Barty; Anton
Patent Applications and Registrations
Patent applications and USPTO patent grants for Barty; Anton.The latest application filed is for "method for repairing mask-blank defects using repair-zone compensation".
- Barty; Anton - Livermore CA
- Barty; Anton - Brunswick AU
| Patent | Date |
|---|---|
| Method for repairing mask-blank defects using repair-zone compensation App 20060234135 - Hau-Riege; Stefan P. ; et al. | 2006-10-19 |
| Phase determination of a radiation wave field Grant 7,039,553 - Nugent , et al. May 2, 2 | 2006-05-02 |
| Method for the manufacture of phase shifting masks for EUV lithography Grant 7,022,435 - Stearns , et al. April 4, 2 | 2006-04-04 |
| Phase determination of a radiation wave field Grant 6,885,442 - Nugent , et al. April 26, 2 | 2005-04-26 |
| Phase determination of a radiation wave field App 20050062957 - Nugent, Keith ; et al. | 2005-03-24 |
| Method for the manufacture of phase shifting masks for EUV lithography App 20040062999 - Stearns, Daniel G. ; et al. | 2004-04-01 |
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