BASELMANS; Johannes Jacobus Matheus
Patent Applications and Registrations
Patent applications and USPTO patent grants for BASELMANS; Johannes Jacobus Matheus.The latest application filed is for "determining subset of components of an optical characteristic of patterning apparatus".
Company Profile
26.164.148
- BASELMANS; Johannes Jacobus Matheus - Oirschot NL
- Baselmans; Johannes Jacobus Matheus - Veldhoven NL
- Baselmans; Johannes Jacobus Matheus - Olrschot N/A NL
- Baselmans; Johannes Jacobus Matheus - Orischot N/A NL
- Baselmans; Johannes Jacobus Matheus - Oirscho NL
Patent Activity
| Patent | Date |
|---|---|
| Determining Subset Of Components Of An Optical Characteristic Of Patterning Apparatus App 20220082943 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2022-03-17 |
| Improved Imaging Via Zeroth Order Suppression App 20220066327 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2022-03-03 |
| Radiation System App 20210356871 - BASELMANS; Johannes Jacobus Matheus | 2021-11-18 |
| Lithographic method and apparatus Grant 11,106,144 - Koller , et al. August 31, 2 | 2021-08-31 |
| Tuning Patterning Apparatus Based On Optical Characteristic App 20210247698 - SMEETS; Bart ; et al. | 2021-08-12 |
| Lithographic Method and Apparatus App 20210132507 - KOLLER; Paulus Hubertus Petrus ; et al. | 2021-05-06 |
| Lithographic apparatus and method Grant 10,996,567 - Baselmans , et al. May 4, 2 | 2021-05-04 |
| Optical system and method Grant 10,845,712 - Baselmans November 24, 2 | 2020-11-24 |
| Two-Dimensional Diffraction Grating App 20200363573 - DE GROOT; Pieter Cristiaan ; et al. | 2020-11-19 |
| Lithographic method and apparatus Grant 10,747,120 - Schoormans , et al. A | 2020-08-18 |
| Lithographic apparatus and device manufacturing method Grant 10,739,684 - Streefkerk , et al. A | 2020-08-11 |
| Patterning device Grant 10,732,498 - De Groot , et al. | 2020-08-04 |
| Lithographic apparatus and device manufacturing method Grant 10,705,432 - Kolesnychenko , et al. | 2020-07-07 |
| Lithographic Apparatus and Method App 20200117093 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2020-04-16 |
| Lithographic method and apparatus Grant 10,620,548 - Baselmans , et al. | 2020-04-14 |
| Optical System And Method App 20200012199 - BASELMANS; Johannes Jacobus Matheus | 2020-01-09 |
| Lithographic Method And Apparatus App 20200004163 - SCHOORMANS; Carolus Johannes Catharina ; et al. | 2020-01-02 |
| Lithographic apparatus and device manufacturing method Grant 10,509,326 - Jansen , et al. Dec | 2019-12-17 |
| Lithographic apparatus and device manufacturing method Grant 10,466,595 - Streefkerk , et al. No | 2019-11-05 |
| Patterning Device App 20190324365 - DE GROOT; Pieter Cristiaan ; et al. | 2019-10-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20190324374 - STREEFKERK; Bob ; et al. | 2019-10-24 |
| Lithographic method and apparatus Grant 10,451,977 - Kant , et al. Oc | 2019-10-22 |
| Lithographic Apparatus And Device Manufacturing Method App 20190317411 - STREEFKERK; Bob ; et al. | 2019-10-17 |
| Lithographic method and apparatus Grant 10,444,635 - Schoormans , et al. Oc | 2019-10-15 |
| Optical system and method Grant 10,444,637 - Baselmans Oc | 2019-10-15 |
| Patterning device Grant 10,401,723 - De Groot , et al. Sep | 2019-09-03 |
| Lithographic method and apparatus Grant 10,401,735 - Schoormans , et al. Sep | 2019-09-03 |
| Lithographic Apparatus And Device Manufacturing Method App 20190212662 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2019-07-11 |
| Lithographic apparatus and device manufacturing method Grant 10,345,712 - Streefkerk , et al. July 9, 2 | 2019-07-09 |
| Lithographic apparatus and device manufacturing method Grant 10,338,478 - Streefkerk , et al. | 2019-07-02 |
| Lithographic apparatus and a method of manufacturing a lithographic apparatus Grant 10,324,384 - Pieterse , et al. | 2019-06-18 |
| Lithographic Method and Apparatus App 20190163072 - SCHOORMANS; Carolus Johannes Catharina ; et al. | 2019-05-30 |
| Patterning Device App 20190137861 - DE GROOT; Pieter Cristiaan ; et al. | 2019-05-09 |
| Lithographic method and apparatus Grant 10,261,423 - Swaenen , et al. | 2019-04-16 |
| Lithographic Apparatus And Device Manufacturing Method App 20190086819 - LOOPSTRA; Erik Roelof ; et al. | 2019-03-21 |
| Lithographic apparatus and device manufacturing method Grant 10,234,768 - Kolesnychenko , et al. | 2019-03-19 |
| Lithographic apparatus and method Grant 10,222,703 - Mulder , et al. | 2019-03-05 |
| Lithographic method and apparatus Grant 10,175,586 - Borges Nicolau , et al. J | 2019-01-08 |
| Optical System And Method App 20180364587 - BASELMANS; Johannes Jacobus Matheus | 2018-12-20 |
| Lithographic Method And Apparatus App 20180348647 - SCHOORMANS; Carolus Johannes Catharina ; et al. | 2018-12-06 |
| Lithographic apparatus and device manufacturing method Grant 10,146,142 - Loopstra , et al. De | 2018-12-04 |
| Lithographic apparatus and method Grant 10,139,735 - Baselmans , et al. Nov | 2018-11-27 |
| Lithographic method and apparatus Grant 10,078,272 - Downes , et al. September 18, 2 | 2018-09-18 |
| Lithographic Apparatus And Device Manufacturing Method App 20180246418 - Kolesnychenko; Aleksey Yurievich ; et al. | 2018-08-30 |
| Lithographic Apparatus And A Method Of Manufacturing A Lithographic Apparatus App 20180210350 - PIETERSE; Gerben ; et al. | 2018-07-26 |
| Lithographic Apparatus And Device Manufacturing Method App 20180203364 - STREEFKERK; Bob ; et al. | 2018-07-19 |
| Immersion lithographic apparatus and device manufacturing method Grant 10,001,712 - Polet , et al. June 19, 2 | 2018-06-19 |
| Lithographic apparatus and device manufacturing method Grant 9,989,861 - Kolesnychenko , et al. June 5, 2 | 2018-06-05 |
| Lithographic method and apparatus Grant 9,989,864 - Baselmans , et al. June 5, 2 | 2018-06-05 |
| Lithographic apparatus and device manufacturing method Grant 9,952,515 - Streefkerk , et al. April 24, 2 | 2018-04-24 |
| Lithographic Method and Apparatus App 20180107120 - SWAENEN; Lense Hendrik-Jan Maria ; et al. | 2018-04-19 |
| Lithographic Method and Apparatus App 20180088467 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2018-03-29 |
| Lithographic Apparatus And Device Manufacturing Method App 20180081282 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2018-03-22 |
| Lithographic method and apparatus Grant 9,904,180 - Baselmans , et al. February 27, 2 | 2018-02-27 |
| Lithographic Apparatus And Device Manufacturing Method App 20180046089 - STREEFKERK; Bob ; et al. | 2018-02-15 |
| Lithographic Method and Apparatus App 20180039180 - BORGES NICOLAU; Jaqueline ; et al. | 2018-02-08 |
| Radiation System App 20180031982 - NIENHUYS; Han-Kwang ; et al. | 2018-02-01 |
| Lithographic apparatus and device manufacturing method utilizing data filtering Grant 9,846,368 - Tinnemans , et al. December 19, 2 | 2017-12-19 |
| Lithographic Method And Apparatus App 20170357159 - KANT; Nick ; et al. | 2017-12-14 |
| Lithographic apparatus and device manufacturing method Grant 9,829,799 - Kolesnychenko , et al. November 28, 2 | 2017-11-28 |
| Lithographic method and apparatus Grant 9,817,320 - Borges Nicolau , et al. November 14, 2 | 2017-11-14 |
| Lithographic Apparatus And Method App 20170315450 - MULDER; Heine Melle ; et al. | 2017-11-02 |
| Lithographic apparatus and device manufacturing method Grant 9,798,246 - Streefkerk , et al. October 24, 2 | 2017-10-24 |
| Lithographic method and apparatus Grant 9,791,787 - Baselmans , et al. October 17, 2 | 2017-10-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20170285488 - Jansen; Hans ; et al. | 2017-10-05 |
| Lithographic apparatus and method Grant 9,778,575 - Mulder , et al. October 3, 2 | 2017-10-03 |
| Lithographic Apparatus and Device Manufacturing Method Utilizing Data Filtering App 20170269483 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2017-09-21 |
| Lithographic Method And Apparatus App 20170261863 - DOWNES; James Robert ; et al. | 2017-09-14 |
| Patterning device, method of producing a marker on a substrate and device manufacturing method Grant 9,726,991 - Baselmans , et al. August 8, 2 | 2017-08-08 |
| Lithographic apparatus and device manufacturing method Grant 9,703,210 - Jansen , et al. July 11, 2 | 2017-07-11 |
| Lithographic Apparatus And Device Manufacturing Method App 20170160650 - LOOPSTRA; Erik Roelof ; et al. | 2017-06-08 |
| Lithographic Method And Apparatus App 20170160647 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2017-06-08 |
| Lithographic Apparatus And Device Manufacturing Method App 20170153557 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2017-06-01 |
| Lithographic Apparatus and Method App 20170131642 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2017-05-11 |
| Lithographic apparatus and device manufacturing method Grant 9,606,448 - Loopstra , et al. March 28, 2 | 2017-03-28 |
| Lithographic apparatus and device manufacturing method Grant 9,568,840 - Kolesnychenko , et al. February 14, 2 | 2017-02-14 |
| Lithographic apparatus and device manufacturing method Grant 9,529,269 - Baselmans , et al. December 27, 2 | 2016-12-27 |
| Lithographic apparatus and device manufacturing method Grant 9,477,160 - Streefkerk , et al. October 25, 2 | 2016-10-25 |
| Lithographic Apparatus And Device Manufacturing Method App 20160299440 - STREEFKERK; Bob ; et al. | 2016-10-13 |
| Lithographic Method and Apparatus App 20160274462 - BORGES NICOLAU; Jaqueline ; et al. | 2016-09-22 |
| Lithographic apparatus and device manufacturing method Grant 9,442,388 - Loopstra , et al. September 13, 2 | 2016-09-13 |
| Lithographic method and assembly Grant 9,423,701 - Zhang , et al. August 23, 2 | 2016-08-23 |
| Lithographic Apparatus And Method App 20160116848 - MULDER; Heine Melle ; et al. | 2016-04-28 |
| Lithographic method and apparatus Grant 9,304,411 - Baselmans , et al. April 5, 2 | 2016-04-05 |
| Lithographic Apparatus And Device Manufacturing Method App 20160085161 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2016-03-24 |
| Lithographic apparatus and device manufacturing method Grant 9,285,685 - Streefkerk , et al. March 15, 2 | 2016-03-15 |
| Lithographic Method and Apparatus App 20160062243 - Baselmans; Johannes Jacobus Matheus ; et al. | 2016-03-03 |
| Lithographic method and apparatus Grant 9,261,402 - Baselmans February 16, 2 | 2016-02-16 |
| Lithographic apparatus and method Grant 9,250,536 - Mulder , et al. February 2, 2 | 2016-02-02 |
| Lithographic Apparatus And Device Manufacturing Method App 20160004171 - STREEFKERK; Bob ; et al. | 2016-01-07 |
| Patterning Device, Method Of Producing A Marker On A Substrate And Device Manufacturing Method App 20150370174 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2015-12-24 |
| Lithographic apparatus and device manufacturing method involving a groove to collect liquid Grant 9,207,543 - Kolesnychenko , et al. December 8, 2 | 2015-12-08 |
| Lithographic Method and Apparatus App 20150346606 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2015-12-03 |
| Lithographic Apparatus And Device Manufacturing Method App 20150316858 - STREEFKERK; Bob ; et al. | 2015-11-05 |
| Lithographic apparatus and device manufacturing method Grant 9,134,623 - Streefkerk , et al. September 15, 2 | 2015-09-15 |
| Lithographic apparatus and device manufacturing method Grant 9,134,622 - Streefkerk , et al. September 15, 2 | 2015-09-15 |
| Lithographic apparatus having a liquid detection system Grant 9,104,117 - Streefkerk , et al. August 11, 2 | 2015-08-11 |
| Lithographic Apparatus And Device Manufacturing Method App 20150168850 - STREEFKERK; Bob ; et al. | 2015-06-18 |
| Lithographic Apparatus And Device Manufacturing Method App 20150131067 - Baselmans; Johannes Jacobus Matheus ; et al. | 2015-05-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20150116675 - JANSEN; Hans ; et al. | 2015-04-30 |
| Lithographic apparatus and device manufacturing method Grant 8,964,164 - Streefkerk , et al. February 24, 2 | 2015-02-24 |
| Lithographic apparatus and device manufacturing method Grant 8,941,811 - Jansen , et al. January 27, 2 | 2015-01-27 |
| Lithographic apparatus and method Grant 8,937,706 - Mulder , et al. January 20, 2 | 2015-01-20 |
| Lithographic Apparatus And Device Manufacturing Method App 20140293248 - STREEFKERK; Bob ; et al. | 2014-10-02 |
| Lithographic Apparatus And Device Manufacturing Method App 20140253890 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2014-09-11 |
| Lithographic apparatus and method involving a pockels cell Grant 8,817,235 - Tinnemans , et al. August 26, 2 | 2014-08-26 |
| Lithographic Apparatus And Device Manufacturing Method App 20140233004 - Streefkerk; Bob ; et al. | 2014-08-21 |
| Lithographic apparatus and device manufacturing method involving a barrier to collect liquid Grant 8,755,033 - Kolesnychenko , et al. June 17, 2 | 2014-06-17 |
| Lithographic apparatus and device manufacturing method Grant 8,724,083 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
| Lithographic apparatus and device manufacturing method Grant 8,724,084 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
| Lithographic apparatus and device manufacturing method Grant 8,711,330 - Streefkerk , et al. April 29, 2 | 2014-04-29 |
| Lithographic apparatus and device manufacturing method involving a barrier to collect liquid Grant 8,704,998 - Kolesnychenko , et al. April 22, 2 | 2014-04-22 |
| Lithographic apparatus and device manufacturing method using pupil filling by telecentricity control Grant 8,692,974 - Baselmans April 8, 2 | 2014-04-08 |
| Lithographic apparatus and device manufacturing method Grant 8,681,309 - Baselmans , et al. March 25, 2 | 2014-03-25 |
| Lithographic apparatus and device manufacturing method Grant 8,638,419 - Jansen , et al. January 28, 2 | 2014-01-28 |
| Lithographic apparatus and device manufacturing method Grant 8,634,056 - Streefkerk , et al. January 21, 2 | 2014-01-21 |
| Lithographic apparatus and method Grant 8,610,878 - Baselmans , et al. December 17, 2 | 2013-12-17 |
| Lithographic Apparatus and Device Manufacturing Method Utilizing Data Filtering App 20130301025 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2013-11-14 |
| Lithographic apparatus and device manufacturing method Grant 8,570,486 - Mulkens , et al. October 29, 2 | 2013-10-29 |
| Lithographic Method and Apparatus App 20130271636 - BASELMANS; Johannes Jacobus Matheus | 2013-10-17 |
| Lithographic apparatus and device manufacturing method Grant 8,547,519 - Streefkerk , et al. October 1, 2 | 2013-10-01 |
| Lithographic Method and Apparatus App 20130235361 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2013-09-12 |
| Lithographic apparatus and device manufacturing method utilizing data filtering Grant 8,508,715 - Tinnemans , et al. August 13, 2 | 2013-08-13 |
| Lithographic apparatus and device manufacturing method Grant 8,472,006 - Streefkerk , et al. June 25, 2 | 2013-06-25 |
| Lithographic Apparatus And Device Manufacturing Method App 20130135595 - STREEFKERK; Bob ; et al. | 2013-05-30 |
| Lithographic apparatus and device manufacturing method Grant 8,354,209 - Streefkerk , et al. January 15, 2 | 2013-01-15 |
| Immersion lithographic apparatus and device manufacturing method detecting residual liquid Grant 8,319,939 - Streefkerk , et al. November 27, 2 | 2012-11-27 |
| Lithographic Method And Assembly App 20120257182 - Zhang; Shaoxian ; et al. | 2012-10-11 |
| Lithographic apparatus and device manufacturing method using interferometric and other exposure Grant 8,264,667 - Troost , et al. September 11, 2 | 2012-09-11 |
| Lithographic apparatus and device manufacturing method Grant 8,208,123 - Loopstra , et al. June 26, 2 | 2012-06-26 |
| Lithographic apparatus and method Grant 8,189,172 - Baselmans , et al. May 29, 2 | 2012-05-29 |
| Lithographic apparatus and device manufacturing method Grant 8,174,674 - Mulkens , et al. May 8, 2 | 2012-05-08 |
| Lithographic Apparatus And Device Manufacturing Method App 20120086928 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2012-04-12 |
| Lithographic apparatus and device manufacturing method Grant 8,115,899 - Jansen , et al. February 14, 2 | 2012-02-14 |
| Lithographic apparatus and device manufacturing method Grant 8,102,507 - Streefkerk , et al. January 24, 2 | 2012-01-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20120013867 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2012-01-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20120008119 - JANSEN; Hans ; et al. | 2012-01-12 |
| Lithographic Apparatus And Device Manufacturing Method App 20110279795 - STREEFKERK; Bob ; et al. | 2011-11-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20110273677 - STREEFKERK; Bob ; et al. | 2011-11-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20110273683 - STREEFKERK; Bob ; et al. | 2011-11-10 |
| Device manufacturing method and lithographic apparatus Grant 8,049,864 - Kok , et al. November 1, 2 | 2011-11-01 |
| Lithographic Apparatus and Method App 20110216297 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2011-09-08 |
| Lithographic Apparatus And Device Manufacturing Method App 20110211181 - STREEFKERK; Bob ; et al. | 2011-09-01 |
| Lithographic Apparatus And Device Manufacturing Method App 20110181859 - Streefkerk; Bob ; et al. | 2011-07-28 |
| Lithographic apparatus and device manufacturing method Grant 7,961,293 - Streefkerk , et al. June 14, 2 | 2011-06-14 |
| Moving beam with respect to diffractive optics in order to reduce interference patterns Grant 7,948,606 - Visser , et al. May 24, 2 | 2011-05-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20110116061 - KOLESNYCHENKO; Aleksey Yurievich ; et al. | 2011-05-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20110109887 - Jansen; Hans ; et al. | 2011-05-12 |
| Lithographic apparatus and device manufacturing method Grant 7,936,444 - Streefkerk , et al. May 3, 2 | 2011-05-03 |
| Lithographic Apparatus And Device Manufacturing Method App 20110058148 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2011-03-10 |
| Lithographic apparatus and device manufacturing method Grant 7,898,642 - Kolesnychenko , et al. March 1, 2 | 2011-03-01 |
| Lithographic Apparatus and Device Manufacturing Method Utilizing Data Filtering App 20110043778 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2011-02-24 |
| Lithographic apparatus and device manufacturing method Grant 7,880,860 - Jansen , et al. February 1, 2 | 2011-02-01 |
| Lithographic Apparatus And Device Manufacturing Method App 20110001944 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2011-01-06 |
| Lithographic apparatus and device manufacturing method utilizing data filtering Grant 7,864,295 - Tinnemans , et al. January 4, 2 | 2011-01-04 |
| Lithographic apparatus and device manufacturing method Grant 7,859,647 - Bleeker , et al. December 28, 2 | 2010-12-28 |
| Lithographic apparatus and device manufacturing method Grant 7,834,977 - Baselmans , et al. November 16, 2 | 2010-11-16 |
| Lithographic apparatus and method Grant 7,834,980 - Baselmans , et al. November 16, 2 | 2010-11-16 |
| Lithographic apparatus and device manufacturing method Grant 7,812,924 - Baselmans , et al. October 12, 2 | 2010-10-12 |
| Method and system for maskless lithography real-time pattern rasterization and using computationally coupled mirrors to achieve optimum feature representation Grant 7,773,287 - Latypov , et al. August 10, 2 | 2010-08-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20100171939 - Baselmans; Johannes Jacobus Matheus ; et al. | 2010-07-08 |
| Patterning device utilizing sets of stepped mirrors and method of using same Grant 7,738,077 - Baselmans , et al. June 15, 2 | 2010-06-15 |
| Lithographic Apparatus And Device Manufacturing Method App 20100141915 - Baselmans; Johannes Jacobus Matheus ; et al. | 2010-06-10 |
| Reflective loop system producing incoherent radiation Grant 7,728,954 - Baselmans , et al. June 1, 2 | 2010-06-01 |
| Lithographic apparatus and device manufacturing method Grant 7,670,730 - Streefkerk , et al. March 2, 2 | 2010-03-02 |
| Lithographic apparatus and device manufacturing method Grant 7,652,751 - Baselmans , et al. January 26, 2 | 2010-01-26 |
| System and method to form unpolarized light Grant 7,649,676 - Baselmans , et al. January 19, 2 | 2010-01-19 |
| Immersion lithography objective Grant 7,649,702 - Gellrich , et al. January 19, 2 | 2010-01-19 |
| Prewetting of substrate before immersion exposure Grant 7,643,127 - Baselmans , et al. January 5, 2 | 2010-01-05 |
| Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus Grant 7,626,684 - Jeunink , et al. December 1, 2 | 2009-12-01 |
| Lithographic Apparatus And Method App 20090279066 - TINNEMANS; Patricius Aloysius, Jacobus ; et al. | 2009-11-12 |
| Lithographic Apparatus And Device Manufacturing Method App 20090214986 - STREEFKERK; Bob ; et al. | 2009-08-27 |
| Lithographic Apparatus And Device Manufacturing Method App 20090207397 - Streefkerk; Bob ; et al. | 2009-08-20 |
| Interferometric lithography system and method used to generate equal path lengths of interfering beams Grant 7,561,252 - Sewell , et al. July 14, 2 | 2009-07-14 |
| Device Manufacturing Method and Lithographic Apparatus App 20090168039 - KOK; Haico Victor ; et al. | 2009-07-02 |
| Lithographic apparatus and device manufacturing method Grant 7,545,481 - Streefkerk , et al. June 9, 2 | 2009-06-09 |
| Lithographic apparatus and device manufacturing method Grant 7,528,929 - Streefkerk , et al. May 5, 2 | 2009-05-05 |
| Lithographic apparatus and device manufacturing method App 20090079949 - Streefkerk; Bob ; et al. | 2009-03-26 |
| Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same Grant 7,500,218 - Troost , et al. March 3, 2 | 2009-03-03 |
| Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cupping Grant 7,499,146 - Troost , et al. March 3, 2 | 2009-03-03 |
| Lithographic apparatus and method App 20090033902 - Mulder; Heine Melle ; et al. | 2009-02-05 |
| Lithographic apparatus and device manufacturing method App 20090021707 - Mulkens; Johannes Catharinus Hubertus ; et al. | 2009-01-22 |
| Lithographic Apparatus and Device Manufacturing Method Utilizing Data Filtering App 20090011345 - Tinnemans; Patricius Aloysius Jacobus ; et al. | 2009-01-08 |
| Lithographic Apparatus and Device Manufacturing Method Using Pupil Filling By Telecentricity Control App 20080309898 - Baselmans; Johannes Jacobus Matheus | 2008-12-18 |
| Lithographic Apparatus and Method App 20080309899 - Baselmans; Johannes Jacobus Matheus ; et al. | 2008-12-18 |
| Lithographic apparatus and device manufacturing method using a compensation scheme for a patterning array Grant 7,466,394 - Troost , et al. December 16, 2 | 2008-12-16 |
| Lithographic apparatus and device manufacturing method Grant 7,463,330 - Streefkerk , et al. December 9, 2 | 2008-12-09 |
| Lithographic apparatus, method for calibrating and device manufacturing method Grant 7,459,710 - Baselmans , et al. December 2, 2 | 2008-12-02 |
| Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus App 20080252870 - Jeunink; Andre Bernardus ; et al. | 2008-10-16 |
| Illumination beam measurement Grant 7,436,502 - Baselmans , et al. October 14, 2 | 2008-10-14 |
| Lithographic apparatus and device manufacturing method Grant 7,433,015 - Mulkens , et al. October 7, 2 | 2008-10-07 |
| Lithographic apparatus and method App 20080239268 - Mulder; Heine Melle ; et al. | 2008-10-02 |
| Lithographic apparatus and device manufacturing method App 20080218711 - Baselmans; Johannes Jacobus Matheus ; et al. | 2008-09-11 |
| Lithographic apparatus and device manufacturing method App 20080218717 - Streefkerk; Bob ; et al. | 2008-09-11 |
| Immersion Lithography Objective App 20080212211 - Gellrich; Bernhard ; et al. | 2008-09-04 |
| Lithographic apparatus and device manufacturing method App 20080192219 - Baselmans; Johannes Jacobus Matheus ; et al. | 2008-08-14 |
| Lithographic apparatus and device manufacturing method utilizing data filtering Grant 7,403,265 - Tinnemans , et al. July 22, 2 | 2008-07-22 |
| Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus Grant 7,403,264 - Jeunink , et al. July 22, 2 | 2008-07-22 |
| Lithographic apparatus and device manufacturing method App 20080170215 - Streefkerk; Bob ; et al. | 2008-07-17 |
| Lithographic apparatus and method App 20080151206 - Baselmans; Johannes Jacobus Matheus ; et al. | 2008-06-26 |
| System and method for compensating for thermal expansion of lithography apparatus or substrate Grant 7,391,503 - Venema , et al. June 24, 2 | 2008-06-24 |
| Lithographic Apparatus and Device Manufacturing Method App 20080137053 - BLEEKER; Arno Jan ; et al. | 2008-06-12 |
| Lithographic apparatus and device manufacturing method Grant 7,379,159 - Baselmans , et al. May 27, 2 | 2008-05-27 |
| Lithographic apparatus and device manufacturing method Grant 7,375,796 - Baselmans , et al. May 20, 2 | 2008-05-20 |
| Lithographic apparatus and device manufacturing method Grant 7,352,434 - Streefkerk , et al. April 1, 2 | 2008-04-01 |
| Lithographic apparatus and device manufacturing method Grant 7,352,435 - Streefkerk , et al. April 1, 2 | 2008-04-01 |
| Methods and systems for lithographic beam generation Grant 7,342,644 - Baselmans , et al. March 11, 2 | 2008-03-11 |
| System and method to correct for field curvature of multi lens array Grant 7,332,733 - Jorritsma , et al. February 19, 2 | 2008-02-19 |
| Method and system for aligning a first and second marker Grant 7,333,175 - Baselmans February 19, 2 | 2008-02-19 |
| Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device Grant 7,330,239 - Baselmans , et al. February 12, 2 | 2008-02-12 |
| Lithographic apparatus and device manufacturing method App 20080002162 - Jansen; Hans ; et al. | 2008-01-03 |
| System and method to form unpolarized light App 20070291372 - Baselmans; Johannes Jacobus Matheus ; et al. | 2007-12-20 |
| Reflective loop system producing incoherent radiation App 20070279611 - Baselmans; Johannes Jacobus Matheus ; et al. | 2007-12-06 |
| Lithographic apparatus and device manufacturing method Grant 7,304,718 - Baselmans , et al. December 4, 2 | 2007-12-04 |
| Method and system for maskless lithography real-time pattern rasterization and using computationally coupled mirrors to achieve optimum feature representation App 20070268547 - Latypov; Azat M. ; et al. | 2007-11-22 |
| Lithographic apparatus and device manufacturing method using interferometric and other exposure App 20070258078 - Troost; Kars Zeger ; et al. | 2007-11-08 |
| Moving beam with respect to diffractive optics in order to reduce interference patterns App 20070242253 - Visser; Huibert ; et al. | 2007-10-18 |
| Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus Grant 7,262,831 - Akhssay , et al. August 28, 2 | 2007-08-28 |
| Sensor shield Grant 7,248,334 - Baselmans , et al. July 24, 2 | 2007-07-24 |
| Prewetting of substrate before immersion exposure App 20070159613 - Baselmans; Johannes Jacobus Matheus ; et al. | 2007-07-12 |
| Method of determining aberration of a projection system of a lithographic apparatus Grant 7,242,475 - Baselmans , et al. July 10, 2 | 2007-07-10 |
| Lithographic apparatus and device manufacturing method using multiple exposures and multiple exposure types App 20070153249 - Troost; Kars Zeger ; et al. | 2007-07-05 |
| Interferometric lithography system and method used to generate equal path lengths of interfering beams App 20070153250 - Sewell; Harry ; et al. | 2007-07-05 |
| Lithographic apparatus and device manufacturing method Grant 7,239,370 - Jansen , et al. July 3, 2 | 2007-07-03 |
| Lithographic apparatus and device manufacturing method Grant 7,239,373 - Tinnemans , et al. July 3, 2 | 2007-07-03 |
| Lithographic apparatus, method for calibrating and device manufacturing method App 20070145306 - Baselmans; Johannes Jacobus Matheus ; et al. | 2007-06-28 |
| Lithographic apparatus and device manufacturing method using a compensation scheme for a patterning array App 20070139637 - Troost; Kars Zeger ; et al. | 2007-06-21 |
| Lithographic apparatus and device manufacturing method utilizing hexagonal image grids Grant 7,230,677 - Baselmans , et al. June 12, 2 | 2007-06-12 |
| Method and system for maskless lithography real-time pattern rasterization and using computationally coupled mirrors to achieve optimum feature representation Grant 7,209,275 - Latypov , et al. April 24, 2 | 2007-04-24 |
| System and method to correct for field curvature of multi lens array App 20070075278 - Jorritsma; Laurentius Catrinus ; et al. | 2007-04-05 |
| System and method for compensating for thermal expansion of lithography apparatus or substrate App 20070075315 - Venema; Willem Jurrianus ; et al. | 2007-04-05 |
| Prewetting of substrate before immersion exposure Grant 7,196,770 - Baselmans , et al. March 27, 2 | 2007-03-27 |
| Lithographic apparatus, method of determining properties thereof and computer program Grant 7,187,431 - Kok , et al. March 6, 2 | 2007-03-06 |
| Lithographic apparatus for manufacturing a device Grant 7,183,566 - Baselmans , et al. February 27, 2 | 2007-02-27 |
| Lithographic apparatus and device manufacturing method utilizing a microlens array at an image plane Grant 7,180,577 - Baselmans , et al. February 20, 2 | 2007-02-20 |
| Lithographic apparatus and device manufacturing method App 20070030470 - Tinnemans; Patricius Aloysius Jacobus ; et al. | 2007-02-08 |
| Lithographic apparatus, device manufacturing method and device manufactured thereby having an increase in depth of focus App 20070013889 - Jorritsma; Laurentius Catrinus ; et al. | 2007-01-18 |
| Lithographic apparatus and device manufacturing method App 20070013886 - Baselmans; Johannes Jacobus Matheus ; et al. | 2007-01-18 |
| Lithographic apparatus and device manufacturing method Grant 7,161,654 - Baselmans , et al. January 9, 2 | 2007-01-09 |
| Lithographic apparatus and device manufacturing method Grant 7,148,952 - Eurlings , et al. December 12, 2 | 2006-12-12 |
| Lithographic apparatus and device manufacturing method Grant 7,126,672 - Tinnemans , et al. October 24, 2 | 2006-10-24 |
| Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device App 20060227069 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-10-12 |
| Lithographic apparatus and device manufacturing method utilizing data filtering App 20060221322 - Tinnemans; Patricius Aloysius Jacobus ; et al. | 2006-10-05 |
| Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cupping App 20060203220 - Troost; Kars Zeger ; et al. | 2006-09-14 |
| Lithographic apparatus and device manufacturing method App 20060158626 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-07-20 |
| Lithographic apparatus and device manufacturing method Grant 7,079,225 - Baselmans , et al. July 18, 2 | 2006-07-18 |
| Lithographic apparatus and device manufacturing method App 20060147821 - Streefkerk; Bob ; et al. | 2006-07-06 |
| Methods and systems for lithographic beam generation App 20060139609 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-06-29 |
| Lithographic apparatus and device manufacturing method App 20060138349 - Bleeker; Arno Jan ; et al. | 2006-06-29 |
| Method of and preventing focal plane anomalies in the focal plane of a projection system Grant 7,068,349 - Minnaert-Janssen , et al. June 27, 2 | 2006-06-27 |
| Lithographic apparatus and device manufacturing method utilizing an microlens array at a image plane App 20060132751 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-06-22 |
| Lithographic apparatus and device manufacturing method App 20060132731 - Jansen; Hans ; et al. | 2006-06-22 |
| Lithographic apparatus and device manufacturing method utilizing hexagonal image grids App 20060132746 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-06-22 |
| Lithographic apparatus and device manufacturing method App 20060119807 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-06-08 |
| Sensor shield App 20060119816 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-06-08 |
| Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus App 20060114437 - Akhssay; M'hamed ; et al. | 2006-06-01 |
| Lithographic apparatus, method of determining properties thereof and computer program App 20060103826 - Kok; Haico Victor ; et al. | 2006-05-18 |
| Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,034,917 - Baselmans , et al. April 25, 2 | 2006-04-25 |
| Lithographic apparatus and device manufacturing method App 20060055905 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-03-16 |
| Method and system for aligning a first and second marker App 20060055904 - Baselmans; Johannes Jacobus Matheus | 2006-03-16 |
| Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same App 20060040187 - Troost; Kars Zeger ; et al. | 2006-02-23 |
| Lithographic apparatus and device manufacturing method App 20060038969 - Baselmans; Johannes Jacobus Matheus ; et al. | 2006-02-23 |
| Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus App 20060008716 - Jeunink; Andre Bernardus ; et al. | 2006-01-12 |
| Lithographic apparatus and device manufacturing method App 20060007419 - Streefkerk; Bob ; et al. | 2006-01-12 |
| Lithographic apparatus and device manufacturing method App 20050243292 - Baselmans, Johannes Jacobus Matheus ; et al. | 2005-11-03 |
| Lithographic apparatus and device manufacturing method App 20050231694 - Kolesnychenko, Aleksey Yurievich ; et al. | 2005-10-20 |
| Lithographic apparatus, device manufacturing method and device manufactured thereby App 20050219482 - Baselmans, Johannes Jacobus Matheus ; et al. | 2005-10-06 |
| Lithographic apparatus and device manufacturing method App 20050219483 - Baselmans, Johannes Jacobus Matheus ; et al. | 2005-10-06 |
| Method of determining aberration of a projection system of a lithographic apparatus App 20050213097 - Baselmans, Johannes Jacobus Matheus ; et al. | 2005-09-29 |
| Lithographic apparatus and a measurement system Grant 6,940,587 - Van Der Laan , et al. September 6, 2 | 2005-09-06 |
| Lithographic apparatus and device manufacturing method App 20050179877 - Mulkens, Johannes Catharinus Hubertus ; et al. | 2005-08-18 |
| Lithographic apparatus and device manufacturing method App 20050175776 - Streefkerk, Bod ; et al. | 2005-08-11 |
| Lithographic apparatus and device manufacturing method App 20050174550 - Streefkerk, Bob ; et al. | 2005-08-11 |
| Lithographic apparatus and device manufacturing method App 20050146702 - Eurlings, Markus Franciscus Antonius ; et al. | 2005-07-07 |
| Lithographic apparatus and methods, patterning structure and method for making a patterning structure, device manufacturing method, and device manufactured thereby App 20050136340 - Baselmans, Johannes Jacobus Matheus ; et al. | 2005-06-23 |
| Lithographic apparatus and device manufacturing method App 20050110973 - Streefkerk, Bob ; et al. | 2005-05-26 |
| Lithographic apparatus and device manufacturing method App 20050094119 - Loopstra, Erik Roelof ; et al. | 2005-05-05 |
| Assist features for use in lithographic projection Grant 6,887,625 - Baselmans , et al. May 3, 2 | 2005-05-03 |
| Lithographic apparatus and device manufacturing method App 20050007569 - Streefkerk, Bob ; et al. | 2005-01-13 |
| Method of and preventing focal plane anomalies in the focal plane of a projection system App 20040263811 - Minnaert-Janssen, Ingrid ; et al. | 2004-12-30 |
| Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,809,797 - Baselmans , et al. October 26, 2 | 2004-10-26 |
| Lithographic apparatus and device manufacturing method App 20040174509 - Jansen, Albert Johannes Maria ; et al. | 2004-09-09 |
| Method of calibration of a lithographic apparatus, mask for use in calibration of lithographic apparatus, lithographic apparatus, device manufacturing method, device manufactured thereby Grant 6,777,139 - Baselmans August 17, 2 | 2004-08-17 |
| Lithographic apparatus and a measurement system App 20040114119 - Van Der Laan, Hans ; et al. | 2004-06-17 |
| Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations Grant 6,650,399 - Baselmans , et al. November 18, 2 | 2003-11-18 |
| Method of calibration of a lithographic apparatus, mask for use in calibration of lithographic apparatus, lithographic apparatus, device manufacturing method, device manufactured thereby App 20020172876 - Baselmans, Johannes Jacobus Matheus | 2002-11-21 |
| Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations App 20020145717 - Baselmans, Johannes Jacobus Matheus ; et al. | 2002-10-10 |
| Assist features for use in lithographic projection App 20020045106 - Baselmans, Johannes Jacobus Matheus ; et al. | 2002-04-18 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 