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Thermal Emitter With Embedded Heating Element App 20210341433 - Glacer; Christoph ;   et al. | 2021-11-04 |
Sound transducer structure and method for manufacturing a sound transducer structure Grant 11,115,755 - Dehe , et al. September 7, 2 | 2021-09-07 |
MEMS component and production method for a MEMS component Grant 11,053,117 - Fueldner , et al. July 6, 2 | 2021-07-06 |
System and method for a pumping speaker Grant 11,039,248 - Barzen June 15, 2 | 2021-06-15 |
Membrane Support for Dual Backplate Transducers App 20210139319 - Klein; Wolfgang ;   et al. | 2021-05-13 |
Membrane support for dual backplate transducers Grant 10,981,780 - Klein , et al. April 20, 2 | 2021-04-20 |
Membrane Support For Dual Backplate Transducers App 20210053821 - Klein; Wolfgang ;   et al. | 2021-02-25 |
Mems Devices App 20210044905 - Walther; Arnaud ;   et al. | 2021-02-11 |
MEMS device Grant 10,779,101 - Dehe , et al. Sept | 2020-09-15 |
Sensor With A Membrane Electrode, A Counterelectrode, And At Least One Spring App 20200283290 - Barzen; Stefan | 2020-09-10 |
MEMS Device App 20200236485 - Dehe; Alfons ;   et al. | 2020-07-23 |
Mems Component And Production Method For A Mems Component App 20200216309 - Fueldner; Marc ;   et al. | 2020-07-09 |
MEMS component and production method for a MEMS component Grant 10,689,250 - Fueldner , et al. | 2020-06-23 |
Sound Transducer Structure And Method For Manufacturing A Sound Transducer Structure App 20200169819 - Dehe; Alfons ;   et al. | 2020-05-28 |
MEMS device Grant 10,602,290 - Dehe , et al. | 2020-03-24 |
Sound transducer structure and method for manufacturing a sound transducer structure Grant 10,567,886 - Dehe , et al. Feb | 2020-02-18 |
Semiconductor device, microphone and method for producing a semiconductor device Grant 10,464,807 - Barzen , et al. No | 2019-11-05 |
MEMS sound transducer, MEMS microphone and method for providing a MEMS sound transducer Grant 10,469,958 - Barzen No | 2019-11-05 |
System and method for a multi-electrode MEMS device Grant 10,462,579 - Barzen Oc | 2019-10-29 |
Semiconductor Devices Having a Membrane Layer with Smooth Stress-Relieving Corrugations and Methods of Fabrication Thereof App 20190297441 - Dehe; Alfons ;   et al. | 2019-09-26 |
Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof Grant 10,405,118 - Dehe , et al. Sep | 2019-09-03 |
System and Method for a Pumping Speaker App 20190174229 - Barzen; Stefan | 2019-06-06 |
MEMS Device App 20190098424 - Dehe; Alfons ;   et al. | 2019-03-28 |
System and method for a pumping speaker Grant 10,244,316 - Barzen | 2019-03-26 |
Mems Component And Production Method For A Mems Component App 20190023562 - Fueldner; Marc ;   et al. | 2019-01-24 |
MEMS device Grant 10,171,925 - Dehe , et al. J | 2019-01-01 |
Mems Sound Transducer, Mems Microphone And Method For Providing A Mems Sound Transducer App 20180262844 - Barzen; Stefan | 2018-09-13 |
System and Method for a Multi-Electrode MEMS Device App 20180262843 - Barzen; Stefan | 2018-09-13 |
Sound transducer structure and method for manufacturing a sound transducer structure Grant 10,034,100 - Dehe , et al. July 24, 2 | 2018-07-24 |
Semiconductor Device, Microphone And Method For Producing A Semiconductor Device App 20180170745 - Barzen; Stefan ;   et al. | 2018-06-21 |
System and method for a multi-electrode MEMS device Grant 10,003,889 - Barzen June 19, 2 | 2018-06-19 |
Semiconductor Device And A Method For Forming A Semiconductor Device App 20180108567 - Barzen; Stefan | 2018-04-19 |
Sound Transducer Structure and Method for Manufacturing a Sound Transducer Structure App 20180103325 - Dehe; Alfons ;   et al. | 2018-04-12 |
Method for forming a microelectromechanical device Grant 9,902,612 - Dehe , et al. February 27, 2 | 2018-02-27 |
System and Method for a Pumping Speaker App 20180035206 - Barzen; Stefan | 2018-02-01 |
Semiconductor device and a method for forming a semiconductor device Grant 9,875,934 - Barzen January 23, 2 | 2018-01-23 |
System and method for a pumping speaker Grant 9,843,862 - Barzen December 12, 2 | 2017-12-12 |
Method For Forming A Microelectromechanical Device App 20170297899 - Dehe; Alfons ;   et al. | 2017-10-19 |
Semiconductor Device And A Method For Forming A Semiconductor Device App 20170250112 - Barzen; Stefan | 2017-08-31 |
Microelectromechanical Device And Method For Forming A Microelectromechanical Device App 20170247245 - Dehe; Alfons ;   et al. | 2017-08-31 |
Microelectromechanical device and method for forming a microelectromechanical device Grant 9,745,188 - Dehe , et al. August 29, 2 | 2017-08-29 |
MEMS Device App 20170180900 - Dehe; Alfons ;   et al. | 2017-06-22 |
Packaged MEMS device comprising adjustable ventilation opening Grant 9,673,785 - Herzum , et al. June 6, 2 | 2017-06-06 |
Sound transducer structure and method for manufacturing a sound transducer structure Grant 9,668,056 - Dehe , et al. May 30, 2 | 2017-05-30 |
MEMS device Grant 9,628,886 - Dehe , et al. April 18, 2 | 2017-04-18 |
System and Method for a Multi-Electrode MEMS Device App 20170041716 - Barzen; Stefan | 2017-02-09 |
System and Method for a Pumping Speaker App 20170041708 - Barzen; Stefan | 2017-02-09 |
Sound Transducer Structure and Method for Manufacturing a Sound Transducer Structure App 20170034634 - Dehe; Alfons ;   et al. | 2017-02-02 |
System and method for a MEMS transducer Grant 9,540,226 - Klein , et al. January 10, 2 | 2017-01-10 |
System And Method For A Mems Transducer App 20160340173 - Klein; Wolfgang ;   et al. | 2016-11-24 |
Capacitive microphone with insulated conductive plate Grant 9,503,823 - Barzen , et al. November 22, 2 | 2016-11-22 |
Semiconductor devices and methods of forming thereof Grant 9,458,009 - Dehe , et al. October 4, 2 | 2016-10-04 |
Capacitive Microphone With Insulated Conductive Plate App 20160192086 - Barzen; Stefan ;   et al. | 2016-06-30 |
Packaged MEMS Device and Method of Calibrating a Packaged MEMS Device App 20160087606 - Herzum; Christian ;   et al. | 2016-03-24 |
Packaged MEMS device and method of calibrating a packaged MEMS device Grant 9,210,516 - Herzum , et al. December 8, 2 | 2015-12-08 |
Semiconductor Devices and Methods of Forming Thereof App 20150321901 - Dehe; Alfons ;   et al. | 2015-11-12 |
MEMS devices, interface circuits, and methods of making thereof Grant 9,179,221 - Barzen , et al. November 3, 2 | 2015-11-03 |
MEMS Device App 20150289046 - Dehe; Alfons ;   et al. | 2015-10-08 |
Semiconductor devices and methods of forming thereof Grant 9,102,519 - Dehe , et al. August 11, 2 | 2015-08-11 |
Semiconductor Devices and Methods of Fabrication Thereof App 20150145079 - Dehe; Alfons ;   et al. | 2015-05-28 |
MEMS structure with adjustable ventilation openings Grant 9,002,037 - Dehe , et al. April 7, 2 | 2015-04-07 |
Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regions Grant 8,975,107 - Dehe , et al. March 10, 2 | 2015-03-10 |
MEMS Devices, Interface Circuits, and Methods of Making Thereof App 20150023529 - Barzen; Stefan ;   et al. | 2015-01-22 |
Semiconductor Devices and Methods of Forming Thereof App 20140264651 - Dehe; Alfons ;   et al. | 2014-09-18 |
Tunable MEMS device and method of making a tunable MEMS device Grant 8,723,277 - Dehe , et al. May 13, 2 | 2014-05-13 |
Sound Transducer Structure and Method for Manufacturing a Sound Transducer Structure App 20140079277 - Dehe; Alfons ;   et al. | 2014-03-20 |
Packaged MEMS Device and Method of Calibrating a Packaged MEMS Device App 20130277776 - Herzum; Christian ;   et al. | 2013-10-24 |
Sound transducer structure and method for manufacturing a sound transducer structure Grant 8,542,853 - Dehe , et al. September 24, 2 | 2013-09-24 |
MEMS Structure with Adjustable Ventilation Openings App 20130223023 - Dehe; Alfons ;   et al. | 2013-08-29 |
Tunable MEMS Device and Method of Making a Tunable MEMS Device App 20130221453 - Dehe; Alfons ;   et al. | 2013-08-29 |
Micromechanical sound transducer having a membrane support with tapered surface Grant 8,461,655 - Klein , et al. June 11, 2 | 2013-06-11 |
Semiconductor Devices and Methods of Fabrication Thereof App 20120319217 - Dehe; Alfons ;   et al. | 2012-12-20 |
Micromechanical Sound Transducer Having a Membrane Support with Tapered Surface App 20120248554 - Klein; Wolfgang ;   et al. | 2012-10-04 |
Sound Transducer Structure and Method for Manufacturing a Sound Transducer Structure App 20110170735 - Dehe; Alfons ;   et al. | 2011-07-14 |
Sound transducer structure and method for manufacturing a sound transducer structure Grant 7,912,236 - Dehe , et al. March 22, 2 | 2011-03-22 |
Method for producing a membrane Grant 7,882,612 - Dehe , et al. February 8, 2 | 2011-02-08 |
Membrane and method for the production of the same Grant 7,502,482 - Dehe , et al. March 10, 2 | 2009-03-10 |
Sound transducer structure and method for manufacturing a sound transducer structure App 20080104825 - Dehe; Alfons ;   et al. | 2008-05-08 |
Micromechanical capacitive transducer and method for manufacturing the same Grant 7,348,646 - Barzen , et al. March 25, 2 | 2008-03-25 |
Micromechanical capacitive transducer and method for producing the same Grant 7,253,016 - Barzen , et al. August 7, 2 | 2007-08-07 |
Micromechanical capacitive transducer and method for manufacturing the same App 20070034976 - Barzen; Stefan ;   et al. | 2007-02-15 |
Method and apparatus for manufacturing a device having a moveable structure Grant 7,001,828 - Barzen , et al. February 21, 2 | 2006-02-21 |
Membrane and method for the production of the same App 20050241944 - Dehe, Alfons ;   et al. | 2005-11-03 |
Micromechanical capacitive transducer and method for producing the same App 20050179100 - Barzen, Stefan ;   et al. | 2005-08-18 |
Method and apparatus for manufacturing a device having a moveable structure App 20050026313 - Barzen, Stefan ;   et al. | 2005-02-03 |