleaning of an extraction aperture of an ion source Grant 8,455,839 - Chaney , et al. June 4, 2 | 2013-06-04 |
Technique For Ion Implanting A Target App 20130072008 - Perel; Alexander S. ;   et al. | 2013-03-21 |
Flexible ion source Grant 8,330,127 - Low , et al. December 11, 2 | 2012-12-11 |
System for modifying small structures Grant 8,163,641 - Gu , et al. April 24, 2 | 2012-04-24 |
Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter Grant 8,049,192 - Bassom , et al. November 1, 2 | 2011-11-01 |
Cathode having electron production and focusing grooves, ion source and related method Grant 8,022,371 - Bassom September 20, 2 | 2011-09-20 |
Cleaning Of An Extraction Aperture Of An Ion Source App 20110220144 - CHANEY; Craig R. ;   et al. | 2011-09-15 |
Ion source cleaning end point detection Grant 8,003,959 - Platow , et al. August 23, 2 | 2011-08-23 |
Apparatus And System For Controlling Ion Ribbon Beam Uniformity In An Ion Implanter App 20110155929 - Bassom; Neil J. ;   et al. | 2011-06-30 |
Techniques For Generating Uniform Ion Beam App 20110143527 - PLATOW; Wilhelm P. ;   et al. | 2011-06-16 |
Ion Source Cleaning End Point Detection App 20100327159 - Platow; Wilhelm P. ;   et al. | 2010-12-30 |
System For Modifying Small Structures App 20100151679 - Gu; George Y. ;   et al. | 2010-06-17 |
Excited Gas Injection For Ion Implant Control App 20100140077 - Koo; Bon-Woong ;   et al. | 2010-06-10 |
Cathode Having Electron Production And Focusing Groves, Ion Source And Related Method App 20100140495 - BASSOM; Neil J. | 2010-06-10 |
Cathode having electron production and focusing grooves, ion source and related method Grant 7,723,699 - Bassom May 25, 2 | 2010-05-25 |
System for modifying small structures using localized charge transfer mechanism to remove or deposit material Grant 7,674,706 - Gu , et al. March 9, 2 | 2010-03-09 |
Flexible ion source App 20090242793 - Low; Russell J. ;   et al. | 2009-10-01 |
Cathode Having Electron Production And Focusing Grooves, Ion Source And Related Method App 20090001281 - Bassom; Neil J. | 2009-01-01 |
System for modifying small structures App 20050227484 - Gu, George Y. ;   et al. | 2005-10-13 |
Determining end points during charged particle beam processing App 20050173631 - Ray, Valery ;   et al. | 2005-08-11 |
Dummy copper deprocessing Grant 6,863,787 - Huynh , et al. March 8, 2 | 2005-03-08 |
Fabrication of high resistivity structures using focused ion beams Grant 6,838,380 - Bassom , et al. January 4, 2 | 2005-01-04 |
Dummy copper deprocessing App 20040203249 - Huynh, Chuong T. ;   et al. | 2004-10-14 |
Fabrication of high resistivity structures using focused ion beams App 20020102861 - Bassom, Neil J. ;   et al. | 2002-08-01 |
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